公开(公告)号：US20050006988A1

公开(公告)日：2005-01-13

申请号：US10852606

申请日：2004-05-25

申请人： Osamu Kawauchi ,  Koji Watanabe

发明人： Osamu Kawauchi ,  Koji Watanabe

IPC分类号： G01C19/56 ,  G01C19/5621 ,  G01C19/5628 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/311

CPC分类号： G01C19/5607 ,  Y10T74/12 ,  Y10T74/1275

摘要： The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.

摘要翻译： 本发明提供了一种压电振动陀螺元件，其包括一对检测谐振臂在其中心，连接臂位于中心的右侧和左侧，以及一对驱动谐振臂在连接臂的每个远端，这使得 可以确保共振臂的弯曲和振动的对称性，并且容易且精确地分离电极。 特别地，沿着连接臂的每个端面延伸的方向延伸的延伸部分的两个侧表面在垂直于驱动共振臂延伸的方向的方向上设置在两侧。 延伸部件的厚度方向的端面穿过连接臂的端面的表面和后表面与延伸部分的布线可以形成为将前面的每个的第一驱动电极电耦合 和驱动谐振臂的后表面。 用于电极分离的曝光可以从上述方向在垂直于延伸部分的平坦表面的方向上以与驱动谐振臂的主表面给定的角度进行，以便同时将主表面和侧表面暴露于光 。

公开(公告)号：US06545392B2

公开(公告)日：2003-04-08

申请号：US09781443

申请日：2001-02-13

申请人： Osamu Kawauchi ,  Hisashi Mikoshiba ,  Mitsuru Nagai

发明人： Osamu Kawauchi ,  Hisashi Mikoshiba ,  Mitsuru Nagai

IPC分类号： H01L41053

CPC分类号： H03H9/1021

摘要： A package structure for a piezoelectric resonator includes a base which has a shape of flat box and made of an insulating material, and a thin lid bonded to the upper side of the base. A tuning fork type quartz crystal resonator piece is mounted at its one end, that is its base end, on electrode pads provided on the mounting surface in a cantilever manner using conductive adhesive so that it is parallel to the mounting surface, and hermetically sealed in a package with the lid engaged therewith. Either one or both of the mounting surface of the base and the inner surface of the lid has a recess formed at the location adjacent to the free end of a tuning fork type quartz crystal resonator piece so that the free end does not touch the inside surfaces of the packages when the quartz crystal resonator piece is largely dislocated on external impact.

摘要翻译： 用于压电谐振器的封装结构包括具有扁平盒形状并由绝缘材料制成的基座和结合到基座的上侧的薄盖。 音叉型石英晶体谐振器片的一端，即其基端，以悬臂方式设置在安装表面上的电极焊盘上，使用导电粘合剂安装，使其平行于安装表面，并气密密封 具有与其接合的盖的包装。 基座的安装面和盖的内表面中的一个或两者具有形成在与音叉型石英晶体振动片的自由端相邻的位置处的凹部，使得自由端不接触内表面 当石英晶体谐振器片在外部冲击时大大脱位时，封装件。

公开(公告)号：US07060520B2

公开(公告)日：2006-06-13

申请号：US10382840

申请日：2003-03-07

申请人： Osamu Kawauchi ,  Kenji Sakurai ,  Kenichiro Murata

发明人： Osamu Kawauchi ,  Kenji Sakurai ,  Kenichiro Murata

IPC分类号： H01L21/00 ,  H01L21/48

CPC分类号： H03H9/21 ,  H03H3/02 ,  H03H9/1021 ,  H03H2003/026

摘要： The invention provides a method of sealing piezoelectric devices with covers capable of rapidly and securely sealing a plurality of packages or many packages of piezoelectric devices with covers. A piezoelectric device includes a package in which a piezoelectric vibrating reed is partially supported and fixed, and a cover fixed to the packages. In a method of sealing the packages with the covers, a plurality of the packages are arranged with the bottoms facing halogen lamps, so that the bottoms are irradiated with the light beams from the halogen lamps to thermally melt a brazing material disposed between the packages and the covers.

摘要翻译： 本发明提供了一种密封具有盖的压电装置的方法，其能够快速且可靠地密封多个封装或具有盖的多个压电装置封装。 压电装置包括其中部分地支撑和固定压电振动片的封装，以及固定到封装的盖。 在使用盖子密封包装的方法中，多个包装件被布置成底部朝向卤素灯，从而使来自卤素灯的光束照射底部以热熔融设置在包装之间的钎焊料和 封面。

公开(公告)号：US20050284223A1

公开(公告)日：2005-12-29

申请号：US10891124

申请日：2004-07-15

申请人： Eiji Karaki ,  Osamu Kawauchi

发明人： Eiji Karaki ,  Osamu Kawauchi

IPC分类号： G01C19/56 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/22 ,  H01L41/311 ,  H03H9/09 ,  H03H9/17 ,  G01P9/04

CPC分类号： G01C19/56 ,  G01C19/5719

摘要： Aspects of the invention can provide piezoelectric vibrating segment, a supporting structure for the piezoelectric vibrating segment, piezoelectric vibrator, and the piezoelectric vibrating gyroscope capable of maintaining stable excited vibrations and stable sensing vibrations. The piezoelectric vibrating segment can include a base section, a plurality of excited vibration arms and sensing vibration arms radially extending from the base section in a single plane. A plurality of first beams having elasticity extending from the base section and between the vibration arms and, at least, a first supporting section formed on the tips of the beams can be formed. The excited vibration arms and the sensing vibration arms are provided with electrode patterns formed thereon to be connected to and driven by a semiconductor device. The piezoelectric segment is encapsulated by a container composed of a base member and a lid member to form a piezoelectric vibrator and a piezoelectric vibrating gyroscope, and stable excited vibrations and stable sensing vibrations are maintained.

摘要翻译： 本发明的方面可以提供压电振动段，压电振动段的支撑结构，压电振动器和能够保持稳定的激发振动和稳定的感测振动的压电振动陀螺仪。 压电振动段可以包括基部，多个激励振动臂和感测振动臂，其在单个平面中从基部部分径向延伸。 可以形成多个从基部延伸的振动臂和至少形成在梁的顶端上的第一支撑部的弹性的第一梁。 激励的振动臂和感测振动臂设置有形成在其上的电极图案，以连接到半导体器件并由其驱动。 压电段被由基体和盖构件组成的容器封装，形成压电振动器和压电振动陀螺仪，并保持稳定的激发振动和稳定的感测振动。