公开(公告)号：US20140239795A1

公开(公告)日：2014-08-28

申请号：US14151166

申请日：2014-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： WOOK-RAE KIM ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC: H01J61/02

CPC classification number: H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Abstract translation: 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。