APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO PARTICLES DURING PNEUMATIC TRANSPORT
    11.
    发明申请
    APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO PARTICLES DURING PNEUMATIC TRANSPORT 有权
    在气动输送过程中原子或分子层沉积在颗粒上的装置和方法

    公开(公告)号:US20120009343A1

    公开(公告)日:2012-01-12

    申请号:US13254854

    申请日:2010-03-04

    CPC classification number: C23C16/4417 C23C16/45525 C23C16/45551

    Abstract: The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.

    Abstract translation: 本发明提供一种将涂层沉积在管中气动输送的颗粒上的方法。 该方法包括以下步骤:提供具有入口和出口的管; 在管的入口开口处或附近,将携带颗粒的载气引入管中以产生通过管的颗粒流; 以及经由管的入口开口下游的至少一个注入点将第一自终端反应物注入管中,以与颗粒流中的颗粒反应。 该方法适用于原子层沉积和分子层沉积。 还公开了一种用于执行该过程的装置。

    APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO PARTICLES DURING PNEUMATIC TRANSPORT

    公开(公告)号:US20210102288A1

    公开(公告)日:2021-04-08

    申请号:US17099565

    申请日:2020-11-16

    Abstract: The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.

    APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO PARTICLES DURING PNEUMATIC TRANSPORT

    公开(公告)号:US20180073138A1

    公开(公告)日:2018-03-15

    申请号:US15813840

    申请日:2017-11-15

    CPC classification number: C23C16/4417 C23C16/45525 C23C16/45551

    Abstract: The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.

Patent Agency Ranking