公开(公告)号：US5614335A

公开(公告)日：1997-03-25

申请号：US282465

申请日：1994-08-01

申请人： Keiji Hashimoto ,  Junji Fujikawa ,  Hiroshi Mohri ,  Masahiro Takahashi ,  Hiroyuki Miyashita ,  Yukio Iimura

发明人： Keiji Hashimoto ,  Junji Fujikawa ,  Hiroshi Mohri ,  Masahiro Takahashi ,  Hiroyuki Miyashita ,  Yukio Iimura

IPC分类号： G03F1/32 ,  G03F1/68 ,  H01L21/027 ,  G03F9/00

CPC分类号： G03F1/32

摘要： The invention relates a halftone phase shift photomask and a blank therefor, which enables the transmittance of a phase shift portion to be varied even after blank or photomask fabrication, can accommodate to a variety of patterns, and can be fabricated on a mass scale. The exposure light transmittance of a halftone phase shift layer is arbitrarily variable within the range of 1% to 50%, inclusive, by exposing the blank or photomask to a high temperature elevated to at least 150.degree. C., to an oxidizing atmosphere, or to a reducing atmosphere at a step that can provided independent of the steps for film-forming or photomask fabrication step. This enables the exposure light transmittance of the halftone phase shift layer to be changed to any desired value after blank or photomask fabrication, and so an optimal halftone phase shift photomask to be obtained depending on the size, area, location, shape, and the like of the transferred pattern.

摘要翻译： 本发明涉及一种半色调相移光掩模及其空白处理，即使在空白或光掩模制造之后，相移部分的透射率也能够变化，可以适应各种图案，并且可以大规模制造。 半色调相变层的曝光透光率可以在1％至50％的范围内任意变化，包括在内，将空白或光掩模暴露于升高至少150℃的高温至氧化气氛，或 在可以独立于成膜或光掩模制造步骤的步骤的步骤中进行还原气氛。 这使得半色调相移层的曝光光透射率在空白或光掩模制造之后变为任何期望值，因此根据尺寸，面积，位置，形状等获得最佳半色调相移光掩模 的转移模式。

公开(公告)号：US5592317A

公开(公告)日：1997-01-07

申请号：US576138

申请日：1995-12-21

申请人： Junji Fujikawa ,  Yukio Iimura ,  Masahiro Takahashi ,  Takashi Nishimoto ,  Hiroyuki Matsui ,  Masanobu Fujita

发明人： Junji Fujikawa ,  Yukio Iimura ,  Masahiro Takahashi ,  Takashi Nishimoto ,  Hiroyuki Matsui ,  Masanobu Fujita

IPC分类号： G02B5/20 ,  G02F1/1335 ,  G03F1/00

CPC分类号： G02F1/133512 ,  G03F7/0007

摘要： A chromium blank for forming a black matrix-screen to be used as a color filter for a liquid crystal display is formed by forming at least a first antireflection film, a second antireflection film and a screening film sequentially in that order on one major surface of a transparent substrate. Each of the first and the second antireflection film is a semitransparent film formed of a chromium compound or a chromium mixture, containing chromium as a principal component, and the screening film is formed of chromium, a chromium compound containing chromium as a principal component. The transparent substrate, the first antireflection film, the second antireflection film and the screening film meet an inequality: n.sub.s

摘要翻译： 用于形成用作液晶显示器的滤色器的黑色矩阵屏的铬坯通过在至少一个主表面依次形成至少第一防反射膜，第二抗反射膜和屏蔽膜 透明基材。 第一和第二抗反射膜中的每一个是由以铬为主要成分的铬化合物或铬混合物形成的半透明膜，筛选膜由以铬为主要成分的铬化合物形成。 透明衬底，第一抗反射膜，第二抗反射膜和屏蔽膜满足不等式：ns

公开(公告)号：US06764792B1

公开(公告)日：2004-07-20

申请号：US09830598

申请日：2001-04-27

申请人： Junji Fujikawa ,  Yoshinori Kinase ,  Takafumi Okamura ,  Hiroshi Mohri ,  Toshifumi Yokoyama ,  Haruo Kokubo

发明人： Junji Fujikawa ,  Yoshinori Kinase ,  Takafumi Okamura ,  Hiroshi Mohri ,  Toshifumi Yokoyama ,  Haruo Kokubo

IPC分类号： G03F900

CPC分类号： G03F1/32 ,  G03F1/58

摘要： The invention relates to a halftone phase shift photomask which is controlled with precision in terms of its transmittance at a wavelength applied to inspection, and measuring equipment, so that its quality can easily be assured even when its phase difference at an exposure wavelength is controlled at 180° C. with precision and its transmittance is set at 1 to 20% as desired at that wavelength. The halftone phase shift photomask (107) comprises on a transparent substrate (101) and a halftone phase shift film containing at least tantalum, oxygen, carbon and nitrogen, and has a multilayer structure comprising at least two or more different layers (102) and (103).

摘要翻译： 本发明涉及一种半色调相移光掩模，其在对检查的波长的透射率和测量设备方面进行精确控制，使得即使将其在曝光波长处的相位差控制在 180℃，其透过率根据需要设定在1〜20％。 半色调相移光掩模（107）包括在透明基板（101）和至少含有钽，氧，碳和氮的半色调相移膜，并且具有包括至少两个或多个不同层（102）和 （103）。

公开(公告)号：US5061034A

公开(公告)日：1991-10-29

申请号：US465173

申请日：1990-02-26

申请人： Junji Fujikawa ,  Fumiaki Tamura

发明人： Junji Fujikawa ,  Fumiaki Tamura

IPC分类号： G02B6/255 ,  G02B6/38

CPC分类号： G02B6/2558 ,  G02B6/2555

摘要： A permanent connector for optical fibers comprises a protective glass tube (2), a capillary tube (1) received therein and eccentrically joined thereto, the two tubes being made of ultraviolet-transmitting glass, and an adhesive-passing groove (1c) formed in the middle portion of the capillary tube (1) and opening on the side opposite to the side where they are joined together. An ultraviolet-curing type adhesive agent is charged into the permanent connector for optical fibers and the ends of optical fibers (3, 4) are inserted thereinto through the opposite ends thereof until the clads (3a, 4a) are butted against each other in the capillary tube (1) while pushing out the adhesive agent and air. And ultraviolet rays are radiated to cure the adhesive agent (6), thereby connecting the optical fibers (3, 4) together.

公开(公告)号：US4988161A

公开(公告)日：1991-01-29

申请号：US398561

申请日：1989-08-25

申请人： Junji Fujikawa ,  Fumiaki Tamura

发明人： Junji Fujikawa ,  Fumiaki Tamura

IPC分类号： G02B6/36 ,  G02B6/38

CPC分类号： G02B6/3837 ,  G02B6/3644 ,  G02B6/3834 ,  G02B6/3684 ,  G02B6/3854 ,  G02B6/3861

摘要： An optical fiber fixing element consists of a glass tube having an inner hole for receiving a clad portion of an optical fiber and which is formed at one end with a conical flared portion converging into the inner hole and a recess for receiving a cover portion of the optical fiber thereinto, both the flared portion and the recess being formed concentrically with the glass tube. A method of manufacturing such optical fiber fixing element is also provided which comprises forming an erosion resistant film on an outer surface, other than an end face, of a glass tube having an inner hole, treating the end face of the glass tube with a glass erosive solution to thereby form a flared portion, and grinding the flared portion to thereby form a recess in the flared portion.

摘要翻译： 光纤固定元件由玻璃管组成，该玻璃管具有用于容纳光纤的包层部分的内孔，并且一端形成有会聚在该内孔中的锥形扩口部，以及用于容纳 光纤在其中，扩口部分和凹部都与玻璃管同心地形成。 还提供了一种制造这种光纤固定元件的方法，该方法包括在具有内孔的玻璃管的外表面的外表面上形成耐腐蚀膜，用玻璃管处理玻璃管的端面 从而形成扩口部分，并且研磨扩张部分，从而在扩口部分中形成凹部。