公开(公告)号：US20150158239A1

公开(公告)日：2015-06-11

申请号：US14407510

申请日：2013-08-23

申请人： SCIVAX CORPORATION

发明人： Hirosuke Kawaguchi ,  Tatsuya Hagino ,  Satoru Tanaka

IPC分类号： B29C59/02

CPC分类号： B29C59/02 ,  B29C43/10 ,  B29C43/12 ,  B29C43/36 ,  B29C51/28 ,  B29C2043/025 ,  B29C2043/3233 ,  B29C2043/3605 ,  B29C2043/3647 ,  B29C2043/3652 ,  B29C2059/023 ,  B29C2791/006 ,  B29C2791/007 ,  B29D11/00 ,  B29D11/00336 ,  B82Y40/00 ,  G03F7/0002

摘要： An imprint device and an imprint method which form mold patterns on both surfaces of a molding target. An imprint device transfers mold patterns on both surfaces of a molding target using flexible first and second dies and includes first and second casings which each apply pressure of first and second pressurizing rooms respectively, to the first and second dies respectively and the molding target, a pressurizer that adjusts the pressures of the pressurizing rooms, first and second moving units that move the first and second dies respectively and the molding target in a direction coming close to or distant from each other, a depressurizer that depressurizes a depressurizing room formed between the first and second casings, and eliminates fluids present between the dies and the molding target, and a pressure adjuster that adjusts pressures to reduce pressure differences between the depressurizing room and the pressurizing rooms.

摘要翻译： 在模制对象的两个表面上形成模具图案的压印装置和压印方法。 压印装置使用柔性第一和第二模具在模制对象的两个表面上传送模具图案，并且包括分别将第一和第二加压室分别施加到第一和第二模具以及模制对象的第一和第二壳体， 调节加压室的压力的压力调节装置，分别使第一和第二模具分别移动和成型目标的第一和第二移动单元在彼此接近或远离的方向上调节压力;减压器，其对形成在第一和第二模具之间的减压室进行减压; 和第二壳体，并且消除存在于模具和成型靶之间的流体，以及压力调节器，其调节压力以减小减压室和加压室之间的压力差。

公开(公告)号：US20150042013A1

公开(公告)日：2015-02-12

申请号：US14377934

申请日：2013-02-13

申请人： SCIVAX CORPORATION

发明人： Hirosuke Kawaguchi ,  Satoru Tanaka

IPC分类号： B29C59/02 ,  B29C59/00 ,  B29C71/04

CPC分类号： B29C59/022 ,  B29C59/002 ,  B29C59/02 ,  B29C71/04 ,  B29C2059/023 ,  B29C2791/006 ,  G03F7/0002

摘要： An imprinting device having a stage and a cover that depress the die and the molding target, a frame formed with a hole into which the stage is fitted and surrounding an outer circumference thereof, a first moving means for relatively moving the stage and the cover in a direction coming close to or becoming apart from each other, a second moving means for relatively moving the cover and the frame in a direction coming close to or becoming apart from each other, a first depressurizing means for depressurizing a depressurizing room formed any one of the cover, the die or the molding target, and the stage, and further the frame, and eliminating a fluid between the die and the molding target, and a second depressurizing means for eliminating a fluid in a space between the cover and the die or the molding target. The imprinting device can be thus downsized and costs can be reduced.

摘要翻译： 一种压印装置，具有使模具和模制对象物成型的台阶和盖体，形成有台架并围绕其外周的孔的框架;第一移动装置，用于使台架和盖子相对移动 靠近或彼此分开的方向的第二移动装置，用于相对于彼此靠近或彼此分开的方向相对移动盖和框架的第二移动装置，用于对形成任何一个的减压室进行减压的第一减压装置 盖，模具或成型目标以及台架，以及框架，并且消除模具和模制目标之间的流体;以及第二减压装置，用于消除盖和模具之间的空间中的流体，或 成型目标。 因此，压印装置可以小型化并且可以降低成本。

公开(公告)号：US20140319718A1

公开(公告)日：2014-10-30

申请号：US14359647

申请日：2012-11-21

申请人： SCIVAX CORPORATION

发明人： Hirosuke Kawaguchi ,  Satoru Tanaka

IPC分类号： B29C59/02

CPC分类号： G03F7/0002 ,  B29C59/02 ,  B29C59/022 ,  B29C2059/023 ,  B29C2791/006 ,  H01L21/565

摘要： An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.

摘要翻译： 将模具上的模具图案转印到模制品上的压印装置包括形成压力调节室的壳体，支撑模具和成型目标的支架，围绕平台的周边的框架，移动壳体的第一移动装置 并且在彼此靠近或彼此远离的方向上的台阶，第二移动装置使壳体和框架沿彼此靠近或彼此远离的方向移动;调节装置，其调节压力 压力调节室中的流体的减压装置，以及减压装置，其对由载物台，框架和模具或模制目标物形成的减压室进行减压，并且消除了模具和模制目标之间存在的流体。