公开(公告)号：US07463352B2

公开(公告)日：2008-12-09

申请号：US11040528

申请日：2005-01-21

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N21/88

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

公开(公告)号：US20080231845A1

公开(公告)日：2008-09-25

申请号：US11952010

申请日：2007-12-06

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/95

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料

公开(公告)号：US20060234784A1

公开(公告)日：2006-10-19

申请号：US11166965

申请日：2005-06-27

申请人： Silviu Reinhorn

发明人： Silviu Reinhorn

IPC分类号： H04M1/00

CPC分类号： H04M1/0268 ,  H04M1/0272 ,  H04N9/3141

摘要： A collapsible portable video display is provided, which incorporates a mini-projector, a folding mirror, and a rear projection foldable screen. In one type of implementation the display is incorporated into a mobile consumer appliance, such as a cellphone, mobile DVD player, etc. In other type of implementation the display device is a stand-alone device having inputs for video and audio signals.

摘要翻译： 提供了可折叠便携式视频显示器，其包括微型投影仪，折叠镜和后投影式可折叠屏幕。 在一种类型的实现中，显示器被并入到诸如手机，移动DVD播放器等的移动消费者设备中。在其他类型的实现中，显示设备是具有用于视频和音频信号的输入的独立设备。

公开(公告)号：US06853475B2

公开(公告)日：2005-02-08

申请号：US10617449

申请日：2003-07-11

申请人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

发明人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

IPC分类号： G01B11/30 ,  G01N21/89 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G02F1/11

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G02B21/002 ,  G02B21/125

摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

摘要翻译： 用于检查样本的系统，例如使用激光源提供光束的半导体晶片。 光束被施加到具有有源区域并且响应于RF输入信号的移动透镜声光器件，以在有源区域中选择性地生成多个行进透镜。 移动透镜声光装置可操作以在每个所生成的行进透镜的各个焦点处接收光束并产生多个飞点光束。 一种具有多个检测器部分的光检测器单元，每个检测器部分具有多个光检测器和用于并行接收来自多个光检测器的输入的至少一个多级存储装置，用于产生可用的扫描 数据。 存储在每个存储设备中的信息从多个阶段同时连续地读出。

公开(公告)号：US06788445B2

公开(公告)日：2004-09-07

申请号：US10043274

申请日：2002-01-14

申请人： Boris Goldberg ,  Silviu Reinhorn

发明人： Boris Goldberg ,  Silviu Reinhorn

IPC分类号： G02B2608

CPC分类号： B41J2/473 ,  G01R31/305 ,  G02B26/123

摘要： A polygon scanning system and method is provided wherein two or more light beams impinge at different incident angles on a polygon facet and are sequentially used for scanning the surface of a substrate as the polygon is rotated. Embodiments include a system comprising a polygon having a reflective facet, a rotation mechanism for rotating the polygon, and a light source for directing a plurality of light beams to impinge on the facet such that each light beam impinges on the facet at a different incident angle. Each light beam is reflected by the facet to scan a particular portion of a surface of a substrate during a respective time interval when the rotation mechanism is rotating the polygon. Each of the plurality of light beams is reflected onto the substrate surface using a respective portion of the facet surface, such that the sum of the respective portions of the facet surface used to reflect the light beams is a very large percentage of the total surface area. Thus, the system has a duty cycle of close to 100 percent as well as a high data rate.

摘要翻译： 提供了一种多边形扫描系统和方法，其中两个或更多个光束以不同的入射角度照射在多边形面上，并且随着多边形的旋转而顺序地用于扫描基板的表面。 实施例包括包括具有反射小面的多边形，用于旋转多边形的旋转机构的系统和用于引导多个光束撞击小面的光源的系统，使得每个光束以不同的入射角度撞击小面 。 当旋转机构旋转多边形时，在相应的时间间隔期间，每个光束被小面反射以扫描基板表面的特定部分。 多个光束中的每一个使用小面表面的相应部分反射到基板表面上，使得用于反射光束的小面的相应部分的总和是总表面积的非常大的百分比 。 因此，该系统具有接近100％的占空比以及高数据速率。

公开(公告)号：US07714999B2

公开(公告)日：2010-05-11

申请号：US11952010

申请日：2007-12-06

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/00

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料。

公开(公告)号：US06924891B2

公开(公告)日：2005-08-02

申请号：US10836022

申请日：2004-04-29

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01B11/30 ,  G01N21/47 ,  G01N21/95 ,  G01N21/956 ,  G02B27/48 ,  G03F1/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G01N21/00

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

公开(公告)号：US06798505B2

公开(公告)日：2004-09-28

申请号：US10436920

申请日：2003-05-12

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elyasaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elyasaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N2100

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

公开(公告)号：US06556294B2

公开(公告)日：2003-04-29

申请号：US10043779

申请日：2002-01-11

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N2100

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

公开(公告)号：US06429931B1

公开(公告)日：2002-08-06

申请号：US10043798

申请日：2002-01-11

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N2100

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。