公开(公告)号：US6014421A

公开(公告)日：2000-01-11

申请号：US847404

申请日：1997-04-24

申请人： Yuji Chiba ,  Masami Tsukamoto

发明人： Yuji Chiba ,  Masami Tsukamoto

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F7/70233 ,  G03F7/70283 ,  G03F7/703 ,  G03F7/70358 ,  G03F7/70708 ,  G03F7/70725

摘要： An X-ray reduction exposure apparatus which provides a preferable image forming system in an entire mask surface area of a reflection type mask, can reduce curvature of the field and astigmatism of the transfer image even in scan exposure and, therefore, can obtain high transfer precision, and the apparatus contributes to the manufacture of a semiconductor element having high reliability. The X-ray reduction exposure apparatus has, as a characteristic feature, a drive mechanism for driving a mask scan stage substantially along the curvature surface of the mask. This drive mechanism is constituted by a main drive section (linear motor or the like) linearly driven in a direction corresponding to the moving direction of a mask scan stage and a sub-drive section (actuator or the like) driven perpendicularly to the drive direction, otherwise, constituted by a main drive section and a guide having a shape which is the same as the curvature surface shape of the mask.

摘要翻译： 在反射型掩模的整个掩模表面区域中提供优选的图像形成系统的X射线减少曝光装置即使在扫描曝光中也可以减小转印图像的曲率和像散，因此可以获得高转印 并且该装置有助于制造具有高可靠性的半导体元件。 作为特征，X射线减少曝光装置具有用于基本上沿着掩模的曲率表面驱动掩模扫描台的驱动机构。 该驱动机构由与驱动方向垂直驱动的荫罩扫描台和副驱动部（致动器等）的移动方向对应的方向直线驱动的主驱动部（直线电机等）构成， 否则由主驱动部分和具有与掩模的曲率表面形状相同的形状的引导件构成。

公开(公告)号：US5959304A

公开(公告)日：1999-09-28

申请号：US80397

申请日：1998-05-18

申请人： Toshinobu Tokita ,  Yuji Chiba ,  Yutaka Tanaka

发明人： Toshinobu Tokita ,  Yuji Chiba ,  Yutaka Tanaka

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G21K5/00

CPC分类号： G03F7/70691 ,  G03F7/7035 ,  G03F9/70

摘要： An exposure apparatus for transferring a pattern, formed on a membrane of a mask, to an exposure region of a wafer disposed opposed to the mask with a small spacing kept therebetween. The apparatus includes an exposure system for transferring, by exposure, the pattern of the mask to different exposure regions of the wafer sequentially, a measuring system for producing deformation information related to at least one portion of the mask membrane, and an attitude controlling system for controlling attitude of at least one of the mask and the wafer, on the basis of the deformation information produced by the measuring system.

摘要翻译： 一种曝光装置，用于将形成在掩模的膜上的图案转印到与所述掩模相对设置的晶片的曝光区域，所述曝光区域间隔保持很小。 该装置包括曝光系统，用于通过曝光将掩模的图案顺序地转印到晶片的不同曝光区域，用于产生与面膜的至少一部分相关的变形信息的测量系统和用于 基于由测量系统产生的变形信息来控制掩模和晶片中的至少一个的控制姿态。

公开(公告)号：US5026239A

公开(公告)日：1991-06-25

申请号：US402601

申请日：1989-09-05

申请人： Yuji Chiba ,  Hidehiko Fujioka ,  Nobutoshi Mizusawa ,  Takao Kariya ,  Isamu Shimoda

发明人： Yuji Chiba ,  Hidehiko Fujioka ,  Nobutoshi Mizusawa ,  Takao Kariya ,  Isamu Shimoda

IPC分类号： G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67748 ,  G03F7/70741 ,  G03F7/70866 ,  H01L21/67751 ,  H01L21/67778 ,  Y10S414/137

摘要： A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contained in synchrotron radiation, to print a pattern of the mask on the wafer, are disclosed. The mask cassette includes a base for accommodating a plurality masks and a cover which can be separated from and coupled to the base only in one direction. When the two are coupled by a locking mechanism, the cassette can be completely closed against atmospheric pressure. The mask cassette loading device includes a common mechanism which serves to release the locking mechanism of the cassette and also, to move the cassette base relative to the cover. Thus, with a simple and compact structure, the protection and replacement of X-ray masks are ensured with certainty.

公开(公告)号：US4977459A

公开(公告)日：1990-12-11

申请号：US500097

申请日：1990-03-21

申请人： Ryuichi Ebinuma ,  Yuji Chiba ,  Nobutoshi Mizusawa

发明人： Ryuichi Ebinuma ,  Yuji Chiba ,  Nobutoshi Mizusawa

IPC分类号： B41J2/175 ,  B41J2/165 ,  B41J2/19 ,  B41J29/46

CPC分类号： B41J2/19 ,  B41J2/16579 ,  B41J2202/12

摘要： An ink-jet apparatus in which a recorded image is read to provide a image reference signal for comparison with an image recording signal, the resulting comparison being used as a basis for diagnosing an ink injection state of a recording head nozzles in order to determine and implement an ink injection recovery process.

公开(公告)号：US06307582B1

公开(公告)日：2001-10-23

申请号：US09692002

申请日：2000-10-19

申请人： Junichi Kawato ,  Yuji Chiba

发明人： Junichi Kawato ,  Yuji Chiba

IPC分类号： B41J3200

CPC分类号： B41J35/28 ,  B41J17/32

摘要： An ink ribbon cassette includes a cassette main body portion rotatably holding a supply core and a take-up core around which the end portions of an ink ribbon are wound and a ribbon guide portion extending to one side from the cassette main body portion and having on one side a ribbon slide contact surface, a ribbon turn-up portion formed at the forward end of the ribbon guide portion being formed by a rotatable roller member, whereby the frictional resistance of the ink ribbon turned up at the ribbon turn-up portion is reduced. Further, the main body portion includes a holder member having the ribbon guide portion and holding the supply core and the take-up core and a case member capable of holding the holder member by holding the supply core and the take-up core in such a way as to cover them from outside, whereby it is possible to provide an ink ribbon cassette which can be easily assembled.

摘要翻译： 墨带盒包括：盒主体部分，其可旋转地保持供应芯和卷绕芯，卷绕在其上的墨带的端部围绕着卷带芯;以及从墨盒主体部分延伸到一侧的墨带引导部分， 一侧是色带滑动接触表面，形成在色带引导部分的前端的色带翻转部分由可旋转的辊部件形成，由此在色带卷起部分处翻转的色带的摩擦阻力为 减少 此外，主体部分包括具有带引导部分并且保持供应芯和卷取芯的保持器构件，以及壳体构件，其能够通过将供给芯和卷取芯保持在这样的位置中来保持保持器构件 以便从外部覆盖它们，从而可以提供可以容易地组装的色带盒。

公开(公告)号：US5552812A

公开(公告)日：1996-09-03

申请号：US465933

申请日：1995-06-06

申请人： Ryuichi Ebinuma ,  Nobutoshi Mizusawa ,  Yuji Chiba

发明人： Ryuichi Ebinuma ,  Nobutoshi Mizusawa ,  Yuji Chiba

IPC分类号： B41J2/165 ,  B41J2/175 ,  B41J11/14 ,  B41J29/02 ,  B41J29/377 ,  G03G21/16 ,  H04N1/00

CPC分类号： B41J2/17523 ,  B41J11/14 ,  B41J2/1652 ,  B41J2/16585 ,  B41J2/1714 ,  B41J2/17513 ,  B41J2/1752 ,  B41J29/02 ,  B41J29/377 ,  G03G21/1628 ,  G03G21/1647 ,  G03G21/206 ,  H04N1/00525 ,  H04N1/00543 ,  H04N1/00554 ,  H04N1/00976 ,  G03G2221/1645 ,  G03G2221/1651 ,  G03G2221/1672 ,  G03G2221/1687

摘要： A recording apparatus is provided with an upper unit having a recording head for discharging ink for effecting recording on a recording medium in response to information, and at least a portion of the electric circuit of the apparatus, a lower unit having a platen for maintaining the recording medium in the recording station by the recording head, the lower unit capable of being spaced apart relative to the upper unit, and a conveying member for conveying the recording medium to the recording station. The upper unit and the lower unit are capable of being spaced apart and opened in the recording station by the recording head. The recording apparatus further having a blower which introduces air and directs an air stream through the apparatus and past a full page width recording head. The air stream directs ink mist generated by the printhead through a recording medium discharge port such that ink mist is removed from the apparatus body by riding the air stream or by adhering to the recording medium. Internal contamination of the recording apparatus is avoided.

摘要翻译： 记录装置具有上部单元，该上部单元具有用于排出墨水的记录头，用于响应于信息在记录介质上进行记录，并且该装置的电路的至少一部分具有用于保持 通过记录头在记录站中记录介质，下部单元能够相对于上部单元间隔开;以及传送构件，用于将记录介质传送到记录站。 上部单元和下部单元能够通过记录头在记录站中间隔开并打开。 该记录装置还具有引入空气并引导空气流通过设备并经过全页宽度记录头的鼓风机。 空气流通过记录介质排出口引导由打印头产生的墨雾，从而通过乘坐空气流或通过粘附到记录介质将墨雾从设备主体移除。 避免了记录装置的内部污染。

公开(公告)号：US5431871A

公开(公告)日：1995-07-11

申请号：US119378

申请日：1993-09-13

申请人： Toshihiro Tanaka ,  Yuji Chiba ,  Yuji Ashibe

发明人： Toshihiro Tanaka ,  Yuji Chiba ,  Yuji Ashibe

IPC分类号： B29C51/12 ,  B29C51/26 ,  B29C51/42 ,  B29C70/56 ,  B29C70/24 ,  B29C70/46

CPC分类号： B29C51/261 ,  B29C51/12 ,  B29C51/262 ,  B29C51/425 ,  B29C70/56 ,  B29K2071/00 ,  Y10S425/048 ,  Y10T156/17

摘要： A method of manufacturing three-dimensional parts using sheets of a thermoplastic resin high-performance fiber-reinforced composite material includes the steps of supplying the sheet of the high-performance resin-reinforced composite material which uses as a matrix a thermoplastic resin and in which reinforcing fiber is oriented, clamping an end portion of the sheet by a sheet clamping device, conveying the sheet to a heating/forming zone, heating the sheet to a predetermined temperature, clamping the sheet by upper and lower frames by driving cylinders, forming the three-dimensional part by operating a mold and thereby deep drawing the clamped sheet inwardly according to a stroke of the mold, and repeating the above-described series of steps continuously.

摘要翻译： 使用热塑性树脂高性能纤维增强复合材料片材制造三维部件的方法包括以下步骤：将用作基质的热塑性树脂的高性能树脂增强复合材料片材供应到其中，其中 增强纤维被取向，通过片材夹紧装置夹紧片材的端部，将片材输送到加热/成形区域，将片材加热到预定温度，通过驱动圆柱体将上部和下部框架夹紧片材，形成 通过操作模具，从而根据模具的行程将夹紧的片材向内深拉，并且连续地重复上述一系列步骤。

公开(公告)号：US5290167A

公开(公告)日：1994-03-01

申请号：US770463

申请日：1991-10-03

申请人： Toshihiro Tanaka ,  Yuji Chiba ,  Yuji Ashibe

发明人： Toshihiro Tanaka ,  Yuji Chiba ,  Yuji Ashibe

IPC分类号： B29C51/12 ,  B29C51/26 ,  B29C51/42 ,  B29C70/56 ,  B29C51/00

CPC分类号： B29C51/261 ,  B29C51/12 ,  B29C51/262 ,  B29C51/425 ,  B29C70/56 ,  B29K2071/00 ,  Y10S425/048 ,  Y10T156/17

摘要： An apparatus for manufacturing three-dimensional parts using sheets of a thermoplastic resin high-performance fiber-reinforced composite material. The apparatus includes a sheet clamping device for clamping an end portion of the sheet and conveying the sheet to a heating/forming zone, a heater for heating the sheet to a predetermined temperature, upper and lower frames driven by cylinders for clamping the sheet and a male mold member for forming the three-dimensional part by deep drawing the clamped sheet inwardly through a stroke of the mold member.

摘要翻译： 一种使用热塑性树脂高性能纤维增强复合材料片材制造三维部件的装置。 该装置包括用于夹紧片材的端部并将片材输送到加热/成形区域的片材夹紧装置，用于将片材加热到预定温度的加热器，用于夹紧片材的气缸驱动的上部和下部框架 阳模构件，用于通过模具构件的行程将夹紧的片材向内拉深来形成三维部件。

公开(公告)号：US5161177A

公开(公告)日：1992-11-03

申请号：US779897

申请日：1991-10-21

申请人： Yuji Chiba

发明人： Yuji Chiba

IPC分类号： G03F7/20 ,  G21K1/10 ,  G21K5/08 ,  H01L21/027

CPC分类号： G03F7/70691 ,  G21K1/10 ,  G21K5/08

摘要： A substrate holding apparatus for vertically holding a substrate to be exposed by radiation includes a substrate stage having a substrate holding surface for attracting a substrate. The substrate holding surface is divided into an inner peripheral portion and an outer peripheral portion by a groove formed in the substrate stage. A magnetic member is fitted into the groove of the substrate stage, and at least a magnetic unit is embedded in the magnetic member. The magnetic unit includes a permanent magnet and an electromagnet for eliminating a magnetic force of the permanent magnet when energized. Further, a moving device is provided for moving the magnetic member together with the magnetic unit in a direction of the depth of the groove between a first position in which the magnetic force of the permanent magnet is effective for the substrate on the substrate holding surface and a second position in which the magnetic force of the permanent magnet is ineffective for the substrate on the substrate holding surface. The electromagnet need not be energized during a substrate positioning period if the magnetic member with the magnetic unit is brought to the second position.

摘要翻译： 用于垂直保持待曝光的基板的基板保持装置包括具有用于吸引基板的基板保持表面的基板台。 基板保持面通过在基板载台上形成的槽分为内周部和外周部。 磁性部件嵌入到基板台的槽中，并且至少磁性单元嵌入在磁性部件中。 磁性单元包括永磁体和用于消除永磁体在通电时的磁力的电磁体。 此外，提供一种移动装置，用于使磁性部件与磁性单元一起在凹槽的深度方向上移动，该第一位置在永久磁铁的磁力对基板保持表面上的基板有效的第一位置和 永磁体的磁力对基板保持面上的基板无效的第二位置。 如果将具有磁性单元的磁性构件带到第二位置，则在基板定位周期期间，电磁体不需要被通电。

公开(公告)号：US5140429A

公开(公告)日：1992-08-18

申请号：US746085

申请日：1991-08-12

申请人： Ryuichi Ebinuma ,  Yuji Chiba ,  Nobutoshi Mizusawa

发明人： Ryuichi Ebinuma ,  Yuji Chiba ,  Nobutoshi Mizusawa

IPC分类号： B41J2/165 ,  B41J2/19

CPC分类号： B41J2/19 ,  B41J2/16579 ,  B41J2202/12

摘要： An ink jet apparatus in which a recorded image is read to provide an image reference signal for comparison with an image recording signal, the resulting comparison being used as a basis for diagnosing an ink ejection state of a recording head nozzle in order to determine and implement an ink ejection recovery process.

摘要翻译： 一种喷墨装置，其中读取记录图像以提供用于与图像记录信号进行比较的图像参考信号，所得到的比较用作诊断记录头喷嘴的喷墨状态的基础，以便确定和实现 喷墨恢复过程。