公开(公告)号：US20210405085A1

公开(公告)日：2021-12-30

申请号：US17472126

申请日：2021-09-10

Applicant: STMicroelectronics, Inc.

Inventor： Davy Choi ,  Yamu Hu ,  Deyou Fang

IPC: G01P21/00 ,  G01P15/125 ,  G01R19/10 ,  G01R31/28

Abstract: In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.

公开(公告)号：US20180335446A1

公开(公告)日：2018-11-22

申请号：US15599234

申请日：2017-05-18

Applicant: STMicroelectronics, Inc.

Inventor： Davy Choi ,  Yamu Hu ,  Deyou Fang

IPC: G01P21/00 ,  G01P15/125 ,  G01R19/10 ,  G01R27/26 ,  G01R19/165

Abstract: In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.