公开(公告)号：US09217641B2

公开(公告)日：2015-12-22

申请号：US14332211

申请日：2014-07-15

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Carlo Caminada ,  Luciano Prandi ,  Ernesto Lasalandra

IPC: G01C19/00 ,  G01C19/5712 ,  G01C19/5726 ,  G01C19/5762

CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.

Abstract translation: 一种微机电陀螺仪，其包括可根据第一轴可振荡的第一质量; 包括第二质量的惯性传感器，其响应于所述陀螺仪的旋转而被所述第一质量拉伸并被约束以便根据第二轴线振荡; 耦合到所述第一质量块的驱动装置，以便形成反馈控制回路并且被配置为将所述第一质量块以共振频率保持在振荡状态; 以及耦合到所述惯性传感器的开环读取装置，用于根据所述第二轴检测所述第二质量块的位移。 驱动装置包括一个读信号发生器，用于向惯性传感器提供至少一个具有振幅方波信号的形式的读信号，正弦波信号随谐振频率正弦变化。

公开(公告)号：US09212910B2

公开(公告)日：2015-12-15

申请号：US13648215

申请日：2012-10-09

Applicant: STMicroelectronics S.r.l.

Inventor： Andrea Donadel ,  Tommaso Ungaretti ,  Carlo Caminada ,  Luciano Prandi

IPC: G01C15/14 ,  G01P3/44 ,  G01C19/5776

CPC classification number: G01C19/5776

Abstract: A microelectromechanical gyroscope having a supporting structure; a mass capacitively coupled to the supporting structure and movable with a first degree of freedom and a second degree of freedom, in response to rotations of the supporting structure about an axis; driving components, for keeping the mass in oscillation according to the first degree of freedom; a read interface for detecting transduction signals indicating the capacitive coupling between the mass and the supporting structure; and capacitive compensation modules for modifying the capacitive coupling between the mass and the supporting structure. Calibration components detect systematic errors from the transduction signals and modify the capacitive compensation modules as a function of the transduction signals so as to attenuate the systematic errors.

Abstract translation: 一种具有支撑结构的微电子陀螺仪; 电容耦合到所述支撑结构并且响应于所述支撑结构围绕轴的旋转以第一自由度和第二自由度移动的质量; 驱动部件，用于根据第一自由度保持质量摆动; 用于检测表示所述质量块和所述支撑结构之间的电容耦合的转导信号的读取界面; 以及用于修改质量块和支撑结构之间的电容耦合的电容补偿模块。 校准组件检测来自转导信号的系统误差，并修改电容补偿模块作为转导信号的函数，以便衰减系统误差。

公开(公告)号：USRE48086E1

公开(公告)日：2020-07-07

申请号：US13952514

申请日：2013-07-26

Applicant: STMicroelectronics S.r.l.

Inventor： Luciano Prandi ,  Carlo Caminada ,  Paolo Invernizzi

IPC: H03D1/00 ,  G01C19/00

Abstract: A demodulator is provided for demodulating an amplitude-modulated input signal defined by a carrier signal having a carrier frequency modulated by a modulating signal, the demodulator including an amplifier stage having a gain and structured to receive the amplitude-modulated input signal, and a gain control stage coupled to the amplifier stage and configured to vary the gain of the amplifier stage according to the carrier frequency of the carrier signal.

公开(公告)号：US09234755B2

公开(公告)日：2016-01-12

申请号：US13886774

申请日：2013-05-03

Applicant: STMicroelectronics S.r.l.

Inventor： Luciano Prandi ,  Carlo Caminada ,  Alessandra Maria Rizzo Piazza Roncoroni

IPC: G01C19/56 ,  G01C19/5726 ,  G01C19/5762

CPC classification number: G01C19/56 ,  G01C19/5726 ,  G01C19/5762

Abstract: A gyroscope includes a body, a driving mass, which is mobile according to a driving axis, and a sensing mass, which is driven by the driving mass and is mobile according to a sensing axis, in response to rotations of the body. A driving device forms a microelectromechanical control loop with the body and the driving mass and maintains the driving mass in oscillation with a driving frequency. The driving device comprises a frequency detector, which supplies a clock signal at the frequency of oscillation of the driving mass, and a synchronization stage, which applies a calibrated phase shift to the clock signal so as to compensate a phase shift caused by components of the loop that are set between the driving mass and the control node.

公开(公告)号：USRE45439E1

公开(公告)日：2015-03-31

申请号：US13946882

申请日：2013-07-19

Applicant: STMicroelectronics S.r.l.

Inventor： Luciano Prandi ,  Carlo Caminada ,  Ernesto Lasalandra

IPC: G01C19/00 ,  G01C23/00

CPC classification number: G01C23/005 ,  G01C19/5726 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope having a microstructure that includes a first mass and a second mass, wherein the first mass is oscillatable according to a first axis and the second mass is constrained to the first mass so as to be drawn along by the first mass according to the first axis and to oscillate according to a second axis, in response to a rotation of the microstructure, a driving device coupled to the microstructure to maintain the first mass in oscillation at the driving frequency, and a reading device that detects displacements of the second mass according to the second axis. The gyroscope is provided with a self-test actuation system coupled to the second mass for applying an electrostatic force at the driving frequency so as to move the second mass according to the second axis.

Abstract translation: 具有包括第一质量和第二质量的微结构的微机电陀螺仪，其中所述第一质量可根据第一轴线振荡，并且所述第二质量块被约束为所述第一质量，以便根据所述第一质量块沿着所述第一质量块 第一轴线，并且响应于所述微结构的旋转而根据第二轴线振荡，耦合到所述微结构以将所述第一质量块保持在所述驱动频率处振荡的驱动装置;以及读取装置，其检测所述第二质量块的位移 根据第二轴。 陀螺仪设置有耦合到第二质量块的自检致动系统，用于在驱动频率处施加静电力，以便根据第二轴线移动第二质量块。

公开(公告)号：US08820136B2

公开(公告)日：2014-09-02

申请号：US13890991

申请日：2013-05-09

Applicant: STMicroelectronics S.r.l.

Inventor： Andrea Donadel ,  Luciano Prandi ,  Carlo Caminada

IPC: G01C19/56

CPC classification number: G01P21/00 ,  G01C19/56

Abstract: A microelectromechanical gyroscope includes a body and a sensing mass, which is movable with a degree of freedom in response to rotations of the body about an axis. A self-test actuator is capacitively coupled to the sensing mass for supplying a self-test signal. The capacitive coupling causes, in response to the self-test signal, electrostatic forces that are able to move the sensing mass in accordance with the degree of freedom at an actuation frequency. A sensing device detects transduction signals indicating displacements of the sensing mass in accordance with the degree of freedom. The sensing device is configured for discriminating, in the transduction signals, spectral components that are correlated to the actuation frequency and indicate the movement of the sensing mass as a result of the self-test signal.

Abstract translation: 微机电陀螺仪包括主体和感测质量块，其能够响应于身体围绕轴的旋转而具有自由度移动。 自检致动器电容耦合到感测质量块，用于提供自检信号。 电容耦合响应于自检信号，使得能够根据致动频率下的自由度移动感测质量的静电力。 感测装置根据自由度检测指示感测质量的位移的换能信号。 感测装置被配置为在转导信号中鉴别与致动频率相关的频谱分量，并且指示感测质量作为自检信号的结果的移动。

公开(公告)号：US20130249642A1

公开(公告)日：2013-09-26

申请号：US13904847

申请日：2013-05-29

Applicant: STMicroelectronics S.r.l.

Inventor： Alessandra Maria Rizzo Piazza Roncoroni ,  Carlo Caminada ,  Luciano Prandi

IPC: H03B5/30

CPC classification number: H03B5/30 ,  G01C19/56 ,  H03L3/00

Abstract: A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass.

Abstract translation: 微机电装置包括主体，可移动质量体，弹性地连接到主体并且可以根据自由度移动;以及驱动装置，其联接到可移动质量块，并且被配置为将可移动质量块稳定在稳定的工作频率 在正常的操作模式。 微机电装置还包括启动装置，其可以在启动操作模式下激活，并且被配置为将与可移动质量块的振荡相关的第一信号的当前振荡频率与参考频率进行比较， 基于当前振荡频率和参考频率之间的比较，是否向可移动质量块施加强制信号分组，以将能量传递到可移动质量块。

公开(公告)号：US20130239651A1

公开(公告)日：2013-09-19

申请号：US13890991

申请日：2013-05-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Andrea Donadel ,  Luciano Prandi ,  Carlo Caminada

IPC: G01P21/00

CPC classification number: G01P21/00 ,  G01C19/56

Abstract: A microelectromechanical gyroscope includes a body and a sensing mass, which is movable with a degree of freedom in response to rotations of the body about an axis. A self-test actuator is capacitively coupled to the sensing mass for supplying a self-test signal. The capacitive coupling causes, in response to the self-test signal, electrostatic forces that are able to move the sensing mass in accordance with the degree of freedom at an actuation frequency. A sensing device detects transduction signals indicating displacements of the sensing mass in accordance with the degree of freedom. The sensing device is configured for discriminating, in the transduction signals, spectral components that are correlated to the actuation frequency and indicate the movement of the sensing mass as a result of the self-test signal.

Abstract translation: 微机电陀螺仪包括主体和感测质量块，其能够响应于身体围绕轴的旋转而具有自由度移动。 自检致动器电容耦合到感测质量块，用于提供自检信号。 电容耦合响应于自检信号，使得能够根据致动频率下的自由度移动感测质量的静电力。 感测装置根据自由度检测指示感测质量的位移的换能信号。 感测装置被配置为在转导信号中鉴别与致动频率相关的频谱分量，并且指示感测质量作为自检信号的结果的移动。

公开(公告)号：US20130180331A1

公开(公告)日：2013-07-18

申请号：US13789496

申请日：2013-03-07

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Carlo Caminada ,  Luciano Prandi

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712

Abstract: A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes.

Abstract translation: 多轴陀螺仪包括微机电结构，其被配置为围绕相应的参考轴线以相应的角速度旋转，并且包括在各个检测方向上敏感的检测元件，并且产生作为检测中的角速度的投影的函数的相应检测量 方向。 陀螺仪包括读取电路，其产生电输出信号，每个电流输出信号与各个角速度相关，作为检测量的函数。 读取电路包括组合级，其相对于彼此电连接的电量相关联，所述电量与对于彼此不同的检测方向敏感的检测元件产生的检测量相关联，以便考虑检测的非零倾斜角度 相对于参考轴的方向。