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公开(公告)号：US09612379B2
公开(公告)日：2017-04-04
申请号：US14704667
申请日：2015-05-05
Applicant: Samsung Display Co. Ltd.
Inventor： Eun Ae Kwak , Min Hyuck Kang , Hyeong Gyu Jang
IPC: H01L27/12 , G02B5/30 , G02B1/18 , G02F1/1335
CPC classification number: G02B5/3058 , G02B1/18 , G02F2001/133548 , H01L27/124
Abstract: A method of fabricating a wire grid polarizer includes sequentially forming a conductive layer, a guide layer, and a surface treatment protection layer on a substrate, patterning the surface treatment protection layer and the guide layer, forming a surface treatment film on side surfaces and upper surfaces of the first and second patterns, removing the first and second surface treatment protection patterns from the respective first and second patterns on which the surface treatment film is formed, to expose upper surfaces of the first and second guide patterns and providing a block copolymer of two monomers having mutually different etch rates into a space defined by the conductive layer and the first and second guide patterns, wherein a transfer layer which is hydrophobic to the block copolymer of two monomers is formed on the upper surfaces of the first and second guide patterns.
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公开(公告)号：US20170090285A1
公开(公告)日：2017-03-30
申请号：US15168665
申请日：2016-05-31
Applicant: Samsung Display Co., Ltd.
Inventor： Min Hyuck Kang , Eun Ae Kwak , Dong Eon Lee , Gug Rae Jo
CPC classification number: G03F7/0751 , C07F7/1804 , C07F7/1872 , C23F1/00 , C23F1/02 , G02B5/3058 , G03F7/0002 , Y02P20/582
Abstract: A method of manufacturing a wire grid pattern includes providing a laminate having a base member, a metal layer disposed on the base member, a mask layer disposed on the metal layer and containing a metal oxide, an adhesive layer disposed on the mask layer, and a patterned resin layer disposed on the adhesive layer and formed by irradiation of first light; and irradiating the laminate with second light. The adhesive layer may comprise a silane coupling agent.
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