公开(公告)号：US20200312628A1

公开(公告)日：2020-10-01

申请号：US16803969

申请日：2020-02-27

申请人： ReCarbon, Inc.

发明人： Stefan Andrew McClelland ,  George Stephen Leonard III ,  Jae Mo Koo

IPC分类号： H01J37/32 ,  H05H1/46 ,  C23C16/511

摘要： A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and an EM seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.