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公开(公告)号:US11770658B2
公开(公告)日:2023-09-26
申请号:US17182911
申请日:2021-02-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyunwook Kang , Sungchan Kang , Cheheung Kim , Choongho Rhee , Hyeokki Hong
CPC classification number: H04R17/10 , H04R17/02 , H10N30/306 , H10N39/00 , G01H1/00 , H03H9/02244 , H03H9/02259 , H03H9/17 , H03H9/2405
Abstract: Provided is a sensor interface including a first cantilever beam bundle including at least one resonator and a first output terminal, a second cantilever beam bundle including at least one resonator and a second output terminal, and a differential amplifier including a first input terminal electrically connected to the first output terminal of the first cantilever beam bundle and a second input terminal electrically connected to the second output terminal of the second cantilever beam bundle.
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公开(公告)号:US11747192B2
公开(公告)日:2023-09-05
申请号:US17348184
申请日:2021-06-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyunwook Kang , Cheheung Kim , Daehyuk Son , Hyeokki Hong
CPC classification number: G01H11/00 , G01H1/06 , G01H11/02 , G01S3/802 , H03H9/02 , H03H17/02 , H03H17/0233 , H04R1/20 , H04R1/406 , H04R2410/01 , H04R2430/20
Abstract: An acoustic sensor assembly includes a non-directional acoustic sensor having a first directional pattern, a plurality of directional acoustic sensors surrounding the non-directional acoustic sensor and including a plurality of resonators having different resonance frequencies from each other, each of the plurality of directional acoustic sensors having a second directional pattern, and a processor configured to obtain output signals from the non-directional acoustic sensor and the plurality of directional acoustic sensors. The processor is further configured to calculate an acoustic signal having directivity by selecting any one or any combination of the obtained output signals or selectively combining the obtained output signals, and obtain sound around the acoustic sensor assembly, using the calculated acoustic signal.
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公开(公告)号:US11665456B2
公开(公告)日:2023-05-30
申请号:US17193720
申请日:2021-03-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyeokki Hong , Hyunwook Kang , Sungchan Kang , Cheheung Kim
Abstract: A multi-function acoustic sensor may include a plate structure having a plurality of open spaces that are spaced apart from each other; a plurality of sensors provided on the plate structure, the plurality of sensors including a plurality of sensor elements respectively provided to overlap the plurality of open spaces; and a case having an inner space in which the plurality of sensors are provided, the case including: a first case surface on which the plurality of sensors are provided, the first case surface having at least one first hole, and a second case surface opposite to the first case surface, the second case surface having at least one second hole, wherein the at least one first hole and the at least one second hole form at least one path along which sound is transmitted and sensed through at least one of the plurality of open spaces of the plate structure.
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公开(公告)号:US11627410B2
公开(公告)日:2023-04-11
申请号:US17717920
申请日:2022-04-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Cheheung Kim , Sungchan Kang , Hyeokki Hong , Hyunwook Kang , Yongseop Yoon , Choongho Rhee
Abstract: A compact directional acoustic sensor having an improved signal-to-noise ratio is disclosed. The disclosed directional acoustic sensor includes a first sensing device configured to generate different output gains based on different input directions of external energy, and configured to generate at least one first output signal having a first polarity based on external energy received from an input direction; a second sensing device configured to generate different output gains based on different input directions of external energy, and configured to generate at least one second output signal having a second polarity, that is different than the first polarity, based on the external energy received from the input direction; and at least one signal processor configured to generate at least one final output signal based on the at least one first output signal and the at least one second output signal.
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公开(公告)号:US11262234B2
公开(公告)日:2022-03-01
申请号:US16574916
申请日:2019-09-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sungchan Kang , Hyunwook Kang , Yongseop Yoon , Jaehyung Jang
Abstract: A directional acoustic sensor may include a plurality of resonators arranged in different directions; and a processor configured to calculate a time difference between a first signal that is received by the plurality of resonators directly from a sound source (e.g., a speaker) and a second signal that is received by the plurality of resonators from the sound source after being reflected on a wall surface around the sound source, and determine a distance between the sound source and the directional acoustic sensor based on the time difference.
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公开(公告)号:US20210013043A1
公开(公告)日:2021-01-14
申请号:US16696513
申请日:2019-11-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Choongho Rhee , Sungchan Kang , Hyunwook Kang , Cheheung Kim , Yongseop Yoon , Jaehyung Jang , Hyeokki Hong
IPC: H01L21/3065 , H01L21/56 , H01L21/02 , H01L21/683
Abstract: Provided is a plasma dicing method. The plasma dicing method includes: performing plasma etching on a first surface of a substrate exposed between a plurality of membrane structures; forming a passivation layer on a semiconductor wafer to cover the plurality of membrane structures and at least one trench; performing plasma etching on a second surface of the substrate such that a through hole exposing a portion of the plurality of membrane structures and a dicing lane connected to the trench and having a width less than a width of the through hole are formed at the substrate; and removing the passivation layer and singulating the semiconductor wafer into a plurality of devices including a membrane partially exposed by the through hole.
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