公开(公告)号：US20200312628A1

公开(公告)日：2020-10-01

申请号：US16803969

申请日：2020-02-27

Applicant: ReCarbon, Inc.

Inventor： Stefan Andrew McClelland ,  George Stephen Leonard III ,  Jae Mo Koo

IPC: H01J37/32 ,  H05H1/46 ,  C23C16/511

Abstract: A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and an EM seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.

公开(公告)号：US20200312627A1

公开(公告)日：2020-10-01

申请号：US16752689

申请日：2020-01-26

Applicant: ReCarbon, Inc.

Inventor： Stefan Andrew McClelland ,  George Stephen Leonard, III ,  Jae Mo Koo

IPC: H01J37/32

Abstract: The present invention provides a plasma generating system that includes: a waveguide for transmitting a microwave energy therethrough; an inner wall disposed within the waveguide to define a plasma cavity, wherein a plasma is generated within the plasma cavity using the microwave energy; a first gas inlet mounted on a first side of the waveguide and configured to introduce a first gas into the plasma cavity and generate a first vortex flow within the plasma cavity using the first gas, the first gas inlet having a through hole through which a gas processed by the plasma exits the plasma cavity; and a plasma stabilizer having a shape of a circular hollow cylinder and installed on a second side of the waveguide, an axial direction of the plasma stabilizer being in parallel to a rotational axis of the first vortex flow.