LIFT PIN ALIGNMENT METHOD AND ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS

    公开(公告)号:US20210028052A1

    公开(公告)日:2021-01-28

    申请号:US16846792

    申请日:2020-04-13

    Abstract: A substrate processing apparatus and a lift pin alignment apparatus, the substrate processing apparatus including a chamber; a substrate plate on which the substrate is seatable; a plurality of movable lift in the substrate plate to support the substrate; a leveling sensor configured to be loadable in the chamber on the lift pins; a controller configured to receive measurement values of roll (φ) and pitch (θ) of a plane of the lift pins to calculate a rotation matrix (T) of the plane from the measurement values of roll (φ) and pitch (θ), and to calculate travel distances of the lift pins for leveling the plane to be parallel with a horizontal reference plane by using the rotation matrix (T) and to output a lift pin control signal for aligning the lift pins; and a lift pin driver to move the lift pins according to the lift pin control signal.

    POWER DELIVERY APPARATUS
    12.
    发明申请

    公开(公告)号:US20240405585A1

    公开(公告)日:2024-12-05

    申请号:US18608390

    申请日:2024-03-18

    Abstract: Disclosed is a power delivery apparatus for transmitting power through a universal serial bus (USB). The power delivery apparatus may include a driving circuit configured to output an internal operating voltage by an induced electromotive force due to a current flowing through a primary coil. The driving circuit may include secondary coils having different winding directions and may be configured such that a plurality of rectification circuits are coupled in series.

    ELECTRONIC APPARATUS FOR PROVIDING MULTI-OUTPUT AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240107643A1

    公开(公告)日:2024-03-28

    申请号:US18228936

    申请日:2023-08-01

    CPC classification number: H05B45/382 H02M3/33569

    Abstract: An electronic apparatus including a converter including a first transformer, the first transformer including a primary-side winding and a secondary-side winding; a first rectifier connected to the secondary-side winding of the first transformer, and including a diode; and a second transformer including a primary-side winding and a secondary-side winding, wherein the secondary-side winding of the first transformer is a single winding, and the primary-side winding of the second transformer is connected to a node to which the secondary-side winding of the first transformer and the diode included in the first rectifier are connected.

    DISPLAY APPARATUS AND CONTROL METHOD THEREOF
    14.
    发明公开

    公开(公告)号:US20230307947A1

    公开(公告)日:2023-09-28

    申请号:US18130609

    申请日:2023-04-04

    CPC classification number: H02J9/065

    Abstract: A display apparatus is disclosed. The display apparatus includes: a backlight; a main circuit; a power supply configured to output a first power to drive the backlight and a second power to drive the main circuit; a first battery configured to be charged by the first power and supply power to the backlight; a second battery which is connected to the first battery in series, and configured to be charged by the first power and supply power to the backlight and the main circuit; and a control circuit configured to control the first battery and the second battery to be charged with the first power for a first time period, and drive the backlight with first battery power of the first battery and second battery power of the second battery for a second time period.

    DEPOSITION APPARATUS
    15.
    发明申请

    公开(公告)号:US20230037038A1

    公开(公告)日:2023-02-02

    申请号:US17702105

    申请日:2022-03-23

    Abstract: A deposition apparatus, includes a chamber having at least one first gas inlet therein. A fixed chuck is installed in the chamber and an electrostatic chuck is installed on the fixed chuck. An edge ring is disposed on an edge of the electrostatic chuck. A shower head is disposed above the edge ring. A baffle is disposed above the shower head and an upper electrode is disposed above the baffle. A gas guide member is disposed above the upper electrode so that a flow path provided in the upper electrode and the first gas inlet are connected. The gas guide member has a flow path hole penetrating in upward and downward directions, and a plurality of guide holes are provided on an inner surface of the gas guide member.

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