公开(公告)号：US11948632B2

公开(公告)日：2024-04-02

申请号：US17497502

申请日：2021-10-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jungyu Lee ,  Hyunkook Parak ,  Jongryul Kim

IPC: G11C11/00 ,  G11C13/00

CPC classification number: G11C13/0004 ,  G11C13/0026 ,  G11C13/0028 ,  G11C13/0038 ,  G11C13/0069

Abstract: A memory device includes a phase change memory (PCM) cell connected between a bit line and a word line. An X-decoder provides a word line voltage to the word line during a reset operation, and a Y-decoder provides a bit line voltage to the bit line during the reset operation. A voltage bias circuit generates the word line voltage and the bit line voltage based on a first bias during a first period of the reset operation, the word line voltage and the bit line voltage based on a second bias greater than the first bias during a second period of the reset operation, and the word line voltage and the bit line voltage based on a third bias smaller than the first and second biases during a third period of the reset operation.

公开(公告)号：US20230392925A1

公开(公告)日：2023-12-07

申请号：US18123788

申请日：2023-03-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jiyoung Chu ,  Hyungjin Kim ,  Minhwan Seo ,  Wondon Joo ,  Dongyoon Koo ,  Sangwoo Bae ,  Sungmin Ahn ,  Jungyu Lee ,  Yunpyo Hong

IPC: G01B11/27 ,  G02B27/28 ,  G02B5/08

CPC classification number: G01B11/272 ,  G02B27/283 ,  G02B27/286 ,  G02B5/0808

Abstract: A method of bonding a die to a wafer using a die bonding system measures, using an obtained image showing interference fringes, a parallelism between the die and the wafer. In some embodiments, parallelism and die deformation are detected using interference fringes produced by an optical apparatus of the die bonding system. A parallelism measurement optical apparatus includes a light source, an optical assembly configured to control polarization of a reference light and a measurement light. In some embodiments, the measurement light is sequentially incident on and reflected from a first measurement surface and a second measurement surface that are spaced apart along a vertical direction to face each other, and is emitted to have information on parallelism between the first and second measurement surfaces. In some embodiments, a first polarizer is configured to interfere the reference light and the measurement light emitted from the optical assembly with each other. A light detector is configured to detect an interference signal of lights including the interference fringes.