公开(公告)号：US07420135B2

公开(公告)日：2008-09-02

申请号：US11322267

申请日：2006-01-03

申请人： Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

发明人： Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

IPC分类号： H01H57/00 ,  H01H21/22 ,  H01P1/10 ,  G02B26/08 ,  G02B26/00

CPC分类号： H01H59/0009

摘要： A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating beam installed above the main electrodes at a certain height; a support unit to support the actuating beam; and sub-electrodes formed above the actuating beam at a distance from the actuating beam and facing the corresponding main electrodes. The method includes depositing and patterning a metal layer on a substrate; depositing and patterning a sacrificial layer to form actuator beam support holes and first sub-electrode contact holes; depositing and patterning an actuating beam layer on the sacrificial layer, thereby forming spacers; depositing and patterning second sub-electrode contact holes from another sacrificial layer; depositing and patterning a sub-electrode layer on the sacrificial layer; and removing the two sacrificial layers.

摘要翻译： 提供微机电系统（MEMS）开关及其制造方法。 MEMS开关包括基板; 形成在基板上的信号线; 主电极隔开一段距离并形成在衬底上; 在一定高度安装在主电极之上的致动梁; 用于支撑致动梁的支撑单元; 以及形成在致动梁上方一定距离致动梁并面对相应主电极的子电极。 该方法包括在衬底上沉积和图案化金属层; 沉积和图案化牺牲层以形成致动器梁支撑孔和第一子电极接触孔; 沉积和图案化牺牲层上的致动束层，从而形成间隔物; 从另一牺牲层沉积和构图第二子电极接触孔; 在牺牲层上沉积和构图子电极层; 并去除两个牺牲层。

公开(公告)号：US20060144681A1

公开(公告)日：2006-07-06

申请号：US11322267

申请日：2006-01-03

申请人： Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

发明人： Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

IPC分类号： H01H57/00

CPC分类号： H01H59/0009

摘要： A micro electromechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating beam installed above the main electrodes at a certain height; a support unit to support the actuating beam; and sub-electrodes formed above the actuating beam at a distance from the actuating beam and facing the corresponding main electrodes. The method includes depositing and patterning a metal layer on a substrate; depositing and patterning a sacrificial layer to form actuator beam support holes and first sub-electrode contact holes; depositing and patterning an actuating beam layer on the sacrificial layer, thereby forming spacers; depositing and patterning second sub-electrode contact holes from another sacrificial layer; depositing and patterning a sub-electrode layer on the sacrificial layer; and removing the two sacrificial layers.

摘要翻译： 提供了微机电系统（MEMS）开关及其制造方法。 MEMS开关包括基板; 形成在基板上的信号线; 主电极隔开一段距离并形成在衬底上; 在一定高度安装在主电极上方的致动梁; 用于支撑致动梁的支撑单元; 以及形成在致动梁上方一定距离致动梁并面对相应主电极的子电极。 该方法包括在衬底上沉积和图案化金属层; 沉积和图案化牺牲层以形成致动器梁支撑孔和第一子电极接触孔; 沉积和图案化牺牲层上的致动束层，从而形成间隔物; 从另一牺牲层沉积和构图第二子电极接触孔; 在牺牲层上沉积和构图子电极层; 并去除两个牺牲层。

公开(公告)号：US20060131147A1

公开(公告)日：2006-06-22

申请号：US11251804

申请日：2005-10-18

申请人： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

发明人： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC分类号： H01H57/00 ,  H02N1/00

CPC分类号： H01H59/0009 ,  H01H2059/0054

摘要： A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.

公开(公告)号：US20060012940A1

公开(公告)日：2006-01-19

申请号：US11179460

申请日：2005-07-13

申请人： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

发明人： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

IPC分类号： H01L21/683

CPC分类号： H01H59/0009 ,  H01H2059/0018

摘要： A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the power source; a semiconductor layer combined with an upper surface of the first electrode, and forming a potential barrier to become insulated when a bias signal is applied from the power source; and a second electrode disposed at a predetermined distance away from the semiconductor layer, and being coupled to the other terminal of the power source, wherein the second electrode contacts the semiconductor layer when a bias signal is applied from the power source. Therefore, although the bias signal may not be cut off, free electrons and holes are recombined in the semiconductor layer, whereby charge buildup and sticking can be prevented.

摘要翻译： 提供了用于控制AC信号的传输的接通/断开的MEMS RF开关。 本发明的MEMS RF开关包括：耦合到电源的一个端子的第一电极; 与所述第一电极的上表面组合的半导体层，并且当从所述电源施加偏置信号时，形成电位势垒以变得绝缘; 以及第二电极，设置在距离半导体层预定距离处，并且耦合到电源的另一个端子，其中当从电源施加偏置信号时，第二电极接触半导体层。 因此，尽管偏置信号可能不会被切断，但自由电子和空穴在半导体层中重新结合，从而可以防止电荷积累和粘附。

公开(公告)号：US08184356B2

公开(公告)日：2012-05-22

申请号：US12782386

申请日：2010-05-18

申请人： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

发明人： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

IPC分类号： G02B26/00

CPC分类号： H01H59/0009 ,  H01H1/0036

摘要： A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.

摘要翻译： 微型薄膜结构，微机电系统（MEMS）开关及其制造方法。 该微薄膜结构包括至少两层具有不同性质的薄膜并依次层叠以形成上层和下层，其中上层和下层之间的界面形成为至少朝两个方向取向。 微型薄膜结构和形成方法可以应用于MEMS开关的可动电极。 薄膜结构可以通过在下层中形成通孔而形成，并且以接合在通孔中的形式沉积上层。 或者，薄膜结构可以通过在下层的顶侧上形成突起和凹陷部分，然后将上层沉积在具有突出部分和凹陷部分的下层的顶侧上而制成。

公开(公告)号：US20100133077A1

公开(公告)日：2010-06-03

申请号：US12697629

申请日：2010-02-01

申请人： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

发明人： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

IPC分类号： H01H59/00

CPC分类号： H01H59/0009 ,  H01H2059/0018

摘要： A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the power source; a semiconductor layer combined with an upper surface of the first electrode, and forming a potential barrier to become insulated when a bias signal is applied from the power source; and a second electrode disposed at a predetermined distance away from the semiconductor layer, and being coupled to the other terminal of the power source, wherein the second electrode contacts the semiconductor layer when a bias signal is applied from the power source. Therefore, although the bias signal may not be cut off, free electrons and holes are recombined in the semiconductor layer, whereby charge buildup and sticking can be prevented.

摘要翻译： 提供了用于控制AC信号的传输的接通/断开的MEMS RF开关。 本发明的MEMS RF开关包括：耦合到电源的一个端子的第一电极; 与所述第一电极的上表面组合的半导体层，并且当从所述电源施加偏置信号时，形成电位势垒以变得绝缘; 以及第二电极，设置在距离半导体层预定距离处，并且耦合到电源的另一个端子，其中当从电源施加偏置信号时，第二电极接触半导体层。 因此，尽管偏置信号可能不会被切断，但自由电子和空穴在半导体层中重新结合，从而可以防止电荷积累和粘附。

公开(公告)号：US07342710B2

公开(公告)日：2008-03-11

申请号：US11806143

申请日：2007-05-30

申请人： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

发明人： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC分类号： G02B26/00 ,  H01L21/00

CPC分类号： H01H1/5822 ,  H01H59/0009 ,  H01H2059/0054 ,  H01H2059/0063

摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.

摘要翻译： 一种微机电系统开关及其制造方法。 微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且包括开关接触点和在基板的上表面上和多个信号线之间的多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

公开(公告)号：US20070227863A1

公开(公告)日：2007-10-04

申请号：US11806143

申请日：2007-05-30

申请人： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

发明人： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC分类号： H01H57/00

CPC分类号： H01H1/5822 ,  H01H59/0009 ,  H01H2059/0054 ,  H01H2059/0063

摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.

摘要翻译： 一种微机电系统开关及其制造方法。 微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且包括开关接触点和在基板的上表面上和多个信号线之间的多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

公开(公告)号：US20060180409A1

公开(公告)日：2006-08-17

申请号：US11315118

申请日：2005-12-23

申请人： Soon-cheol Kweon ,  Hyung-jae Shin ,  Sang-hun Lee ,  Min-seog Choi ,  Che-heung Kim ,  Young-tack Houng

发明人： Soon-cheol Kweon ,  Hyung-jae Shin ,  Sang-hun Lee ,  Min-seog Choi ,  Che-heung Kim ,  Young-tack Houng

IPC分类号： F16D55/02

CPC分类号： H01H59/0009 ,  H01H2059/0054

摘要： A spring structure for supporting a floating member and a micro-structure having the same. The spring structure includes: at least one support post unit fixed to a substrate; and at least one spring unit having a first spring connected to the support post unit and extending in a predetermined direction from the support post unit, a second spring member connected to a floating member and extending in the same direction as the first spring unit from the floating member, and a connection member arranged normal to the first and second spring members and interconnecting the tip ends of the first and second spring members. Because the first spring member and the second spring member are arranged to be expanded or contracted along with the floating member when the temperature changes, the first and second spring members are not subject to stress caused due to the difference in thermal expansion coefficient.

摘要翻译： 用于支撑浮动元件的弹簧结构和具有该浮动元件的微结构。 弹簧结构包括：固定到基板的至少一个支撑柱单元; 以及至少一个弹簧单元，其具有连接到所述支撑柱单元并且沿着预定方向从所述支撑柱单元延伸的第一弹簧;第二弹簧构件，其连接到浮动构件并沿与所述第一弹簧单元相同的方向从所述第一弹簧单元延伸; 浮动构件和与第一和第二弹簧构件正交布置并且互连第一和第二弹簧构件的末端的连接构件。 由于第一弹簧构件和第二弹簧构件布置成随着温度变化而与浮动构件一起膨胀或收缩，所以第一和第二弹簧构件不会由于热膨胀系数的差异而产生应力。

公开(公告)号：US06864876B2

公开(公告)日：2005-03-08

申请号：US09725959

申请日：2000-11-30

申请人： Jong-woo Shin ,  Soon-cheol Kweon ,  Hyung-jae Shin

发明人： Jong-woo Shin ,  Soon-cheol Kweon ,  Hyung-jae Shin

IPC分类号： G02B7/182 ,  G02B26/08 ,  G09G3/34

CPC分类号： G02B26/0841

摘要： A micro-mirror device for an image display apparatus which can change the travel path of incident light by pivoting a mirror, which corresponds to a pixel and can increase optical efficiency by pivoting the mirror in the direction of the sides of the mirror. The micro-mirror device for an image display apparatus includes a substrate, a landing pad provided on the substrate, and a pair of base electrodes provided on opposite sides of the landing pad. A pair of first posts protrude from the upper surface of the landing pad, and are isolated from each other by a predetermined interval. A girder, supported by the pair of first posts, pivots toward the sides of the base electrodes due to an electrostatic attraction. A second post protrudes from the upper surface of the girder. A mirror, which is supported by the second post, reflects incident light, and receives power via the landing pad. Thus, the mirror is pivoted toward the sides of the landing pad by the electrostatic attraction between the base electrodes and the mirror.

摘要翻译： 一种用于图像显示装置的微镜装置，其可以通过枢转对应于像素的反射镜来改变入射光的行进路径，并且可以通过在反射镜的侧面的方向上枢转反射镜来提高光学效率。 用于图像显示装置的微镜装置包括基板，设置在基板上的着陆焊盘和设置在着陆焊盘的相对侧上的一对基极。 一对第一柱从着陆垫的上表面突出，并以预定的间隔相互隔离。 由一对第一柱支撑的梁由于静电吸引而向基底电极的侧面枢转。 第二柱从大梁的上表面突出。 由第二柱支撑的反射镜反射入射光，并通过着陆垫接收电力。 因此，通过基底电极和反射镜之间的静电吸引，镜子朝向着陆垫的侧面枢转。