Thermal inkjet printhead and high-efficiency polycrystalline silicon resistor system for use therein
    14.
    发明授权
    Thermal inkjet printhead and high-efficiency polycrystalline silicon resistor system for use therein 失效
    热喷墨打印头和高效多晶硅电阻系统

    公开(公告)号:US06315384B1

    公开(公告)日:2001-11-13

    申请号:US09604306

    申请日:2000-06-26

    IPC分类号: B41J205

    摘要: A highly-efficient thermal inkjet printhead. The printhead includes a primary layer of polycrystalline silicon (preferably doped) having at least one portion thereof which functions as an ink expulsion resistor. Positioned over and above the primary layer is a secondary layer of material having at least one section produced from a selected metal silicide compound and at least another section fabricated from undoped polycrystalline silicon. The metal silicide-containing section functions as an interconnect structure and is operatively connected to the resistor in the primary layer (which is positioned beneath the secondary layer). The undoped polycrystalline silicon section is at least partially aligned over and above the resistor. As a result, the resistor is “buried” beneath the secondary layer and the various portions thereof. This system provides improved reliability, greater dimensional simplicity, optimized electrical/thermal properties, and superior versatility.

    摘要翻译: 高效热敏打印头。 打印头包括具有至少一部分作为墨水排出电阻器的多晶硅(优选掺杂)的主层。 位于主层之上和之上的是具有由所选择的金属硅化物化合物和至少另一部分由未掺杂的多晶硅制成的至少一个部分的第二层材料。 含金属硅化物的部分用作互连结构,并且可操作地连接到初级层(位于次级层下面)的电阻器。 未掺杂的多晶硅部分至少部分地对准电阻器上方和上方。 结果,电阻器被“掩埋”在次级层及其各个部分之下。 该系统提供更高的可靠性,更大的尺寸简单性,优化的电/热性能,以及出色的通用性。