公开(公告)号：US20210207261A1

公开(公告)日：2021-07-08

申请号：US17143924

申请日：2021-01-07

Applicant: TOKYO ELECTRON LIMITED

Inventor： Shota ISHIBASHI ,  Hiroyuki TOSHIMA ,  Hiroyuki IWASHITA ,  Tatsuo HIRASAWA

IPC: C23C14/35

Abstract: A film forming apparatus includes a target holder that holds a target facing a substrate and extending in a predetermined direction on a horizontal plane, a magnet unit including a pair of magnet assemblies each having magnets and disposed at a back side of the target holder, a pair of shielding members disposed between the target and the substrate to extend from the target toward the substrate, and a moving mechanism configured to reciprocate the magnet unit between one end and the other end in the predetermined direction. The magnet assemblies are arranged along the predetermined direction, and each of the shielding members is disposed, in plan view, on a boundary line between a first region where only one of the magnet assemblies passes during a reciprocating motion of the magnet unit and a second region where both of the magnet assemblies pass therethrough during the reciprocating motion.