公开(公告)号：US20190227005A1

公开(公告)日：2019-07-25

申请号：US16205801

申请日：2017-07-12

Applicant: Rigaku Corporation

Inventor： Kiyoshi Ogata ,  Kazuhiko Omote ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Hiroshi Motono ,  Hideaki Takahashi ,  Takao Kinefuchi ,  Akifusa Higuchi ,  Shiro Umegaki ,  Shigematsu Asano ,  Ryotaro Yamaguchi ,  Katsutaka Horada ,  Makoto Kambe ,  Licai Jiang ,  Boris Verman

IPC: G01N23/20016 ,  G01B15/02 ,  G21K1/06 ,  G01N23/207 ,  G01N23/20025

Abstract: In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.