公开(公告)号：US20230170239A1

公开(公告)日：2023-06-01

申请号：US17991345

申请日：2022-11-21

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takehiro SHINDO ,  Dongwei LI ,  Lingxin JIANG ,  Shinya OKANO ,  Toshiaki KODAMA ,  Wataru MATSUMOTO

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67748 ,  H01L21/67265 ,  H01L21/67333

Abstract: An apparatus for transferring a substrate to a substrate processing chamber. The apparatus comprises: a substrate transfer chamber having a floor and a side wall; a substrate transfer module comprising a holder and second magnets, and configured to be movable in the substrate transfer chamber by magnetic levitation; and a controller configured to control an operating force for moving the substrate transfer module. The controller comprises: a parameter storage configured to store at least one model parameter; a control schedule creating section configured to acquire identification information and a movement schedule, to obtain the operating force, and to output a control schedule; and a magnetic force adjusting section configured to perform feedforward control.

公开(公告)号：US20160078612A1

公开(公告)日：2016-03-17

申请号：US14857585

申请日：2015-09-17

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA

IPC: G06T7/00

CPC classification number: G06T7/74 ,  G06T2207/10152 ,  G06T2207/30148 ,  G06T2207/30204 ,  H01L21/681

Abstract: An alignment apparatus for aligning a wafer by optically detecting an alignment mark includes an imaging unit configured to image an imaging region extending across a circumferential edge of the wafer, an irradiation unit configured to irradiate light toward the imaging region, a reflection part configured to reflect toward the imaging region the light that is irradiated from the irradiation unit upwardly, and a control unit configured to detect the circumferential edge. The reflection part has a reflectance making a luminance difference between the outside of the wafer and the circumferential edge of the wafer in a luminance distribution pattern obtained by imaging the imaging region. The control unit detects the alignment mark and the circumferential edge based on the luminance distribution pattern.

Abstract translation: 用于通过光学检测对准标记对准晶片的对准装置包括：成像单元，被配置为对延伸穿过晶片的周缘的成像区域进行成像;被配置为朝向成像区域照射光的照射单元;被配置为反射 朝向成像区域向上照射单元的光;以及控制单元，其被配置为检测周向边缘。 反射部分具有通过对成像区域进行成像而获得的亮度分布图案中的晶片外部和晶片周边之间的亮度差的反射。 控制单元基于亮度分布图案检测对准标记和周缘。

公开(公告)号：US20140240484A1

公开(公告)日：2014-08-28

申请号：US14174506

申请日：2014-02-06

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA ,  Toru YAMAUCHI ,  Sensho KOBAYASHI ,  Hiroshi NAKAMURA ,  Gaku IKEDA ,  Kazuya UOYAMA

IPC: G06T7/00 ,  G02B27/01 ,  H04N7/18

CPC classification number: G02B27/017 ,  G02B2027/0138 ,  G02B2027/014 ,  H01L21/67288

Abstract: A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.

Abstract translation: 支持信息显示方法具有获取处理，用于通过头戴式显示器中提供的照相机拍摄作为维护对象的基板处理装置的预定部分来拍摄第一图像，用于估计支持信息的估计处理 与存储在数据库中的信息相关的第一图像中的预定部分，通过将在估计处理中估计的支持信息转换为图像来创建第二图像的图像创建处理，以及用于在第一图像中显示第二图像的显示处理 头戴式显示器，以便操作者可视地识别支持信息。

公开(公告)号：US20220367223A1

公开(公告)日：2022-11-17

申请号：US17661953

申请日：2022-05-04

Applicant: Tokyo Electron Limited

Inventor： Isamu TAODA ,  Toshiaki KODAMA

IPC: H01L21/68 ,  G01S15/08 ,  G01S15/88 ,  H01L21/677 ,  H01L21/67

Abstract: A substrate transport apparatus includes: a support configured to support a substrate; a moving mechanism configured to move the support in a lateral direction in order to transport the substrate from a first placement portion to a second placement portion, each of the first placement portion and the second placement portion being configured to place thereon the substrate; and an ultrasonic sensor provided on the support and configured to detect the substrate placed on the first placement portion.

公开(公告)号：US20220199442A1

公开(公告)日：2022-06-23

申请号：US17553158

申请日：2021-12-16

Applicant: TOKYO ELECTRON LIMITED

Inventor： Hiromitsu SAKAUE ,  Toshiaki KODAMA

IPC: H01L21/677 ,  G01N21/95

Abstract: The present disclosure relates to a substrate transfer apparatus for transferring a substrate to a substrate processing apparatus in a reduced pressure atmosphere. The apparatus comprises a substrate holder to hold the substrate; and a substrate measurer, provided on the substrate holder, to measure a position of the substrate with respect to the substrate holder.

公开(公告)号：US20220193897A1

公开(公告)日：2022-06-23

申请号：US17554343

申请日：2021-12-17

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takehiro SHINDO ,  Akira TAKAHASHI ,  Takashi HORIUCHI ,  Toshiaki KODAMA

IPC: B25J9/16 ,  B25J17/02 ,  B25J13/08 ,  B25J15/00 ,  B25J11/00 ,  H01L21/687

Abstract: There is provided an apparatus for transporting a substrate. The apparatus comprises: an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork; an arm provided with the end effector installed thereon and a mechanism which moves the fork; and an inclination adjusting mechanism provided between the fork and the wrist part or between the wrist part and the arm to adjust an inclination of the fork.

公开(公告)号：US20220068672A1

公开(公告)日：2022-03-03

申请号：US17446477

申请日：2021-08-31

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA

IPC: H01L21/67 ,  H01J37/305 ,  H01J37/32 ,  G01B9/00 ,  H01L21/677

Abstract: A substrate processing system includes a substrate processing apparatus configured to process a substrate, a substrate transfer mechanism including a substrate holder configured to hold the substrate, an imaging device provided in the substrate transfer mechanism and configured to image a monitoring target member inside the substrate processing apparatus, and a controller. The controller is configured to cause the imaging device to image multiple portions of the monitoring target member, including a central portion facing a center of the substrate during processing and a peripheral edge portion facing a peripheral edge side of the substrate during the processing, by moving the substrate holder, and calculate, for each of the multiple portions of the monitoring target member, a physical amount indicating a state of the corresponding portion based on an imaging result.

公开(公告)号：US20210366747A1

公开(公告)日：2021-11-25

申请号：US17325704

申请日：2021-05-20

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA

IPC: H01L21/67 ,  H01L21/687 ,  B25J15/00 ,  B25J13/08 ,  B25J9/16

Abstract: A substrate transfer device includes: a support part configured to support a substrate to be transferred and provided with a plurality of engagement portions which are engaged with an edge of the substrate on a first side of the substrate; a gripping part configured to move toward or away from the plurality of engagement portions and provided with a plurality of contact portions which come into contact with the edge of the substrate on a second side of the substrate when moving toward the plurality of engagement portions; a plurality of detection parts provided in the plurality of contact portions, respectively, and configured to detect distortion amounts of the plurality of contact portions; and a determination part configured to determine a gripping situation of the substrate based on detection results obtained by the plurality of detection parts.

公开(公告)号：US20200094399A1

公开(公告)日：2020-03-26

申请号：US16578791

申请日：2019-09-23

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takehiro SHINDO ,  Toshiaki KODAMA

IPC: B25J9/04 ,  B25J9/00 ,  B25J18/04 ,  H01L21/677 ,  H01L21/67 ,  B25J9/12

Abstract: There is provided a transport apparatus including: an articulated arm including: a first arm in which a drive motor is installed; a second arm configured to be driven by the first arm; a transmission portion configured to convert a rotation of the drive motor into a rotation of the second arm via a joint; a first detector configured to detect a first sensor value corresponding to a rotation angle of an input shaft of the transmission portion; and a second detector configured to detect a second sensor value corresponding to a rotation angle of the second arm; and a controller configured to control the articulated arm, wherein the controller is further configured to control the second arm to a target rotation angle based on the first sensor value and the second sensor value.

公开(公告)号：US20160240412A1

公开(公告)日：2016-08-18

申请号：US15018277

申请日：2016-02-08

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA ,  Shinji WAKABAYASHI

IPC: H01L21/67 ,  H01L21/68 ,  G01V8/20 ,  H01L21/677

Abstract: There is provided a substrate detection apparatus of detecting whether or not a substrate is normally supported by a support part at a predetermined position, in a transfer device including the support part configured to support a plurality of disc-like substrates in multi-stage processing at vertical intervals. The substrate detection apparatus includes: a plurality of optical sensors, each of the plurality of optical sensors including a light transmitting part configured to irradiate a light and a light receiving part configured to receive the light from the light transmitting part, wherein at least one pair of the plurality of optical sensors are disposed such that the light from the light transmitting part is sequentially blocked at each of the plurality of disc-like substrates, during the plurality of disc-like substrates is collectively transferred while being normally supported by the support part at the predetermined positions.

Abstract translation: 提供了一种基板检测装置，在包括支撑部分的传送装置中，检测基板是否正常地被支撑部分支撑在预定位置，所述传送装置被构造成在多级处理中支撑多个盘状基板 垂直间隔。 基板检测装置包括：多个光学传感器，所述多个光学传感器中的每一个包括被配置为照射光的光传输部和被配置为从所述光透射部接收光的受光部，其中，至少一对 所述多个光学传感器被布置成使得来自所述光透射部分的光在所述多个盘状基板的每一个处顺序地被阻挡，在所述多个盘状基板被共同转印的同时被所述支撑部分 在预定位置。