公开(公告)号：US11226202B2

公开(公告)日：2022-01-18

申请号：US16640882

申请日：2018-08-08

Applicant: Robert Bosch GmbH

Inventor： Odd-Axel Pruetz ,  Andreas Lassi ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5712 ,  G01C19/5755 ,  G01C19/5747

Abstract: A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate about a second axis and a second outside rotation rate about a third axis, the first, second and third axes being situated perpendicularly to one another, and a second rotation rate sensor unit linearly drivable by a drive unit along the second axis in an oscillating manner for detecting a third outside rotation rate about the first axis. The second rotation rate sensor unit is connected to the first rotation rate sensor unit via a first coupling unit for driving the first rotation rate sensor unit by the drive unit.

公开(公告)号：US10900785B2

公开(公告)日：2021-01-26

申请号：US16127791

申请日：2018-09-11

Applicant: Robert Bosch GmbH

Inventor： Niels Bode ,  Andreas Lassi ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5762 ,  G01C19/5747 ,  G01C19/5712

Abstract: A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.

公开(公告)号：US20200378761A1

公开(公告)日：2020-12-03

申请号：US16636798

申请日：2018-07-30

Applicant: Robert Bosch GmbH

Inventor： Jan-Timo Liewald ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5705 ,  G01C19/5747

Abstract: A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater extension in the first main-extension-direction than in the second main-extension-direction.