公开(公告)号：US20050284223A1

公开(公告)日：2005-12-29

申请号：US10891124

申请日：2004-07-15

申请人： Eiji Karaki ,  Osamu Kawauchi

发明人： Eiji Karaki ,  Osamu Kawauchi

IPC分类号： G01C19/56 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/22 ,  H01L41/311 ,  H03H9/09 ,  H03H9/17 ,  G01P9/04

CPC分类号： G01C19/56 ,  G01C19/5719

摘要： Aspects of the invention can provide piezoelectric vibrating segment, a supporting structure for the piezoelectric vibrating segment, piezoelectric vibrator, and the piezoelectric vibrating gyroscope capable of maintaining stable excited vibrations and stable sensing vibrations. The piezoelectric vibrating segment can include a base section, a plurality of excited vibration arms and sensing vibration arms radially extending from the base section in a single plane. A plurality of first beams having elasticity extending from the base section and between the vibration arms and, at least, a first supporting section formed on the tips of the beams can be formed. The excited vibration arms and the sensing vibration arms are provided with electrode patterns formed thereon to be connected to and driven by a semiconductor device. The piezoelectric segment is encapsulated by a container composed of a base member and a lid member to form a piezoelectric vibrator and a piezoelectric vibrating gyroscope, and stable excited vibrations and stable sensing vibrations are maintained.

摘要翻译： 本发明的方面可以提供压电振动段，压电振动段的支撑结构，压电振动器和能够保持稳定的激发振动和稳定的感测振动的压电振动陀螺仪。 压电振动段可以包括基部，多个激励振动臂和感测振动臂，其在单个平面中从基部部分径向延伸。 可以形成多个从基部延伸的振动臂和至少形成在梁的顶端上的第一支撑部的弹性的第一梁。 激励的振动臂和感测振动臂设置有形成在其上的电极图案，以连接到半导体器件并由其驱动。 压电段被由基体和盖构件组成的容器封装，形成压电振动器和压电振动陀螺仪，并保持稳定的激发振动和稳定的感测振动。

公开(公告)号：US5376861A

公开(公告)日：1994-12-27

申请号：US860667

申请日：1992-03-30

申请人： Hideaki Nakamura ,  Eiji Karaki

发明人： Hideaki Nakamura ,  Eiji Karaki

IPC分类号： H03H3/02 ,  H03H9/02 ,  H03H9/19 ,  H01L41/08

CPC分类号： H03H9/02023 ,  H03H3/02 ,  H03H9/19

摘要： An AT-cut crystal oscillating reed formed by etching an AT-cut crystal wafer is provided. The wafer has a rotational parallel cut obtained by rotating a parallel cut by an angular degree of .theta..degree. relative to the X-axis of the wafer. The etching cross-section of the AT-cut crystal oscillating reed has a surface at an angle about 90.degree. from the front or back surface of the AT-cut crystal oscillating reed. This AT-cut crystal oscillating reed exhibits uniform characteristics and excellent reliability. Also provided is an AT-cut crystal oscillating reed with a low CI value. Finally, a method of etching an AT-cut crystal oscillating reed from an AT-cut crystal wafer is provided. A corrosion resisting film with gaps coats the wafer and is used in the etching process. In a preferred embodiment, the thickness of the wafer is designated t, the width of the gaps in the corrosion resisting films is designated l, and l.gtoreq.t/tan .theta.. The corrosion resisting film may be metal and may be formed into electrodes after the crystal oscillating reed is etched. In this manner, crystal oscillating reeds may be mass produced at a relatively low cost.

摘要翻译： 提供通过蚀刻AT切割晶片形成的AT切割晶体振荡簧片。 晶片具有通过使平行切割相对于晶片的X轴旋转角度θ°而获得的旋转平行切割。 AT切割晶体振荡簧片的蚀刻横截面具有与AT切割晶体振荡簧片的前表面或后表面成90°角的表面。 这种AT切割水晶摆动簧片具有均匀的特性和出色的可靠性。 还提供了具有低CI值的AT切割晶体振荡簧片。 最后，提供了从AT切割晶体晶片蚀刻AT切割晶体振荡簧片的方法。 具有间隙的耐腐蚀膜涂覆晶片并用于蚀刻工艺。 在优选实施例中，晶片的厚度指定为t，耐腐蚀膜中的间隙的宽度指定为l，并且l≥t/tanθ。 耐腐蚀膜可以是金属，并且可以在晶体振荡筘被蚀刻之后形成电极。 以这种方式，可以以相对较低的成本批量生产晶体振荡簧片。

公开(公告)号：US5304459A

公开(公告)日：1994-04-19

申请号：US901287

申请日：1992-06-19

申请人： Hideaki Nakamura ,  Eiji Karaki

发明人： Hideaki Nakamura ,  Eiji Karaki

IPC分类号： H03H3/02 ,  H03H9/02 ,  H03H9/19 ,  G03C5/00 ,  H01L41/04

CPC分类号： H03H9/02023 ,  H03H3/02 ,  H03H9/19

摘要： An AT-cut crystal oscillating reed formed by etching an AT-cut crystal wafer is provided. The wafer has a rotational parallel cut obtained by rotating a parallel cut by an angular degree of .theta..degree. relative to the X-axis of the wafer. The etching cross-section of the AT-cut crystal oscillating reed has a surface at an angle about 90.degree. from the front or back surface of the AT-cut crystal oscillating reed. This AT-cut crystal oscillating reed exhibits uniform characteristics and excellent reliability. Also provided is an AT-cut crystal oscillating reed with a low CI value. Finally, a method of etching an AT-cut crystal oscillating reed from an AT-cut crystal wafer is provided. A corrosion resisting film with gaps coats the wafer and is used in the etching process. In a preferred embodiment, the thickness of the wafer is designated t, the width of the gaps in the corrosion resisting films is designated l, and l.gtoreq.t/tan .theta.. The corrosion resisting film may be metal and may be formed into electrodes after the crystal oscillating reed is etched. In this manner, crystal oscillating reeds may be mass produced at a relatively low cost.

摘要翻译： 提供通过蚀刻AT切割晶片形成的AT切割晶体振荡簧片。 晶片具有通过使平行切割相对于晶片的X轴以（θ）度的角度度旋转而获得的旋转平行切割。 AT切割晶体振荡簧片的蚀刻横截面具有与AT切割晶体振荡簧片的前表面或后表面成约90度的角度的表面。 这种AT切割水晶摆动簧片具有均匀的特性和出色的可靠性。 还提供了具有低CI值的AT切割晶体振荡簧片。 最后，提供了从AT切割晶体晶片蚀刻AT切割晶体振荡簧片的方法。 具有间隙的耐腐蚀膜涂覆晶片并用于蚀刻工艺。 在优选实施例中，晶片的厚度为t，耐蚀膜中间隙的宽度为l，l> = t / tan（θ）。 耐腐蚀膜可以是金属，并且可以在晶体振荡筘被蚀刻之后形成电极。 以这种方式，可以以相对较低的成本批量生产晶体振荡簧片。

公开(公告)号：US06849991B2

公开(公告)日：2005-02-01

申请号：US10391745

申请日：2003-03-20

申请人： Guoqing Zhang ,  Masako Tanaka ,  Eiji Karaki ,  Yukihiro Unno

发明人： Guoqing Zhang ,  Masako Tanaka ,  Eiji Karaki ,  Yukihiro Unno

IPC分类号： H03H9/02 ,  H03H9/19 ,  H01L41/08

CPC分类号： H03H9/02023

摘要： The invention provides a stabilized frequency characteristic over a wide temperature range. A quartz resonating piece is provided such that an electrical axis of quartz corresponds to an X axis, a mechanical axis of the quartz corresponds to a Y axis, and an optical axis of the quartz corresponds to a Z axis. The quartz resonating piece includes a quartz plate having a side that is parallel to an X′axis set by clockwise rotation of the X axis around the Z axis by an angle equal to or greater than −5.0° and less than −1.0° or by an angle greater than +1.0° and equal to or less than 15.9°, and another side that is parallel to a Z′ axis set by clockwise rotation of the Z axis around the X′ axis by an angle in a range from 34.6° to 35.1° inclusive; or a quartz plate having a side that is parallel to the X′ axis set by clockwise rotation of the X axis around the Z axis by an angle in a range from −15.9° to −5.0° inclusive, and another side that is parallel to the Z′ axis set by clockwise rotation of the Z axis around the X′ axis by an angle in a range from 34.2° to 35.3° inclusive.

摘要翻译： 本发明在宽温度范围内提供稳定的频率特性。 提供石英谐振片，使得石英的电轴对应于X轴，石英的机械轴对应于Y轴，并且石英的光轴对应于Z轴。 石英谐振片包括石英板，该石英板具有平行于X轴的一侧，该侧通过X轴绕Z轴的顺时针旋转设定等于或大于-5.0°且小于-1.0°的角度，或者通过 大于+ 1.0°且等于或小于15.9°的角度的另一侧，并且Z轴的Z轴周围围绕X'轴顺时针旋转设置的另一侧为34.6°至 35.1° 或具有平行于X轴的一侧的石英板，其通过X轴绕Z轴的顺时针旋转设置在-15.9°至-5.0°的范围内的角度，并且另一侧平行于 Z轴由围绕X'轴的Z轴顺时针旋转设定在34.2°〜35.3°范围内的角度。

公开(公告)号：US5736710A

公开(公告)日：1998-04-07

申请号：US595070

申请日：1996-02-01

申请人： Tatsuo Ikeda ,  Eiji Karaki ,  Takuo Kuwahara

发明人： Tatsuo Ikeda ,  Eiji Karaki ,  Takuo Kuwahara

IPC分类号： B23K26/08 ,  H03H3/007 ,  H03H3/02 ,  H03H9/10 ,  B23K26/02

CPC分类号： H03H9/1021 ,  B23K26/0823 ,  B23K26/206 ,  H03H3/007 ,  H03H3/02

摘要： The case of a piezoelectric resonator in which a piezoelectric oscillator piece having a piezoelectric body and an electrode is flattened and a guard is provided protruding by the amount about the same as the thickness of the case on the hermetic terminal so that the open edge is received by insertion. Then the hermetic terminal in which one end of the piezoelectric oscillator piece is supported by the inner lead is inserted in the open edge of the case and the case is sealed by laser welding the welding area extending to the guard and to the open edge. By so doing, a thin piezoelectric resonator is provided which is ideal for surface mounting and being capable of maintaining the inside of the case in a stable vacuum state or sealed with nitrogen and the like for a long time.

摘要翻译： 在压电谐振器的情况下，其中压电体和电极的压电振子片被压平，并且设置防护件突出大约与密封端子上的壳体的厚度相同的量，使得接收开口边缘 通过插入。 然后将压电振子片的一端由内引线支撑的密封端子插入到壳体的开口边缘，并且通过激光焊接延伸到护罩的焊接区域和开口边缘来密封壳体。 通过这样做，提供了一种薄的压电谐振器，其是表面安装的理想选择，并且能够将壳体的内部保持在稳定的真空状态，或者长时间用氮等密封。

公开(公告)号：US06590314B1

公开(公告)日：2003-07-08

申请号：US09529082

申请日：2001-06-01

申请人： Hiroshi Arahari ,  Eiji Karaki ,  Setsuhiro Hama

发明人： Hiroshi Arahari ,  Eiji Karaki ,  Setsuhiro Hama

IPC分类号： H01L4108

CPC分类号： H03H9/1021 ,  H05K1/18 ,  H05K1/181

摘要： In a piezoelectric resonator container having a cylindrical case, one end of which is an open end, and a stem for sealing the open end of the case, an outer peripheral face of the stem and an inner peripheral face of the case have a nearly elliptical shape or an elliptical shape, respectively. A pressure allowance when pressing the stem into the open end of the case monotonically increases from a major axis portion of the case toward a minor axis portion. Therefore, since the pressure allowance is large at minor axis portions where vertical stress tends to decrease and the pressure allowance is small at major axis portions where tensile stress tends to increase, incomplete gas-tightness due to inadequate sealing or breaking of the case does not occur. This provides a piezoelectric resonator container in which incomplete gas-tightness is not caused, even if an elliptical or a nearly elliptical case is used, and a piezoelectric resonator piece does not come into contact with the inner periphery of the case.

摘要翻译： 在具有一端为开放端的圆筒形壳体和用于密封壳体的开口端的杆的压电谐振器容器中，杆的外周面和壳体的内周面具有近似椭圆形 形状或椭圆形。 当将柄按压到壳体的开口端时的压力容限从壳体的长轴部分向短轴部分单调增加。 因此，由于在拉伸应力趋于增加的长轴部分处的垂直应力趋于降低的短轴部分的压力容许量大，并且由于壳体的不充分的密封或破裂导致的不完全的气密性不是 发生。 这提供了即使使用椭圆形或近似椭圆形的情况也不会导致不完全的气密性的压电谐振器容器，并且压电谐振器片不与壳体的内周接触。

公开(公告)号：US6005329A

公开(公告)日：1999-12-21

申请号：US955463

申请日：1997-10-21

申请人： Tatsuo Ikeda ,  Eiji Karaki ,  Takuo Kuwahara

发明人： Tatsuo Ikeda ,  Eiji Karaki ,  Takuo Kuwahara

IPC分类号： B23K26/08 ,  H03H3/02 ,  H03H9/10 ,  H01L41/053

CPC分类号： H03H9/1021 ,  B23K26/0823 ,  B23K26/206 ,  H03H3/02

摘要： The case of a piezoelectric resonator in which a piezoelectric vibrator having a piezoelectric body and an electrode is flattened and a guard is provided protruding by the amount about the same as the thickness of the case on the hermetic terminal so that the open edge is received by insertion. Then the hermetic terminal in which one end of the piezoelectric vibrator is supported by the inner lead is inserted in the open edge of the case and the case is sealed by laser welding the welding area extending to the guard and to the open edge. By so doing, a thin piezoelectric resonator is provided which is desirable for surface mounting and being capable of maintaining the inside of the case in a stable vacuum state or sealed with nitrogen and the like for a long time. Moreover, by supporting the piezoelectric vibrator by the flattened inner lead inside the air tight case, a piezoelectric resonator is provided which has excellent frequency characteristics and long term aging characteristics.

摘要翻译： 压电谐振器的情况，其中具有压电体和电极的压电振动器被平坦化，并且设置防护件，突出量与密封端子上的壳体的厚度大致相同，使得开口边缘被接收到 插入。 然后将压电振子的一端由内引线支撑的密封端子插入壳体的开口边缘，并且通过激光焊接延伸到防护件的焊接区域和开口边缘来密封壳体。 通过这样做，提供了薄的压电谐振器，其对于表面安装是期望的，并且能够将壳体的内部保持在稳定的真空状态，或者长时间用氮等密封。 此外，通过在气密性壳体内的扁平内引线支撑压电振动器，提供了具有优异的频率特性和长期老化特性的压电谐振器。

公开(公告)号：US5314577A

公开(公告)日：1994-05-24

申请号：US901293

申请日：1992-06-19

申请人： Hideaki Nakamura ,  Eiji Karaki

发明人： Hideaki Nakamura ,  Eiji Karaki

IPC分类号： H03H3/02 ,  H03H9/02 ,  H03H9/19 ,  B44C1/22 ,  H01L41/04

CPC分类号： H03H9/02023 ,  H03H3/02 ,  H03H9/19

摘要： An AT-cut crystal oscillating reed formed by etching an AT-cut crystal wafer is provided. The wafer has a rotational parallel cut obtained by rotating a parallel cut by an angular degree of .theta..degree. relative to the X-axis of the wafer. The etching cross-section of the AT-cut crystal oscillating reed has a surface at an angle about 90.degree. from the front or back surface of the AT-cut crystal oscillating reed. This AT-cut crystal oscillating reed exhibits uniform characteristics and excellent reliability. Also provided is an AT-cut crystal oscillating reed with a low CI value. Finally, a method of etching an AT-cut crystal oscillating reed from an AT-cut crystal wafer is provided. A corrosion resisting film with gaps coats the wafer and is used in the etching process. In a preferred embodiment, the thickness of the wafer is designated t, the width of the gaps in the corrosion resisting films is designated l, and l.ltoreq.t/tan .theta.. The corrosion resisting film may be metal and may be formed into electrodes after the crystal oscillating reed is etched. In this manner, crystal oscillating reeds may be mass produced at a relatively low cost.

摘要翻译： 提供通过蚀刻AT切割晶片形成的AT切割晶体振荡簧片。 晶片具有通过使平行切割相对于晶片的X轴旋转角度θ°而获得的旋转平行切割。 AT切割晶体振荡簧片的蚀刻横截面具有与AT切割晶体振荡簧片的前表面或后表面成90°角的表面。 这种AT切割水晶摆动簧片具有均匀的特性和出色的可靠性。 还提供了具有低CI值的AT切割晶体振荡簧片。 最后，提供了从AT切割晶体晶片蚀刻AT切割晶体振荡簧片的方法。 具有间隙的耐腐蚀膜涂覆晶片并用于蚀刻工艺。 在优选实施例中，晶片的厚度指定为t，耐腐蚀膜中的间隙的宽度指定为l，并且l = t /tanθ。 耐腐蚀膜可以是金属，并且可以在晶体振荡筘被蚀刻之后形成电极。 以这种方式，可以以相对较低的成本批量生产晶体振荡簧片。