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    Plasma generator
    11.
    发明授权
    Plasma generator 失效
    等离子发生器

    公开(公告)号：US4737885A

    公开(公告)日：1988-04-12

    申请号：US821919

    申请日：1986-01-21

    Applicant: Kensuke Akutsu

    Inventor： Kensuke Akutsu

    IPC: B01J19/08 ,  C01B13/11 ,  H05H1/48 ,  H05H1/24

    CPC classification number: B01J19/088 ,  C01B13/11 ,  H05H1/48 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/34 ,  Y10S422/907

    Abstract: A plasma generator including an excitation electrode and an opposite electrode confronting the excitation electrode such that plasma is generated upon impression of a high voltage between the excitation electrode and the opposite electrode. The plasma generator further includes granular material which is at least partially composed of dielectric grains and is provided between the excitation electrode and the opposite electrode.

    Abstract translation: 一种等离子体发生器，其包括激励电极和面对激励电极的相对电极，使得在激励电极和相对电极之间的高电压压印时产生等离子体。 等离子体发生器还包括至少部分地由电介质晶粒组成并且设置在激励电极和相对电极之间的颗粒材料。

    Ozone generator
    12.
    发明授权
    Ozone generator 失效
    臭氧发生器

    公开(公告)号：US4159971A

    公开(公告)日：1979-07-03

    申请号：US764219

    申请日：1977-01-31

    Applicant: Arthur Gneupel

    Inventor： Arthur Gneupel

    IPC: C01B13/11 ,  H01T23/00

    CPC classification number: C01B13/11 ,  H01T23/00 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/34

    Abstract: A substantially tubular-shaped ozone generator embodying an inner electrode, a coaxial outer electrode surrounding the inner electrode and a tube member formed of dielectric material arranged between the inner electrode and the outer electrode. Within the tube member formed of dielectric material there is arranged a substantially cylindrical core provided at its outer surface with one or a number of substantially helically-shaped grooves extending in the axial direction of the core and forming a throughpass channel for the medium to be ozonized and the ozone which is generated.

    Abstract translation: 一个体积为管状的臭氧发生器，其包括内部电极，围绕内部电极的同轴外部电极和由内部电极和外部电极之间布置的电介质材料形成的管件。 在由电介质材料形成的管构件中，布置有基本上圆柱形的芯，其在其外表面处设置有沿芯的轴向方向延伸的一个或多个基本上为螺旋状的凹槽，并形成用于介质被臭化的通道 和产生的臭氧。

    Ozone generating apparatus
    13.
    发明授权
    Ozone generating apparatus 失效
    臭氧发生装置

    公开(公告)号：US4025441A

    公开(公告)日：1977-05-24

    申请号：US603655

    申请日：1975-08-11

    Applicant: Norikazu Tabata ,  Shigenori Yagi ,  Takanori Ueno

    Inventor： Norikazu Tabata ,  Shigenori Yagi ,  Takanori Ueno

    IPC: C01B13/11

    CPC classification number: C01B13/11 ,  C01B2201/24 ,  C01B2201/76

    Abstract: An ozone generating apparatus is disclosed which is quite compact and has a high yield of ozone and which prevents an abnormal rise of temperature in a discharge gap by recycling a liquid coolant having low electric conductivity through an inner part of a high voltage electrode tube of a silent discharge ozonizer to cool the electrode tube.

    Abstract translation: 公开了一种臭氧发生装置，该装置相当紧凑，臭氧产生量高，并且通过将具有低导电性的液体冷却剂再循环到高压电极管的内部，防止放电间隙中的温度异常升高 静音放电臭氧发生器冷却电极管。

    OZONE GENERATOR AND OZONE GENERATION METHOD
    17.
    发明申请
    OZONE GENERATOR AND OZONE GENERATION METHOD 审中-公开
    臭氧发生器和臭氧发生方法

    公开(公告)号：US20160023900A1

    公开(公告)日：2016-01-28

    申请号：US14442011

    申请日：2013-11-11

    Applicant: WACOM

    Inventor： Masaki KUSUHARA

    IPC: C01B13/11 ,  C23C16/34 ,  C25B1/13 ,  C23C16/54 ,  C23C16/515 ,  C23C16/505

    CPC classification number: C01B13/115 ,  C01B13/11 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/24 ,  C23C16/345 ,  C23C16/505 ,  C23C16/515 ,  C23C16/54 ,  C25B1/13

    Abstract: In order to generate ozone, which is used for ashing and plasma cleaning, plasma generated in a decompressed chamber is conventionally used. But it is difficult to reduce the production cost of an ozone generation, because facility cost and process cost are expensive in a decompressed process. According to the present invention, ozone is generated by atmospheric pressure plasma CVD using dielectric barrier discharge generated by a plasma head where a plurality of plasma head unit members are installed in parallel to generate plasma by applying electric field or magnetic field via a dielectric member. Stable glow discharge plasma is formed even under atmospheric pressure by dielectric barrier discharge. Then, ozone can be generated under atmospheric pressure, and semiconductor device with low cost can be fabricated.

    Abstract translation: 为了产生用于灰化和等离子体清洗的臭氧，通常使用在减压室中产生的等离子体。 但由于设备成本和工艺成本在减压过程中昂贵，所以难以降低臭氧发生的生产成本。 根据本发明，通过使用由等离子体头产生的介质阻挡放电，通过大气压等离子体CVD产生臭氧，其中多个等离子体头单元构件并联安装以通过经由电介质构件施加电场或磁场而产生等离子体。 通过电介质阻挡放电，甚至在大气压下形成稳定的辉光放电等离子体。 然后，可以在大气压下产生臭氧，可以制造低成本的半导体器件。

    OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR
    20.
    发明申请
    OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR 审中-公开
    其使用的臭氧和臭氧设备的操作方法

    公开(公告)号：US20100084259A1

    公开(公告)日：2010-04-08

    申请号：US12573156

    申请日：2009-10-05

    Applicant: Masaaki Kato ,  Rie Kawaguchi

    Inventor： Masaaki Kato ,  Rie Kawaguchi

    IPC: C01B13/11 ,  C25B9/10

    CPC classification number: C25B1/13 ,  C01B13/115 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/34 ,  C01B2201/62 ,  C25B9/10 ,  C25B15/02 ,  H01M4/8605 ,  Y02E60/366

    Abstract: The present invention offers an operation method of an ozonizer and an ozonizer apparatus to improve ozone gas purity and to achieve long and safety electrolysis operation in such manner that, during normal operation of the ozonizer, ozone gas is generated at the anode in the anode compartment and hydrogen gas is generated at the cathode in the cathode compartment; and only when the ozonizer is stopped and operation is switched to protective current operation during which minute electric current is supplied to protect said anode, oxygen-containing gas is supplied to said cathode compartment after electrolyte and hydrogen gas in said cathode compartment are all drained out, so that said cathode is made function as a gas electrode for oxygen reduction reaction, using said cathode as a reversible electrode with two functions as a gas generation electrode and a gas electrode, thereby during normal operation, ozone is generated efficiently, and during the protective current operation, when safety is a key issue, hydrogen gas is not generated at the cathode and mingling of hydrogen gas into ozone gas generated at the anode is prevented.

    Abstract translation: 本发明提供一种臭氧发生器和臭氧发生装置的操作方法，以改善臭氧气体的纯度并实现长时间和安全的电解操作，使得在臭氧发生器的正常操作期间，在阳极室的阳极处产生臭氧气体 在阴极室的阴极产生氢气; 并且只有当臭氧发生器停止并且操作切换到保护电流操作时，在该保护电流操作期间供应微小的电流以保护所述阳极，则在所述阴极室中的电解液和氢气全部被排出之后，含氧气体被供应到所述阴极室 使得所述阴极被用作用于氧还原反应的气体电极，使用所述阴极作为具有两个功能的可逆电极作为气体发生电极和气体电极，从而在正常操作期间有效地产生臭氧，并且在 保护电流操作，当安全是关键问题时，在阴极处不产生氢气，并且防止氢气混入阳极产生的臭氧气体中。

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