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公开(公告)号：US20130082190A1
公开(公告)日：2013-04-04
申请号：US13703688
申请日：2011-06-15
IPC分类号： G21K5/08
CPC分类号： G21K5/08 , H01J37/20 , H01J2237/20278
摘要： Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.
摘要翻译： 当安装其上的样品的载物台以低速移动时，速度波动减小，使得使用扫描电子显微镜进行高倍率观察时，要观察的图像以恒定速度移动。 通过补偿装置，通过由位置检测装置通过第一低通滤波器检测到的位置信息和通过积分从载物台操作输入装置输入的速度指令值而获得的指令值，通过补偿装置获得控制量，并通过 具有与第一低通滤波器相同的频率特性的第二低通滤波器，并且通过波形输出装置从控制量和速度指令值的相加值产生要输出到驱动装置的驱动信号。
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公开(公告)号：US06403968B1
公开(公告)日：2002-06-11
申请号：US09347844
申请日：1999-07-02
申请人： Eiichi Hazaki , Masaki Kurihara , Kaname Takahashi
发明人： Eiichi Hazaki , Masaki Kurihara , Kaname Takahashi
IPC分类号： H01J3720
CPC分类号： H01J37/20 , H01J2237/0216 , H01J2237/28
摘要： Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.
摘要翻译： 来自油源的油通过端口被引入往复式油压缸的内部，并且通过油压将锁定轴推向锁定板以限制倾斜台的移动。 由锁定板具有大的摩擦系数的材料制成的圆筒部分附接到锁定轴的顶端，以便在表面接触状态下与锁定板接触。 通过另一端口将油引入往复式油压缸的内部，通过油压拉回锁定轴来执行级锁定的释放。 因此，样品台锁定机构在x方向的刚度变大，并且在y方向和z方向上的摩擦力也变大。 因此，可以有效地抑制倾斜台在x，y和z方向上的振动。
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13.发明授权Scanning electron microscope with a table being guided by rolling friction elements 有权扫描电子显微镜，桌面由滚动摩擦元件引导公开(公告)号：US08969828B2
公开(公告)日：2015-03-03
申请号：US13640560
申请日：2011-05-11
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/202 , H01J2237/20278
摘要： This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction.In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.
摘要翻译： 本发明稳定了定位，并且提供了利用滚动摩擦效应的具有舞台驱动装置的扫描电子显微镜中的改进的定位精度。 在该扫描电子显微镜中，该扫描电子显微镜包括配备有x台，y台，z台，旋转台和倾斜台的样品台，并通过步进电机移动，每个步进电机均连接到滚珠丝杠通孔 联轴器，滑动摩擦元件设置在靠近滚珠丝杠的位置，x台和y台之间以及倾斜底座和x台之间。
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公开(公告)号：US20130048854A1
公开(公告)日：2013-02-28
申请号：US13640560
申请日：2011-05-11
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/202 , H01J2237/20278
摘要： This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.
摘要翻译： 本发明稳定了定位，并且提供了利用滚动摩擦效应的具有舞台驱动装置的扫描电子显微镜中的改进的定位精度。 在该扫描电子显微镜中，该扫描电子显微镜包括配备有x台，y台，z台，旋转台和倾斜台的样品台，并通过步进电机移动，每个步进电机均连接到滚珠丝杠通孔 联轴器，滑动摩擦元件设置在靠近滚珠丝杠的位置，x台和y台之间以及倾斜底座和x台之间。
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公开(公告)号：US07891482B2
公开(公告)日：2011-02-22
申请号：US12083972
申请日：2006-10-06
IPC分类号： B65G17/10
CPC分类号： B23P21/004 , B62D65/18 , B65G35/06 , B65G35/08
摘要： The object of the present invention is to improve the productivity and make the assembling operation easier in a carrier apparatus for carrying a work while performing an assembling operation by making effective use of an inside region, even in the case where a conveyor line is provided in the form of a circling route.In a free flow type conveyor line (1) in which a work is loaded on a pallet (2) having a floor surface which travels substantially at the same level as a floor surface (5) for operation, a horizontal curved section (3) is provided in a section of the line (1), and the pallet (2) is divided into a first, a second and a third divided pallet elements (2A, 2B, 2C) in the carrying direction. The respectively divided pallet elements (2A, 2B, 2C) are mutually turnable in the horizontal plane by connecting the first divided pallet element (2A) to the second divided pallet elements (2B), and the second divided pallet element (2B) to the third divided pallet elements (2C), respectively through vertically extending pivot pins (9).
摘要翻译： 本发明的目的在于，即使在设置有输送线的情况下，也可以通过有效地利用内部区域来提高生产率并且在进行组装操作的承载装置中更容易进行组装操作 盘旋路线的形式。 在一种自由流动式输送线（1）中，其中工件装载在具有与用于操作的地板表面（5）基本上位于相同高度的地板表面的托盘（2）上，水平弯曲部分（3） 设置在所述线（1）的一部分中，并且所述托盘（2）沿着所述传送方向被分成第一，第二和第三分割的托盘元件（2A，2B，2C）。 通过将第一分割的托盘元件（2A）连接到第二分割的托盘元件（2B），并且第二分割托盘元件（2B）连接到相应的分开的托盘元件（2A，2B，2C），在水平面中可相互转动 分别通过垂直延伸的枢轴销（9）分开的第三分割托盘元件（2C）。
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