CAPACITIVE PRESSURE SENSOR, MANUFACTURING METHOD THEREOF, AND PRESSURE SENSOR PACKAGE
    11.
    发明申请
    CAPACITIVE PRESSURE SENSOR, MANUFACTURING METHOD THEREOF, AND PRESSURE SENSOR PACKAGE 有权
    电容式压力传感器及其制造方法和压力传感器封装

    公开(公告)号:US20130327149A1

    公开(公告)日:2013-12-12

    申请号:US13912434

    申请日:2013-06-07

    Applicant: ROHM CO., LTD.

    Inventor: Goro NAKATANI

    CPC classification number: G01L9/12 G01L9/0073

    Abstract: A capacitive pressure sensor includes a semiconductor substrate, a first insulating portion configured to define a sensor region, a reference pressure chamber configured to divide a lower portion of the sensor region in a direction, a second insulating portion configured to divide a surface portion of the sensor region above the reference pressure chamber in the direction, and a trench configured to divide the sensor region in the direction. The sensor region is divided into at least three semiconductor parts by the reference pressure chamber, the second insulating portion, and the trench.

    Abstract translation: 电容式压力传感器包括半导体衬底,被配置为限定传感器区域的第一绝缘部分,被配置为在传感器区域的一个方向上分隔下部的基准压力室,构造成将传感器区域的表面部分分割成的第二绝缘部分 传感器区域在所述方向上在所述参考压力室上方,以及沟槽,被配置为沿所述方向划分所述传感器区域。 传感器区域被参考压力室,第二绝缘部分和沟槽分成至少三个半导体部件。

    PHOTOELECTRIC CONVERTER AND METHOD FOR MANUFACTURING THE SAME
    13.
    发明申请
    PHOTOELECTRIC CONVERTER AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    光电转换器及其制造方法

    公开(公告)号:US20150214259A1

    公开(公告)日:2015-07-30

    申请号:US14659673

    申请日:2015-03-17

    Applicant: ROHM CO., LTD.

    Abstract: A photoelectric converter according to the present invention includes an insulating layer, a plurality of lower electrodes that are mutually spaced and disposed on the insulating layer, a photoabsorption layer made of a chalcopyrite compound semiconductor and formed to cover the plurality of lower electrodes all together, and a transparent conductive film formed to cover the photoabsorption layer. Variation of sensitivity among pixels due to influence (damage) by etching of the photoabsorption layer is thereby eliminated and a pixel aperture ratio can be made 100%.

    Abstract translation: 根据本发明的光电转换器包括绝缘层,相互间隔并设置在绝缘层上的多个下电极,由黄铜矿化合物半导体制成并形成为一起覆盖多个下电极的光吸收层, 以及形成为覆盖光吸收层的透明导电膜。 由此消除了由于光吸收层的蚀刻引起的影响(损伤)的像素之间的灵敏度的变化,并且可以使像素开口率为100%。

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