公开(公告)号：US20070116892A1

公开(公告)日：2007-05-24

申请号：US11282934

申请日：2005-11-18

Applicant: Robert Zwaap ,  Troy Berens ,  John Tuttle

Inventor： Robert Zwaap ,  Troy Berens ,  John Tuttle

IPC: C23C14/26 ,  H05B6/24 ,  C23C16/00 ,  B05D3/02

CPC classification number: C23C8/08 ,  C23C14/5866 ,  H01L21/67005 ,  H01L31/0322 ,  H01L31/1844 ,  Y02E10/541 ,  Y02E10/544

Abstract: Methods and apparatus for controlling and delivering a vaporous element or compound, for example, selenium or sulfur, from a solid source to a work piece are provided. The methods and apparatus may be used in photovoltaic cell manufacturing. The apparatus may comprise a treatment chamber, for example, a box furnace or a tube furnace. The chamber may include an inner enclosure, an outer enclosure, and heating sources capable of independent thermal control, for example, in compliance with a predetermined heating schedule. The apparatus include devices and mechanisms for isolating the treatment chambers from the ambient environment. The methods and apparatus may be adapted to control metalloid vapor delivery in photovoltaic cell processing, for example, the processing of CIGS and CIGSS photovoltaic cells.

Abstract translation: 提供了用于从固体源向工件控制和输送蒸汽元素或化合物例如硒或硫的方法和装置。 所述方法和装置可用于光伏电池制造。 该设备可以包括处理室，例如箱式炉或管式炉。 腔室可以包括内壳体，外壳体和能够独立热控制的加热源，例如，符合预定的加热方案。 该装置包括用于将治疗室与周围环境隔离的装置和机构。 该方法和装置可以适用于控制光伏电池处理中的准金属蒸汽输送，例如CIGS和CIGSS光伏电池的处理。