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公开(公告)号:US07298537B2
公开(公告)日:2007-11-20
申请号:US11609796
申请日:2006-12-12
IPC分类号: G02B26/08
CPC分类号: G02B26/125
摘要: An optical scanner includes a light source, an optical coupler, an optical line image unit, a deflector, and an optical scanning unit. The optical scanning unit includes scanning lenses that guide the beams to a surface to be scanned. A surface on the deflector side of the scanning lens closest to a deflection reflecting surface has a negative power in a vertical scanning direction, and is a special toric surface in which a radius of curvature in a vertical scanning changes from an optical axis of the lens surface toward a periphery of the horizontal scanning direction. An F number of the beams toward the surface to be scanned of the scanning lens in the vertical scanning direction is larger in a peripheral part than in a central part in an effective scanning width.
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公开(公告)号:US07154651B2
公开(公告)日:2006-12-26
申请号:US11146106
申请日:2005-06-07
IPC分类号: G02B26/08
CPC分类号: G02B26/123
摘要: A multi-beam optical scanning device is disclosed that includes a light source emitting a bundle of rays, a first optical system coupling the rays into diverging rays, a second optical system condensing the diverging rays into linear rays extending in the main scanning direction, a light deflector deflecting the linear rays, and a third optical system condensing the deflected rays onto a scanning surface. The second and third optical systems include resin imaging elements. At least one resin imaging element of the second optical system has a negative power in a sub scanning direction and a surface configuration that is arranged to effectively compensate for a change in field curvature caused by a temperature change in a support member of the first optical system or the resin imaging element of the third optical system. The second optical system as a whole has a positive power in the main scanning direction.
摘要翻译: 公开了一种多光束光学扫描装置,其包括发射一束光的光源,将光线耦合到发散光线的第一光学系统,将发散光线会聚到沿主扫描方向延伸的线状光线的第二光学系统, 光偏转器偏转线性光线,以及第三光学系统,将偏转的光线会聚到扫描面上。 第二和第三光学系统包括树脂成像元件。 第二光学系统的至少一个树脂成像元件在副扫描方向上具有负功率,并且表面配置布置成有效地补偿由第一光学系统的支撑构件的温度变化引起的场曲率的变化 或第三光学系统的树脂成像元件。 第二光学系统整体在主扫描方向上具有正的功率。
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公开(公告)号:US07050210B2
公开(公告)日:2006-05-23
申请号:US10421786
申请日:2003-04-24
IPC分类号: G02B26/08
CPC分类号: G02B26/123
摘要: An optical scanning device, including a resin lens having a power that is an inverse power of scanning lens placed before a deflector. A bundle of rays emitted from a plurality of light sources is coupled into a desired state by coupling lens, after which the bundle of rays is incident on the resin lens. The surface of incidence of the resin lens has a spherical surface with a negative power, and the exit surface of this resin lens has a cylindircal surface with a negative power only in the sub scanning direction. The bundle of rays passes through the resin lens and enters a glass toroidal lens. A light deflector deflects the bundle of rays from the toroidal lens. The deflected bundle of rays is incident on a third optical system that condenses the deflected bundle of rays onto a surface to be scanned.
摘要翻译: 一种光学扫描装置,包括具有设置在偏转器之前的扫描透镜的反向光焦度的树脂透镜。 从多个光源发射的光束通过耦合透镜耦合到期望的状态,之后光束入射到树脂透镜上。 树脂透镜的入射面具有负功率的球面,该树脂透镜的出射面仅具有在副扫描方向上具有负功率的圆柱面。 光束穿过树脂透镜并进入玻璃环形透镜。 光偏转器使来自环形透镜的光束偏转。 偏转的光束束入射在第三光学系统上,该第三光学系统将偏转的光束束聚集到待扫描的表面上。
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公开(公告)号:US20050225819A1
公开(公告)日:2005-10-13
申请号:US11146106
申请日:2005-06-07
IPC分类号: B41J2/44 , G02B13/00 , G02B13/18 , G02B26/10 , G02B26/12 , H04N1/036 , H04N1/113 , G02B26/08
CPC分类号: G02B26/123
摘要: In an optical scanning device, a resin lens having a power that is an inverse (negative) power of a scanning lens is implemented in an optical system placed before a deflector so that a change in beam pitch caused by environmental temperature change can be prevented even when a resin lens is used as the scanning lens. To realize optical scanning using this device, a bundle of rays emitted from a plurality of light sources is coupled into a desired state by a coupling lens, after which the bundle of rays is incident on a resin lens. The surface of incidence of this resin lens has a spherical surface configuration with a negative power, and the exit surface of this resin lens has a cylindrical surface configuration with a negative power only in the sub scanning direction. Then, the bundle of rays passes through a resin lens that has a negative power only in the sub scanning direction and then enters a glass toroidal lens. A light deflector deflects the bundle of rays from the toroidal lens and the deflected bundle of rays is incident on a third optical system that compensates for a field curvature in each of the main scanning direction and the sub scanning direction, and focuses the bundle of rays onto a surface to be scanned while securing a desired beam pitch in the sub scanning direction.
摘要翻译: 在光学扫描装置中,具有作为扫描透镜的反(负)光的功率的树脂透镜在设置在偏转器之前的光学系统中实现,使得甚至可以防止由环境温度变化引起的光束间距的变化 当使用树脂透镜作为扫描透镜时。 为了实现使用该装置的光学扫描,从多个光源发射的光束通过耦合透镜耦合到期望的状态,之后光束入射到树脂透镜上。 该树脂透镜的入射面具有负电力的球面形状,并且该树脂透镜的出射面仅具有副扫描方向具有负电力的圆柱面。 然后,该光束束通过仅在副扫描方向上具有负电力的树脂透镜,然后进入玻璃环形透镜。 光偏转器使来自环形透镜的光线偏转,并且偏转的光束入射到补偿主扫描方向和副扫描方向中的每一个中的场曲率的第三光学系统上,并且聚焦光束 在要扫描的表面上,同时在副扫描方向上固定期望的光束间距。
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公开(公告)号:US06771407B2
公开(公告)日:2004-08-03
申请号:US10247702
申请日:2002-09-20
申请人: Yoshinori Hayashi , Seizo Suzuki , Atsushi Kawamura , Hiromichi Atsuumi , Kohji Sakai , Akihisa Itabashi
发明人: Yoshinori Hayashi , Seizo Suzuki , Atsushi Kawamura , Hiromichi Atsuumi , Kohji Sakai , Akihisa Itabashi
IPC分类号: G02B2608
CPC分类号: G02B7/028 , G02B26/124 , G02B26/125
摘要: An optical system includes three optical systems. The first has a coupling lens. The second includes a lens having a positive power in a vertical scanning direction and forms the light flux into a line image extending in the horizontal scanning direction on a deflector. The third includes a first lens having a positive power in the horizontal scanning direction, and a second lens having a positive power in the vertical scanning direction. Lateral magnification in the horizontal scanning direction is set larger than that in the vertical scanning direction. Temperature near the first lens is maintained higher than that near the second lens.
摘要翻译: 光学系统包括三个光学系统。 第一个具有耦合透镜。 第二实施例包括在垂直扫描方向上具有正功率的透镜,并且将光束形成为在偏转器上沿水平扫描方向延伸的线图像。 第三透镜在水平扫描方向具有正功率,在垂直扫描方向具有正功率的第二透镜。 水平扫描方向的横向放大倍率设定为大于垂直扫描方向。 第一透镜附近的温度保持高于第二透镜附近的温度。
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公开(公告)号:US08773114B2
公开(公告)日:2014-07-08
申请号:US13071832
申请日:2011-03-25
申请人: Yoshinori Hayashi , Akihiko Komatsu
发明人: Yoshinori Hayashi , Akihiko Komatsu
IPC分类号: G01B7/14
CPC分类号: H01F7/1844 , G01B7/003 , G01D5/2046 , H01F7/1607 , H01F7/1653 , H01F2007/1684 , H01F2007/1692 , H01F2007/185 , H01F2007/1888
摘要: A displacement detecting apparatus of an electromagnetic actuator, including: an electromagnetic actuator including: a movable core; a drive coil which causes a displacement of the movable core; and a detection coil disposed at a position where a mutual coupling coefficient with the drive coil changes with the displacement, the actuator transmitting a drive force of the movable core to a mechanical system; a drive portion for supplying a drive current to the drive coil on the basis of a pulse width modulation signal; and a displacement detecting portion to which an output voltage of the detection coil is inputted, for outputting a displacement detection signal, wherein the displacement detecting portion includes: a sampling-signal generating portion for generating a sampling signal in synchronism with the pulse width modulation signal; and a synchronous sampling portion for outputting the displacement detection signal by sampling the output voltage in synchronism with the sampling signal.
摘要翻译: 一种电磁致动器的位移检测装置,包括:电磁致动器,包括:可动芯; 驱动线圈,其使所述可动铁芯移位; 以及检测线圈,其设置在与所述驱动线圈的相互耦合系数随位移而变化的位置,所述致动器将所述可动芯的驱动力传递到机械系统; 驱动部分,用于根据脉宽调制信号向驱动线圈提供驱动电流; 以及位移检测部分,其输入检测线圈的输出电压,用于输出位移检测信号,其中位移检测部分包括:采样信号产生部分,用于产生与脉宽调制信号同步的采样信号 ; 以及同步采样部分,用于通过与采样信号同步地对输出电压进行采样来输出位移检测信号。
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公开(公告)号:US08624951B2
公开(公告)日:2014-01-07
申请号:US12362050
申请日:2009-01-29
申请人: Makoto Hirakawa , Yoshinori Hayashi
发明人: Makoto Hirakawa , Yoshinori Hayashi
IPC分类号: B41J15/14
CPC分类号: B41J2/471 , G02B5/189 , G02B26/124 , G02B27/42 , G02B27/4227 , G02B27/4283
摘要: An optical scanning device that scans a scanning surface with a light beam includes a light source that emits the light beam and a pre-deflector optical system that includes at least one diffractive optical element including a diffraction surface having no power at room temperature. The diffraction surface has a multi-step shape having a plurality of zone surfaces substantially perpendicular to an optical axis and a plurality of step surfaces each adjacent to each of the zone surfaces. On a cross sectional plane of the diffraction surface including the optical axis, each of the zone surfaces and each of the step surfaces makes an obtuse angle.
摘要翻译: 用光束扫描扫描表面的光学扫描装置包括发射光束的光源和包括至少一个衍射光学元件的预偏转光学系统,该衍射光学元件包括在室温下没有电力的衍射面。 衍射表面具有多个阶梯形状,其具有基本上垂直于光轴的多个区域表面和与每个区域表面相邻的多个台阶表面。 在包括光轴的衍射面的横截面上,每个区域表面和每个台阶表面都形成钝角。
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公开(公告)号:US08488867B2
公开(公告)日:2013-07-16
申请号:US12738760
申请日:2008-10-22
申请人: Yoshinori Hayashi , Hiroshi Wakaba , Yoko Ono , Koichi Miyazono , Hideki Mori
发明人: Yoshinori Hayashi , Hiroshi Wakaba , Yoko Ono , Koichi Miyazono , Hideki Mori
IPC分类号: G06K9/00
CPC分类号: H01L22/20 , G01N21/9503 , H01L22/12
摘要: An inspection apparatus to precisely quantitatively inspect positions of formation of film layers formed on the surface of a disk-shaped substrate. It generates captured image data expressing a captured image corresponding to a field of vie based on image signals successively output from an image capturing unit capturing an image of a predetermined surface at an outer circumference part of the disk-shaped substrate and generates film layer edge position information expressing longitudinal direction positions at corresponding positions along the circumferential direction of an edge line of a film layer image pan corresponding to the film layer on the surface image with reference to, from the captured image data, longitudinal direction positions at the different positions along the circumferential direction of a boundary line between a surface image part corresponding to the predetermined surface on the captured image and its outer image part.
摘要翻译: 一种精确定量检查形成在盘状基板的表面上的膜层的形成位置的检查装置。 基于在从圆盘状基板的外周部拍摄预定面的图像的图像拍摄单元连续地输出的图像信号,生成表示对应于视野的拍摄图像的拍摄图像数据,并且生成胶片层边缘位置 参照来自拍摄图像数据的沿着沿着图像数据的不同位置的纵向位置的表面图像上对应于胶片层的胶片层图像的边缘线的圆周方向的相应位置处的纵向位置的信息, 在与捕获图像上的预定表面相对应的表面图像部分与其外部图像部分之间的边界线的圆周方向。
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公开(公告)号:US08433102B2
公开(公告)日:2013-04-30
申请号:US12086081
申请日:2006-12-05
申请人: Yoshinori Hayashi , Hideki Mori
发明人: Yoshinori Hayashi , Hideki Mori
IPC分类号: G06K9/00
CPC分类号: G01B11/303 , G01N21/9501
摘要: [Problem] To provide a surface roughness inspection system enabling suitable inspection even when the surface of the object being inspected is curved.[Means for Solution] A system having an imaging unit 20 having a line sensor 22 and scanning the surface of an object being inspected 101 in a direction perpendicular to the direction of extension of the line sensor 22 and outputting a density signal for each pixel from the line sensor 22 and a processing unit 50 processing the density signal from the line sensor 22 of the imaging unit 20, the processing unit 50 having a means for acquiring a pixel density value based on a density signal from the line sensor 22 (S2) and a density state generating means for generating a density state information Pf showing the density state in the scan direction of the object surface based on all of the pixel density values acquired for the object surface 101 being inspected (S7).
摘要翻译: [问题]提供一种表面粗糙度检查系统,即使被检查物体的表面弯曲,也能够进行适当的检查。 [解决方案]具有成像单元20的系统具有线传感器22,并且在垂直于线传感器22的延伸方向的方向上扫描被检查物体101的表面,并输出每个像素的浓度信号 线传感器22和处理单元50处理来自成像单元20的线传感器22的浓度信号,处理单元50具有用于基于来自线传感器22的密度信号获取像素密度值的装置(S2) 密度状态产生装置,用于基于对被检测物体表面101获得的所有像素密度值,生成表示物体表面的扫描方向上的浓度状态的浓度状态信息Pf(S7)。
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公开(公告)号:US08283833B2
公开(公告)日:2012-10-09
申请号:US12588757
申请日:2009-10-27
申请人: Koji Kondo , Yoshinori Hayashi
发明人: Koji Kondo , Yoshinori Hayashi
IPC分类号: H02K1/28
CPC分类号: H02K21/044 , H02K15/022 , Y10T29/49012
摘要: A rotor for an electric rotary machine and a method of manufacturing the same are disclosed wherein none of permanent magnets is fixed to a magnetic supporting segment of a magnet support ring in advance and each permanent magnet is assembled separately of the magnet support ring. Prior to the assembling of the permanent magnets, the magnet support ring is preliminarily located on claw-shaped magnetic poles at inner peripheral sides thereof under a state combined with a pair of field iron cores, after which the permanent magnets are inserted to magnet insertion spaces in longitudinal directions. The rotor includes positioning and restricting means for precluding the occurrence of positional displacement of each permanent magnet with respect to each magnet supporting segment of the magnet support ring.
摘要翻译: 公开了一种用于电动旋转机械的转子及其制造方法,其中永磁体预先没有固定到磁体支撑环的磁性支撑部分上,并且每个永磁体与磁体支撑环分开组装。 在永磁体的组装之前,磁体支撑环预先位于与一对场铁芯组合的状态下的内周侧的爪形磁极上,然后将永磁体插入磁体插入空间 在纵向上。 转子包括定位和限制装置,用于排除每个永磁体相对于磁体支撑环的每个磁体支撑段的位置偏移的发生。
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