公开(公告)号：US20160207757A1

公开(公告)日：2016-07-21

申请号：US15085901

申请日：2016-03-30

Applicant: STMicroelectronics S.R.L.

Inventor： Angelo Antonio Merassi

IPC: B81B3/00

CPC classification number: B81B3/0072 ,  B81B2201/0242 ,  G01P1/006 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A micromechanical structure of a MEMS device, integrated in a die of semiconductor material provided with a substrate and having at least a first axis of symmetry lying in a horizontal plane, has a stator structure, which is fixed with respect to the substrate, and a rotor structure, having a suspended mass, mobile with respect to the substrate and to the stator structure as a result of an external action, the stator structure having fixed sensing electrodes capacitively coupled to the rotor structure; a compensation structure is integrated in the die for compensation of thermo-mechanical strains. The compensation structure has stator compensation electrodes, which are fixed with respect to the substrate, are capacitively coupled to the rotor structure, and are arranged symmetrically to the fixed sensing electrodes with respect to the first axis of symmetry.

Abstract translation: MEMS器件的微机械结构集成在具有衬底并且至少具有位于水平面中的第一对称轴线的半导体材料的管芯中，具有相对于衬底固定的定子结构，以及 转子结构，具有悬挂质量，相对于衬底移动并由于外部动作导致定子结构，定子结构具有电容耦合到转子结构的固定感测电极; 补偿结构集成在模具中用于补偿热机械应变。 补偿结构具有相对于基板固定的定子补偿电极，电容耦合到转子结构，并且相对于第一对称轴对称地设置在固定感测电极上。

公开(公告)号：US09340413B2

公开(公告)日：2016-05-17

申请号：US14035798

申请日：2013-09-24

Applicant: STMicroelectronics S.r.l.

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Luca Coronato

IPC: H04R25/00 ,  B81C1/00 ,  B81B3/00 ,  H04R7/24 ,  H04R19/00 ,  H04R31/00 ,  H04R19/04

CPC classification number: B81C1/00182 ,  B81B3/0035 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R7/24 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.