公开(公告)号：US12116675B2

公开(公告)日：2024-10-15

申请号：US17418344

申请日：2019-12-10

Applicant: SHOWA DENKO K.K.

Inventor： Yosuke Tanimoto ,  Shimon Osada

IPC: C23C8/08 ,  H01L21/02

CPC classification number: C23C8/08 ,  H01L21/02334

Abstract: Provided are an adhesion removal method capable of removing sulfur-containing adhesions that adhere onto the inner surface of a chamber or the inner surface of a pipe connected to the chamber without disassembly of the chamber and a film-forming method. Sulfur-containing adhesions adhering onto at least one of the inner surface of a chamber (10) and the inner surface of a discharge pipe (15) connected to the chamber (10) are removed by reaction with a cleaning gas containing an oxygen-containing compound gas.

公开(公告)号：US20230282450A1

公开(公告)日：2023-09-07

申请号：US18011582

申请日：2021-06-24

Applicant: LAM RESEARCH CORPORATION

Inventor： Eric A. PAPE ,  Shih-Chung KON ,  Pankaj HAZARIKA ,  Lin XU

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/30

CPC classification number: H01J37/32477 ,  H01J37/32422 ,  H01J37/32357 ,  C23C16/45536 ,  C23C16/30 ,  H01J37/32816 ,  H01J2237/334 ,  C23C8/08

Abstract: A component of a processing chamber in a substrate processing system includes a base material comprising aluminum, the base material having one or more surfaces, a diffusion barrier layer formed on the surfaces of the base material, wherein the diffusion barrier layer includes magnesium and fluorine (F), and a coating formed on the surfaces. The diffusion barrier layer is arranged between the surfaces and the coating and the coating includes fluorine.

公开(公告)号：US20170335442A1

公开(公告)日：2017-11-23

申请号：US15524632

申请日：2015-11-06

Applicant: THE JOHNS HOPKINS UNIVERSITY

Inventor： Michael Brupbacher ,  Dajie Zhang ,  Dennis Nagle

IPC: C23C4/134 ,  C23C4/11 ,  C23C18/08 ,  C23C24/04

CPC classification number: C23C4/134 ,  C23C4/08 ,  C23C4/11 ,  C23C4/18 ,  C23C8/02 ,  C23C8/08 ,  C23C8/20 ,  C23C8/24 ,  C23C18/08 ,  C23C24/04

Abstract: The present invention is directed to methods for formation of refractory carbide, nitride, and boride coatings without use of a binding agent. The present invention is directed to methods of creating refractory coatings with controlled porosity. Refractory coatings can be formed from refractory metal, metal oxide, or metal/metal oxide composite refractory coating precursor of the 9 refractory metals encompassed by groups 4-6 and periods 4-6 of the periodic table; non-metallic elements (e.g. Si & B) and their oxides (i.e. SiO2 & B2O3) are also pertinent. The conversion of the refractory coating precursor to refractory carbide, nitride or boride is achieved via carburization, nitridization, or boridization in the presence of carbon-containing (e.g. CH4), nitrogen containing (e.g. NH3), and boron-containing (e.g. B2H6) gaseous species. Any known technique of applying the refractory coating precursor can be used. The porosity of resultant refractory coatings is controlled through compositional manipulation of composite refractory coating precursors.

公开(公告)号：US20170088931A1

公开(公告)日：2017-03-30

申请号：US14965716

申请日：2015-12-10

Applicant: Apple Inc.

Inventor： James A. CURRAN ,  Zechariah D. FEINBERG

IPC: C23C8/20 ,  C23C8/08 ,  C25D11/02 ,  C23C8/28 ,  C25D11/26 ,  C23C8/24 ,  C23C8/30

CPC classification number: C23C8/20 ,  C23C8/08 ,  C23C8/24 ,  C23C8/28 ,  C23C8/30 ,  C23C8/80 ,  C25D11/026 ,  C25D11/26

Abstract: A method for providing a surface finish to a metal part includes both diffusion hardening a metal surface to form a diffusion-hardened layer, and oxidizing the diffusion-hardened layer to create an oxide coating thereon. The diffusion-hardened layer can be harder than an internal region of the metal part and might be ceramic, and the oxide coating can have a color that is different from the metal or ceramic, the color being unachievable only by diffusion hardening or only by oxidizing. The metal can be titanium or titanium alloy, the diffusion hardening can include carburizing or nitriding, and the oxidizing can include electrochemical oxidization. The oxide layer thickness can be controlled via the amount of voltage applied during oxidation, with the oxide coating color being a function of thickness. An enhanced hardness profile can extend to a depth of at least 20 microns below the top of the oxide coating.

公开(公告)号：US09580789B2

公开(公告)日：2017-02-28

申请号：US13873272

申请日：2013-04-30

Applicant: ATI Properties LLC

Inventor： James M. Rakowski

IPC: C23C8/10 ,  H01M8/0202 ,  C21D1/74 ,  C21D3/02 ,  C21D6/00 ,  C23C8/08 ,  H01M8/02 ,  H01B1/02 ,  H01M8/00 ,  H01M4/64 ,  H01M8/12

CPC classification number: C23C8/10 ,  C21D1/74 ,  C21D3/02 ,  C21D6/002 ,  C21D6/008 ,  C23C8/08 ,  H01B1/02 ,  H01M8/00 ,  H01M8/021 ,  H01M8/0228 ,  H01M2008/1293 ,  Y02E60/50 ,  Y02E60/525 ,  Y02P70/56

Abstract: A method of reducing the formation of electrically resistive scale on a an article comprising a silicon-containing ferritic stainless subjected to oxidizing conditions in service includes, prior to placing the article in service, subjecting the article to conditions under which silica, which includes silicon derived from the steel, forms on a surface of the steel. Optionally, at least a portion of the silica is removed from the surface to placing the article in service. A ferritic stainless steel alloy having a reduced tendency to form silica on at least a surface thereof also is provided. The steel includes a near-surface region that has been depleted of silicon relative to a remainder of the steel.

Abstract translation: 在包含使用氧化条件的含硅铁素体不锈钢的制品上减少形成电阻垢的方法包括在将制品置于使用状态之前，对制品进行条件，在该条件下，将包含硅的二氧化硅 从钢中，在钢的表面上形成。 任选地，从表面去除至少一部分二氧化硅以使制品投入使用。 还提供了一种在至少其表面上具有降低形成二氧化硅的趋势的铁素体不锈钢合金。 钢包括相对于钢的剩余部分已经耗尽硅的近表面区域。

公开(公告)号：US20160325358A1

公开(公告)日：2016-11-10

申请号：US15111378

申请日：2015-01-22

Applicant: UNITED TECHNOLOGIES CORPORATION

Inventor： Aaron T. Nardi ,  Zissis Dardas

IPC: B22F3/24 ,  C23C8/24 ,  C23C8/08 ,  B22F3/105 ,  B23K15/00 ,  B23K26/00 ,  B23K26/342 ,  B23K26/16 ,  B23K26/70 ,  B23K26/12 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  B28B1/00 ,  C23C8/02

CPC classification number: B22F3/24 ,  B22F3/1055 ,  B22F7/06 ,  B22F7/08 ,  B22F2003/1059 ,  B22F2003/242 ,  B22F2003/248 ,  B22F2201/00 ,  B22F2201/20 ,  B22F2201/40 ,  B22F2998/10 ,  B23K15/0026 ,  B23K15/0086 ,  B23K15/0093 ,  B23K26/0006 ,  B23K26/1224 ,  B23K26/126 ,  B23K26/16 ,  B23K26/342 ,  B23K26/702 ,  B28B1/001 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  C23C8/02 ,  C23C8/08 ,  C23C8/24 ,  Y02P10/295

Abstract: A manufacturing process is provided. During this process, material is solidified together within a chamber to form an object using an additive manufacturing device. At least a portion of the solidified material is conditioned within the chamber using a material conditioning device.

Abstract translation: 提供制造工艺。 在该过程中，材料在室内一起固化，以使用添加剂制造装置形成物体。 使用材料调节装置在室内调节至少一部分固化的材料。

公开(公告)号：US09394599B2

公开(公告)日：2016-07-19

申请号：US13130023

申请日：2009-11-19

Applicant: David P. Brown ,  Jan Von Pfaler

Inventor： David P. Brown ,  Jan Von Pfaler

IPC: C01B31/00 ,  C23C8/22 ,  B82Y30/00 ,  B82Y40/00 ,  C01B31/04 ,  C23C8/00 ,  C23C8/02 ,  C23C8/08 ,  C23C8/40 ,  C23C8/80 ,  H01L21/02

CPC classification number: C23C8/22 ,  B82Y30/00 ,  B82Y40/00 ,  C01B31/0453 ,  C01B32/186 ,  C01B2204/02 ,  C01B2204/04 ,  C01B2204/06 ,  C23C8/00 ,  C23C8/02 ,  C23C8/08 ,  C23C8/40 ,  C23C8/80 ,  H01L21/02439 ,  H01L21/02491 ,  H01L21/02527 ,  H01L21/0254 ,  H01L21/02612 ,  H01L21/02658

Abstract: A method for fabricating crystalline surface structures (4) on a template (1). The method comprises the steps of providing a template (1) into a reaction environment, wherein one or more elements (3) required for the formation of the crystalline surface structure (4) are contained within the template (1); heating the template (1) inside the reaction environment to increase the mobility of the element (3) within the template (1), and to increase the surface diffusion length of the element (3) on the template-environment interface; and activating the template (1) by altering the conditions within the reaction environment, to make the mobile element (3) slowly migrate towards the template-environment interface and to make the element (3) organize on the surface of the template (1) as a crystalline structure (4).

Abstract translation: 一种用于在模板（1）上制造结晶表面结构（4）的方法。 该方法包括以下步骤：将模板（1）提供到反应环境中，其中形成晶体表面结构（4）所需的一个或多个元素（3）包含在模板（1）内; 在反应环境内加热模板（1）以增加模板（1）内的元件（3）的迁移率，并增加元件（3）在模板 - 环境界面上的表面扩散长度; 以及通过改变反应环境中的条件来激活模板（1），使得移动元件（3）缓慢地向模板 - 环境界面迁移并且使元件（3）组织在模板（1）的表面上， 作为结晶结构（4）。

公开(公告)号：US09337495B2

公开(公告)日：2016-05-10

申请号：US14471960

申请日：2014-08-28

Applicant: HYUNDAI HYSCO CO., LTD.

Inventor： Yoo Taek Jeon ,  Kyeong Woo Chung

IPC: H01M8/02 ,  C23C22/46 ,  C23C22/50 ,  C23G1/08 ,  C25D11/34 ,  C21D9/00 ,  C23C8/04 ,  C23C8/08 ,  C23C8/22 ,  C23C8/26 ,  C23C14/00 ,  C23C14/48 ,  H01M8/10

CPC classification number: H01M2/145 ,  C21D6/004 ,  C21D9/0068 ,  C22C38/008 ,  C22C38/42 ,  C22C38/44 ,  C23C8/04 ,  C23C8/08 ,  C23C8/22 ,  C23C8/26 ,  C23C14/0036 ,  C23C14/48 ,  C23C22/46 ,  C23C22/50 ,  C23C22/73 ,  C23C22/76 ,  C23C22/82 ,  C23G1/085 ,  C23G1/088 ,  C25D5/50 ,  C25D7/06 ,  C25D11/34 ,  H01M8/021 ,  H01M8/0228 ,  H01M2008/1095 ,  Y02E60/50 ,  Y02P70/56

Abstract: A stainless steel separator for fuel cells and a method of manufacturing the same are disclosed. The method includes preparing a stainless steel sheet as a matrix, performing surface modification on a surface of the stainless steel sheet to form a Cr-rich passive film having a comparatively increased amount of Cr in a superficial layer of the stainless steel sheet by decreasing an amount of Fe in the superficial layer of the stainless steel sheet, and forming a coating layer on the surface of the surface-modified stainless steel sheet. The coating layer is one selected from a metal nitride layer (MNx), a metal/metal nitride layer (M/MNx), a metal carbide layer (MCy), and a metal boride layer (MBz) (where 0.5≦x≦1, 0.42≦y≦1, 0.5≦z≦2).

公开(公告)号：US08852751B2

公开(公告)日：2014-10-07

申请号：US12566759

申请日：2009-09-25

Applicant: Blair A. Smith ,  Aaron T. Nardi ,  Kevin M. Rankin ,  Patrick Louis Clavette

Inventor： Blair A. Smith ,  Aaron T. Nardi ,  Kevin M. Rankin ,  Patrick Louis Clavette

IPC: C23C30/00

CPC classification number: C23C8/08 ,  C23C8/42 ,  C23C8/68 ,  C23C8/70

Abstract: A wear resistant device includes a substrate of a first metallic material and a wear resistant layer disposed on a substrate. The wear resistant layer includes a matrix of a second, different metallic material, particulates dispersed throughout the matrix, and a boron material dispersed within a portion of the matrix.

Abstract translation: 耐磨装置包括第一金属材料的基底和设置在基底上的耐磨层。 耐磨层包括第二不同金属材料的基体，分散在整个基体中的微粒，以及分散在基体的一部分内的硼材料。

公开(公告)号：US08758856B2

公开(公告)日：2014-06-24

申请号：US13062271

申请日：2009-09-10

Applicant: Takanori Watanabe ,  Hideaki Iwamura ,  Katsuji Minami

Inventor： Takanori Watanabe ,  Hideaki Iwamura ,  Katsuji Minami

IPC: C23C16/28

CPC classification number: C23C8/08

Abstract: A method of fluoridation that can maintain a stable treatment quality is provided. The method of the fluoridation treatment performs the fluoridation treatment by heating and keeping a workpiece in a fluoridation treatment space filled with a predetermined fluoride atmosphere. By exposing an interior space structure that is reactive against fluorine within the fluoridation treatment space, forming a fluoride layer in advance on a surface of the interior space structure exposed within the fluoridation treatment space, and performing the fluoridation treatment, a fluoridation source gas supplied for the fluoridation treatment of the workpiece is not significantly consumed for fluoridating the surface of the interior space structure during the fluoridation treatment. Further, even when a fluoridation potential of the supplied fluoridation source gas is insufficient, the fluoride layer on the surface of the interior space structure discharges the fluoridation gas. Thereby, the fluoride atmosphere in the fluoridation treatment space during the fluoridation treatment can be appropriately maintained.

Abstract translation: 提供了可以保持稳定的处理质量的氟化方法。 氟化处理方法通过在填充有预定氟化物气氛的氟化处理空间中加热并保持工件进行氟化处理。 通过暴露在氟化处理空间内与氟反应的内部空间结构，预先在暴露在氟化处理空间内的内部空间结构的表面上形成氟化物层，进行氟化处理，提供氟化源气体 在氟化处理期间，对于内部空间结构的表面进行氟化，工件的氟化处理不被显着消耗。 此外，即使所提供的氟化源气体的氟化电位不足，内部空间结构的表面上的氟化物层排出氟化气体。 由此，能够适当地维持氟化处理时的氟化处理空间的氟化物气氛。