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公开(公告)号：US10809140B2
公开(公告)日：2020-10-20
申请号：US14980373
申请日：2015-12-28
Applicant: STMicroelectronics S.R.L.
Inventor： Enri Duqi , Sebastiano Conti , Sonia Costantini
Abstract: A pressure sensor designed to detect a value of ambient pressure of the environment external to the pressure sensor includes: a first substrate having a buried cavity and a membrane suspended over the buried cavity; a second substrate having a recess, hermetically coupled to the first substrate so that the recess defines a sealed cavity the internal pressure value of which provides a pressure-reference value; and a channel formed at least in part in the first substrate and configured to arrange the buried cavity in communication with the environment external to the pressure sensor. The membrane undergoes deflection as a function of a difference of pressure between the pressure-reference value in the sealed cavity and the ambient-pressure value in the buried cavity.
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2.发明授权公开(公告)号：US10549982B2
公开(公告)日：2020-02-04
申请号：US15884624
申请日：2018-01-31
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Bruno Murari , Sebastiano Conti
Abstract: A packaged pressure sensor, comprising: a MEMS pressure-sensor chip; and an encapsulating layer of elastomeric material, in particular PDMS, which extends over the MEMS pressure-sensor chip and forms a means for transferring a force, applied on a surface thereof, towards the MEMS pressure-sensor chip.
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3.发明授权公开(公告)号：US10433068B2
公开(公告)日：2019-10-01
申请号：US15365590
申请日：2016-11-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Matteo Perletti , Igor Varisco , Luca Lamagna , Silvia Adorno , Gabriele Gattere , Carlo Valzasina , Sebastiano Conti
Abstract: A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.
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公开(公告)号：US20170031153A1
公开(公告)日：2017-02-02
申请号：US15293061
申请日：2016-10-13
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
CPC classification number: G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。
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公开(公告)号：US20150217990A1
公开(公告)日：2015-08-06
申请号：US14607714
申请日：2015-01-28
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti
CPC classification number: B81B3/0062 , B81B3/0043 , B81B7/008 , B81B2201/018 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B26/0841 , G03B21/142 , G03B21/2033 , G03B21/28
Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.
Abstract translation: MEMS器件具有通过支撑区域经由一对关节臂支撑的悬挂质量。 耦合到关节臂的静电驱动系统具有彼此耦合的移动电极和固定电极。 静电驱动系统由两对致动组件形成，这两对致动组件布置在相应的关节臂的相对侧上，并通过连接元件连接到关节臂上。 每个致动组件横向延伸到悬挂质量块，并具有一个载有相应多个移动电极的辅助臂。 每个辅助臂平行于铰接臂。 连接元件可以是刚性的或通过连杆形成。
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Patent Agency Ranking
6.发明授权公开(公告)号：US08787600B2
公开(公告)日：2014-07-22
申请号：US13861324
申请日：2013-04-11
Applicant: STMicroelectronics S.r.l.
Inventor： Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
IPC: H04R25/00
CPC classification number: B81C1/00158 , B81B3/0018 , B81B7/0061 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48479 , H01L2924/00014 , H01L2924/16151 , H01L2924/16152 , H04R1/04 , H04R1/06 , H04R1/086 , H04R1/2838 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2224/48471 , H01L2224/4554 , H01L2924/00012
Abstract: A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.
Abstract translation: 微机电声换能器组件具有：集成具有膜的MEMS感测结构的第一模具，其具有与前室相反流体连通的第一表面和与第一表面相对的第二表面，与第一表面流体连通， 微机电声换能器的腔室能够经受作为入射声压波函数的变形，并且面向刚性电极以形成可变电容电容器; 集成了可操作地耦合到MEMS感测结构并且提供作为电容变化的函数的电输出信号的电子阅读电路; 以及包装体，其容纳所述第一模具和所述第二模具，并且具有带有外部电触点的基底基板。 第一和第二骰子堆叠在包装中并机械和电气直接连接在一起; 该包装限定前室和后室中的至少一个。
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公开(公告)号：US10484798B2
公开(公告)日：2019-11-19
申请号：US15904209
申请日：2018-02-23
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Sebastiano Conti , Igino Padovani , Filippo David
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane, provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane, provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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公开(公告)号：US10239748B2
公开(公告)日：2019-03-26
申请号：US14511002
申请日：2014-10-09
Applicant: STMicroelectronics S.r.l.
Inventor： Luca Maggi , Sebastiano Conti
Abstract: A microelectromechanical device includes: a substrate; a semiconductor die, bonded to the substrate and incorporating a microstructure; an adhesive film layer between the die and the substrate; and a protective layer between the die and the adhesive film layer. The protective layer has apertures, and the adhesive film layer adheres to the die through the apertures of the protective layer.
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公开(公告)号：US09961451B2
公开(公告)日：2018-05-01
申请号：US14858997
申请日：2015-09-18
Applicant: STMicroelectronics S.r.l.
Inventor： Germano Nicollini , Silvia Adorno , Andrea Barbieri , Federica Barbieri , Sebastiano Conti , Edoardo Marino , Sergio Pernici
CPC classification number: H04R19/005 , H04R19/02 , H04R19/04 , H04R2201/003 , H04R2499/11 , H04R2499/15
Abstract: A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.
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公开(公告)号：US20180031823A1
公开(公告)日：2018-02-01
申请号：US15465742
申请日：2017-03-22
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Massimiliano Merli , Sebastiano Conti
IPC: G02B26/08 , H01L41/332 , G03B21/00 , H01L41/053
CPC classification number: G02B26/0858 , G03B21/008 , H01L41/053 , H01L41/332
Abstract: An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.
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