公开(公告)号：US20190211445A1

公开(公告)日：2019-07-11

申请号：US16160757

申请日：2018-10-15

Applicant: Samsung Display Co., Ltd.

Inventor： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

IPC: C23C16/44 ,  C23C16/46

CPC classification number: C23C16/4405 ,  C23C16/46

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

公开(公告)号：US20160097124A1

公开(公告)日：2016-04-07

申请号：US14793562

申请日：2015-07-07

Applicant: Samsung Display Co., Ltd.

Inventor： Myungsoo Huh ,  Dongkyun Ko ,  Choelmin Jang ,  Sungchul Kim ,  Inkyo Kim ,  Cheollae Roh

IPC: C23C16/455 ,  C23C16/50

CPC classification number: C23C16/50 ,  C23C16/45563 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32752 ,  H01J37/32899 ,  H01L51/5256

Abstract: An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.

Abstract translation: 公开了一种制造显示装置的装置和方法。 一方面，该装置包括腔室和形成在腔室中并构造成形成至少一个无机层的无机层形成喷嘴单元。 所述设备还包括形成在所述室中并构造成形成至少一个有机层的有机层形成喷嘴单元，其中所述有机层形成喷嘴单元基本上与所述无机层形成喷嘴单元一致。 该装置还包括形成在无机层形成喷嘴单元和有机层形成喷嘴单元之间的分离喷嘴单元，并且构造成喷射惰性气体。