公开(公告)号：US06185015B2

公开(公告)日：2001-02-06

申请号：US09445687

申请日：2000-03-07

申请人： Silviu Reinhorn ,  Asher Friesem ,  Yaakov Amitai

发明人： Silviu Reinhorn ,  Asher Friesem ,  Yaakov Amitai

IPC分类号： G02B532

CPC分类号： G02B5/32 ,  G02B6/43

摘要： A planar optical correlator including at least first and second optical substrates (30, 32), through which light propagates by means of total internal reflection, at least first and second holographic lenses (20, 22) on the first optical substrate and optical third and fourth holographic lenses (24, 26) on the second optical substrate, each of the first and second and third and fourth holographic lenses performing a Fourier transformation on the input light to their respective optical substrates, the substrates positioned such that the second and third holographic lenses at least partially face each other. A filter (36) is positioned between the second and third holographic lenses.

摘要翻译： 一种平面光学相关器，至少包括第一和第二光学基板（30,32），光通过其全反射传播至少第一和第二全息透镜（20,22），光学第三和第三光学基板 第四全息透镜（24,26）在第二光学基板上，第一和第二和第三和第四全息透镜中的每一个对输入光进行傅里叶变换到它们各自的光学基板，所述基板定位成使得第二和第三全息透镜 透镜至少部分地彼此面对。 滤光器（36）位于第二和第三全息透镜之间。

公开(公告)号：US07973919B2

公开(公告)日：2011-07-05

申请号：US12752995

申请日：2010-04-01

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/00

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料。

公开(公告)号：US07399647B2

公开(公告)日：2008-07-15

申请号：US11245166

申请日：2005-10-07

申请人： Silviu Reinhorn

发明人： Silviu Reinhorn

IPC分类号： H01L21/00

CPC分类号： G02B21/125 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8825 ,  G01R31/311 ,  G02B27/106 ,  G02B27/1093 ,  G02B27/144

摘要： Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

摘要翻译： 光学检测系统中的明暗成像操作通过产生圆形或环形激光束而使用相同的光源沿着基本相同的光路发生。 通过使用具有均匀衍射效率的衍射光学元件来实现多束分束。 用于明场和暗场成像的共聚焦装置可以应用于多束扫描以抑制来自下层的信号。 不垂直于目标移动方向的扫描方向提供了改进的管芯到管芯的比较。

公开(公告)号：US20060028649A1

公开(公告)日：2006-02-09

申请号：US11245166

申请日：2005-10-07

申请人： Silviu Reinhorn

发明人： Silviu Reinhorn

IPC分类号： G01B9/02

CPC分类号： G02B21/125 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8825 ,  G01R31/311 ,  G02B27/106 ,  G02B27/1093 ,  G02B27/144

摘要： Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

公开(公告)号：US20050030527A1

公开(公告)日：2005-02-10

申请号：US10784771

申请日：2004-02-24

申请人： Silviu Reinhorn

发明人： Silviu Reinhorn

IPC分类号： G01N21/88 ,  G01N21/95 ,  G01R31/311 ,  G06F7/00 ,  H01J3/14 ,  H01J5/16

CPC分类号： G02B21/125 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8825 ,  G01R31/311 ,  G02B27/106 ,  G02B27/1093 ,  G02B27/144

摘要： Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

摘要翻译： 光学检测系统中的明暗成像操作通过产生圆形或环形激光束而使用相同的光源沿着基本相同的光路发生。 通过使用具有均匀衍射效率的衍射光学元件来实现多束分束。 用于明场和暗场成像的共聚焦装置可以应用于多束扫描以抑制来自下层的信号。 不垂直于目标移动方向的扫描方向提供了改进的管芯到管芯的比较。

公开(公告)号：US20110141462A1

公开(公告)日：2011-06-16

申请号：US13034565

申请日：2011-02-24

申请人： Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

发明人： Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/1717

摘要： Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.

摘要翻译： 用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束 光输出端。 存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个 各自的位置，并且从各个位置传送返回的辐射。 该装置包括接收单元，该接收单元适于接收返回的辐射并适于响应于此确定相应位置的特性。

公开(公告)号：US20100188658A1

公开(公告)日：2010-07-29

申请号：US12752995

申请日：2010-04-01

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/88 ,  G01N21/00

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 在探测波长处的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料

公开(公告)号：US07190459B2

公开(公告)日：2007-03-13

申请号：US10784771

申请日：2004-02-24

申请人： Silviu Reinhorn

发明人： Silviu Reinhorn

IPC分类号： G01N21/55

CPC分类号： G02B21/125 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8825 ,  G01R31/311 ,  G02B27/106 ,  G02B27/1093 ,  G02B27/144

摘要： Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

摘要翻译： 光学检测系统中的明暗成像操作通过产生圆形或环形激光束而使用相同的光源沿着基本相同的光路发生。 通过使用具有均匀衍射效率的衍射光学元件来实现多束分束。 用于明场和暗场成像的共聚焦装置可以应用于多束扫描以抑制来自下层的信号。 不垂直于目标移动方向的扫描方向提供了改进的管芯到管芯的比较。

公开(公告)号：US07049586B2

公开(公告)日：2006-05-23

申请号：US10078542

申请日：2002-02-21

申请人： Silviu Reinhorn

发明人： Silviu Reinhorn

IPC分类号： G01N23/00

CPC分类号： G02B21/125 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8825 ,  G01R31/311 ,  G02B27/106 ,  G02B27/1093 ,  G02B27/144

摘要： Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

公开(公告)号：US20060012791A1

公开(公告)日：2006-01-19

申请号：US11158733

申请日：2005-06-21

申请人： Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

发明人： Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/1717

摘要： Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.

摘要翻译： 用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束 光输出端。 存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个 各自的位置，并且从各个位置传送返回的辐射。 该装置包括接收单元，该接收单元适于接收返回的辐射并适于响应于此确定相应位置的特性。