公开(公告)号：US09332354B2

公开(公告)日：2016-05-03

申请号：US14254511

申请日：2014-04-16

Applicant: STMicroelectronics S.r.l.

Inventor： Sebastiano Conti ,  Marco Salina ,  Luca Lamagna ,  Matteo Perletti

IPC: H04R25/00 ,  H04R23/00 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

CPC classification number: H04R23/00 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate made of semiconductor material, having a front surface lying in a horizontal plane; a membrane, coupled to the substrate and designed to undergo deformation in the presence of incident acoustic-pressure waves; a fixed electrode, which is rigid with respect to the acoustic-pressure waves and is coupled to the substrate by means of an anchorage structure, in a suspended position facing the membrane to form a detection capacitor. The anchorage structure has at least one pillar element, which is at least in part distinct from the fixed electrode and supports the fixed electrode in a position parallel to the horizontal plane.

Abstract translation: 一种用于MEMS电容式声换能器的微机械结构，具有：由半导体材料制成的基板，其前表面位于水平面; 膜，其耦合到基底并设计成在存在入射声压波的情况下经历变形; 固定电极，其相对于声压波是刚性的，并且通过锚定结构耦合到衬底，处于面向膜的悬挂位置以形成检测电容器。 锚固结构具有至少一个柱元件，其至少部分地不同于固定电极，并且将固定电极支撑在平行于水平面的位置。

公开(公告)号：US11137592B2

公开(公告)日：2021-10-05

申请号：US16248379

申请日：2019-01-15

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Lamagna ,  Stefano Losa ,  Silvia Rossini ,  Federico Vercesi ,  Elena Cianci ,  Graziella Tallarida ,  Claudia Wiemer

IPC: G02B26/08 ,  G02B1/18 ,  G02B1/14 ,  B81B1/00 ,  G02B5/08

Abstract: A micromechanical mirror structure includes a mirror element designed to reflect an incident light radiation and a protective structure arranged over the mirror element to provide mechanical protection for the mirror element and to increase the reflectivity of the mirror element with respect to the incident light radiation. The protective structure has a first protective layer and a second protective layer which are stacked on the mirror element. The second protective layer is arranged on the first protective layer and the first protective layer is arranged on the mirror element. The layers include a respective dielectric material and having respective refractive indexes that jointly increase the reflectivity of the mirror element in a range of wavelengths of interest.

公开(公告)号：US10433068B2

公开(公告)日：2019-10-01

申请号：US15365590

申请日：2016-11-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Matteo Perletti ,  Igor Varisco ,  Luca Lamagna ,  Silvia Adorno ,  Gabriele Gattere ,  Carlo Valzasina ,  Sebastiano Conti

IPC: H04R25/00 ,  H04R19/00 ,  B81B3/00 ,  B81C1/00 ,  G01H11/06 ,  H04R31/00

Abstract: A MEMS acoustic transducer provided with: a substrate of semiconductor material, having a back surface and a front surface opposite with respect to a vertical direction; a first cavity formed within the substrate, which extends from the back surface to the front surface; a membrane which is arranged at the upper surface, suspended above the first cavity and anchored along a perimeter thereof to the substrate; and a combfingered electrode arrangement including a number of mobile electrodes coupled to the membrane and a number of fixed electrodes coupled to the substrate and facing respective mobile electrodes for forming a sensing capacitor, wherein a deformation of the membrane as a result of incident acoustic pressure waves causes a capacitive variation of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane and extends parallel thereto.