ETCH STOP CONFIGURATION
    12.
    发明申请
    ETCH STOP CONFIGURATION 有权
    ETCH停止配置

    公开(公告)号:US20140254339A1

    公开(公告)日:2014-09-11

    申请号:US13794133

    申请日:2013-03-11

    Abstract: A method of making a transducer head disclosed herein includes depositing a spacer layer on an NFT layer of the transducer head, forming an etch stop layer on a spacer layer of a transducer, depositing a cladding layer on the etch stop layer, and milling the cladding layer at a sloped angle such that the milling stops at the etch stop layer.

    Abstract translation: 制造本文公开的换能器头的方法包括在换能器头的NFT层上沉积间隔层,在换能器的间隔层上形成蚀刻停止层,在蚀刻停止层上沉积包覆层,以及研磨包层 层,其倾斜角度使得铣削在蚀刻停止层处停止。

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