Method of manufacturing plasmon generator
    13.
    发明授权
    Method of manufacturing plasmon generator 有权
    等离子体发生器的制造方法

    公开(公告)号:US08691102B1

    公开(公告)日:2014-04-08

    申请号:US13731754

    申请日:2012-12-31

    IPC分类号: C03C15/00

    摘要: A method of manufacturing a plasmon generator includes the steps of: forming an etching mask on a dielectric layer; forming an accommodation part by etching the dielectric layer using the etching mask; and forming the plasmon generator to be accommodated in the accommodation part. The step of forming the etching mask includes the steps of: forming a patterned layer on an etching mask material layer, the patterned layer having a first opening that has a sidewall; forming a structure by forming an adhesion film on the sidewall, the structure having a second opening smaller than the first opening; and etching a portion of the etching mask material layer exposed from the second opening.

    摘要翻译: 一种制造等离子体发生器的方法包括以下步骤:在电介质层上形成蚀刻掩模; 通过使用蚀刻掩模蚀刻电介质层来形成容纳部分; 以及形成要容纳在容纳部分中的等离子体发生器。 形成蚀刻掩模的步骤包括以下步骤:在蚀刻掩模材料层上形成图案化层,所述图案化层具有具有侧壁的第一开口; 通过在侧壁上形成粘合膜来形成结构,该结构具有比第一开口小的第二开口; 并蚀刻从第二开口露出的蚀刻掩模材料层的一部分。

    Magnetic head for perpendicular magnetic recording having a return path section
    18.
    发明授权
    Magnetic head for perpendicular magnetic recording having a return path section 有权
    具有返回路径部分的垂直磁记录用磁头

    公开(公告)号:US08416528B1

    公开(公告)日:2013-04-09

    申请号:US13463298

    申请日:2012-05-03

    IPC分类号: G11B5/127

    摘要: A magnetic head includes a main pole and a return path section located above a top surface of a substrate. The main pole has an end face located in a medium facing surface. The return path section is located on the front side in the direction of travel of a recording medium relative to the main pole and is farther from the top surface of the substrate than is the main pole. The return path section has: a front end face located on the front side of the main pole in the medium facing surface; and an inclined surface located on the front side and connected to the front end face. The inclined surface is not exposed in the medium facing surface. An angle greater than 90° is formed between the front end face and the inclined surface.

    摘要翻译: 磁头包括位于基板的顶表面上方的主极和返回路径部分。 主极具有位于面向介质的表面中的端面。 返回路径部分位于记录介质相对于主极的行进方向的前侧,并且比主极更远离基板的顶表面。 返回路径部分具有:位于介质面对表面中的主极的前侧上的前端面; 以及位于前侧并且连接到前端面的倾斜表面。 倾斜表面不会暴露在面向介质的表面上。 在前端面和倾斜面之间形成大于90°的角度。

    Magnetic head for perpendicular magnetic recording having a main pole and a shield
    19.
    发明授权
    Magnetic head for perpendicular magnetic recording having a main pole and a shield 有权
    用于垂直磁记录的磁头,具有主极和屏蔽

    公开(公告)号:US08867169B2

    公开(公告)日:2014-10-21

    申请号:US13473159

    申请日:2012-05-16

    IPC分类号: G11B5/127 G11B5/147

    摘要: A magnetic head includes a magnetic structure incorporating a write shield. The magnetic structure is formed to include a first magnetic layer, a second magnetic layer stacked on the first magnetic layer, and a seed layer. The first magnetic layer has a front end face located in the medium facing surface and a top surface. The second magnetic layer has a front end face located in the medium facing surface and a bottom surface. The top surface of the first magnetic layer includes a first region including an end located in the medium facing surface and a second region farther from the medium facing surface than the first region. The seed layer is not present on the first region of the top surface of the first magnetic layer but is present on the second region.

    摘要翻译: 磁头包括结合有写入屏蔽的磁性结构。 磁结构形成为包括第一磁性层,堆叠在第一磁性层上的第二磁性层和种子层。 第一磁性层具有位于介质相对表面中的前端面和顶面。 第二磁性层具有位于介质面向表面中的前端面和底面。 第一磁性层的顶表面包括第一区域和第二区域,第一区域包括位于介质面向表面中的端部以及比介质面向表面比第一区域更远的第二区域。 种子层不存在于第一磁性层的顶表面的第一区域上,但存在于第二区域上。