公开(公告)号：US10782468B2

公开(公告)日：2020-09-22

申请号：US15730415

申请日：2017-10-11

Applicant: STMicroelectronics SA

Inventor： Folly Eli Ayi-Yovo ,  Cédric Durand ,  Frédéric Gianesello

IPC: F21V8/00 ,  G02B6/02 ,  G02B6/36 ,  G02B6/30 ,  B23K26/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622 ,  G02B6/12 ,  B23K103/00

Abstract: The present invention relates to a method for manufacturing an optical device comprising forming a first trench in a glass plate and a second trench perpendicular to the first trench, wherein the first trench has an end opening into the second trench. The trenches are treated with hydrofluoric acid. The first trench is filled with a material to form a waveguide, and a mirror is formed on the wall of the second trench opposite the waveguide. An encapsulation layer is deposited over the glass plate, waveguide and second trench.

公开(公告)号：US20180106969A1

公开(公告)日：2018-04-19

申请号：US15499261

申请日：2017-04-27

Applicant: STMicroelectronics SA

Inventor： Cédric Durand ,  Frédéric Gianesello ,  Folly Eli Ayi-Yovo

IPC: G02B6/30 ,  C03C23/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622

CPC classification number: G02B6/30 ,  B23K26/0624 ,  B23K26/364 ,  B23K26/402 ,  B23K2103/54 ,  C03C17/09 ,  C03C23/0025

Abstract: A method of manufacturing a waveguide in a glass plate is disclosed. The glass plate is scanned with a laser beam directed orthogonally to the glass plate to form a trench according to a pattern of the waveguide to be formed. The scanning is performed by pulses of the laser beam having a duration between 2 and 500 femtoseconds. The glass plate with the trench is treated with hydrofluoric acid. After treating the glass plate, the trench is filled with a material having an index different from that of glass, and, after filling the trench, a cladding layer is deposited.