公开(公告)号：US11220737B2

公开(公告)日：2022-01-11

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King ,  Elliot H. Hartford, Jr. ,  Siddharth Harikrishna Mohan ,  Benjamin Swedlove ,  Gregg Kottas

IPC: C23C14/12 ,  C23C14/54 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00 ,  B05D1/00

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

公开(公告)号：US11201288B2

公开(公告)日：2021-12-14

申请号：US15981482

申请日：2018-05-16

Applicant: Universal Display Corporation

Inventor： Xin Xu ,  Gregory McGraw ,  William E. Quinn

IPC: H01L51/00 ,  B41J2/14 ,  C23C14/22 ,  C23C14/12 ,  C23C14/04 ,  B41J2/04 ,  B05B12/18 ,  B41J2/045 ,  C23C16/455 ,  H01L27/32 ,  H01L51/50 ,  H01L51/52 ,  H05B33/10 ,  H05B33/12

Abstract: OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.

公开(公告)号：US11196030B2

公开(公告)日：2021-12-07

申请号：US16659803

申请日：2019-10-22

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw

IPC: H01L51/56 ,  H01L51/00 ,  C23C16/455 ,  C23C16/448

Abstract: A source of material for use in a deposition system includes one or more baffles or equivalent structures within the source. The baffles provide for increased concentration of material entrained in a carrier gas that is passed through and emitted by the source.

公开(公告)号：US11121320B2

公开(公告)日：2021-09-14

申请号：US16400218

申请日：2019-05-01

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw ,  Gregg Kottas ,  Xin Xu ,  Julia J. Brown

IPC: H01L51/56 ,  H01L51/00 ,  B05B12/18 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US11033924B2

公开(公告)日：2021-06-15

申请号：US16254998

申请日：2019-01-23

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King

IPC: B05C5/02 ,  G03F7/00 ,  H01L51/00 ,  B05B7/00 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

公开(公告)号：US10886503B2

公开(公告)日：2021-01-05

申请号：US16654042

申请日：2019-10-16

Applicant: Universal Display Corporation ,  Kent State University

Inventor： Yue Cui ,  Deng-ke Yang ,  Ruiqing Ma ,  Gregory McGraw ,  Julia J. Brown

IPC: H01L51/52 ,  G02B3/00

Abstract: Novel microlens array architectures for enhanced light outcoupling from light emission are provided. Organic light emitting devices (OLEDs) that include an outcoupling layer including these novel microlens array architectures and method for fabricating such OLEDs are provided. These devices may be used to provide OLEDs with optimized light extraction.

公开(公告)号：US10243172B2

公开(公告)日：2019-03-26

申请号：US15644910

申请日：2017-07-10

Applicant: Universal Display Corporation

Inventor： Paul E. Burrows ,  Emory Krall ,  Huiqing Pang ,  Jason Paynter ,  Kamala Rajan ,  Ruiqing Ma ,  Gregory McGraw

IPC: F21S8/06 ,  F21V3/06 ,  F21V5/00 ,  F21V17/00 ,  F21V17/12 ,  H01L51/52 ,  F21Y105/00 ,  F21Y115/15

Abstract: Luminaires and luminaire components are provided that may include emissive, index-matching, and/or outcoupling components that are replaceable separately from other components of the luminaire. In some embodiments, an index-matching component may include a gel sheet or pad that can be disposed between an emissive component and an outcoupling component. The index-matching component may be replaceable separately from the emissive and outcoupling components. In some embodiments, an emissive component including an OLED panel and/or an index-matching component may be replaceable separately from other components of the luminaire.

公开(公告)号：US10115930B2

公开(公告)日：2018-10-30

申请号：US14325509

申请日：2014-07-08

Applicant: Universal Display Corporation ,  Kent State University

Inventor： Yue Cui ,  Deng-ke Yang ,  Gregory McGraw ,  Ruiqing Ma ,  Julia J. Brown

IPC: H01L51/52 ,  H01L51/56

Abstract: OLED structures including an internal extraction layer are provided. The internal extraction layer includes a material having a refractive index that is higher than the refractive index of a transparent electrode in the device, and a non-planar interface disposed between the material and the substrate. Devices are also provided that include an external extraction layer having a non-planar surface which, when used in conjunction with an internal extraction layer, provides greatly improved outcoupling of light generated by the device.

公开(公告)号：US20180105923A1

公开(公告)日：2018-04-19

申请号：US15841171

申请日：2017-12-13

Applicant: The Regents of the University of Michigan ,  Universal Display Corporation

Inventor： Stephen Forrest ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Diane L. Peters

IPC: C23C14/12 ,  C23C14/24 ,  C23C14/22

CPC classification number: C23C14/12 ,  C23C14/228 ,  C23C14/243 ,  Y10T137/85938

Abstract: A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture.

公开(公告)号：US20170309866A1

公开(公告)日：2017-10-26

申请号：US15644910

申请日：2017-07-10

Applicant: Universal Display Corporation

Inventor： Paul E. Burrows ,  Emory Krall ,  Huiqing Pang ,  Jason Paynter ,  Kamala Rajan ,  Ruiqing Ma ,  Gregory McGraw

IPC: H01L51/52 ,  F21V3/04 ,  F21S8/06 ,  F21V17/12 ,  F21V17/00 ,  F21Y2115/15 ,  F21Y105/00

CPC classification number: H01L51/5275 ,  F21S8/06 ,  F21V3/062 ,  F21V5/008 ,  F21V17/002 ,  F21V17/12 ,  F21Y2105/00 ,  F21Y2115/15

Abstract: Luminaires and luminaire components are provided that may include emissive, index-matching, and/or outcoupling components that are replaceable separately from other components of the luminaire. In some embodiments, an index-matching component may include a gel sheet or pad that can be disposed between an emissive component and an outcoupling component. The index-matching component may be replaceable separately from the emissive and outcoupling components. In some embodiments, an emissive component including an OLED panel and/or an index-matching component may be replaceable separately from other components of the luminaire.