公开(公告)号：US10433068B2

公开(公告)日：2019-10-01

申请号：US15365590

申请日：2016-11-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Matteo Perletti ,  Igor Varisco ,  Luca Lamagna ,  Silvia Adorno ,  Gabriele Gattere ,  Carlo Valzasina ,  Sebastiano Conti

IPC: H04R25/00 ,  H04R19/00 ,  B81B3/00 ,  B81C1/00 ,  G01H11/06 ,  H04R31/00

Abstract: A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.