利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

74 条记录 (耗时 0.029 秒)

    Organic vapor jet print head with redundant groups of depositors
    13.
    发明授权
    Organic vapor jet print head with redundant groups of depositors 有权

    公开(公告)号：US11121320B2

    公开(公告)日：2021-09-14

    申请号：US16400218

    申请日：2019-05-01

    申请人： Universal Display Corporation

    发明人： William E. Quinn ,  Gregory McGraw ,  Gregg Kottas ,  Xin Xu ,  Julia J. Brown

    IPC分类号： H01L51/56 ,  H01L51/00 ,  B05B12/18 ,  H01L51/50

    摘要： Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

    Organic vapor jet print head with orthogonal delivery and exhaust channels
    14.
    发明授权
    Organic vapor jet print head with orthogonal delivery and exhaust channels 有权

    公开(公告)号：US11033924B2

    公开(公告)日：2021-06-15

    申请号：US16254998

    申请日：2019-01-23

    申请人： Universal Display Corporation

    发明人： Gregory McGraw ,  William E. Quinn ,  Matthew King

    IPC分类号： B05C5/02 ,  G03F7/00 ,  H01L51/00 ,  B05B7/00 ,  H01L51/50

    摘要： Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

    HIGH VACUUM OLED DEPOSITION SOURCE AND SYSTEM
    20.
    发明申请
    HIGH VACUUM OLED DEPOSITION SOURCE AND SYSTEM 有权
    高真空OLED沉积源和系统

    公开(公告)号：US20150140832A1

    公开(公告)日：2015-05-21

    申请号：US14081161

    申请日：2013-11-15

    申请人： Universal Display Corporation

    发明人： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw

    IPC分类号： H01L51/00 ,  C23C14/12 ,  H01L51/56 ,  C23C14/04

    CPC分类号： H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L51/56

    摘要： Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.

    摘要翻译： 提供了用于沉积有机层的源，器件和技术，例如用于OLED。 蒸发器可以将冷却的侧壁之间的材料蒸发并且朝向具有可调节的掩模开口的掩模蒸发。 可以调节掩模开口以控制材料在衬底上的沉积图案，以便校正在沉积期间发生的材料堆积。 可以从冷却的侧壁收集材料以供重新使用。