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公开(公告)号：US6082892A
公开(公告)日：2000-07-04
申请号：US947502
申请日：1997-10-10
Applicant: Michael E. Adel , Dario Cabib , Yaron Ish-Shalom , Shmuel Mangan
Inventor： Michael E. Adel , Dario Cabib , Yaron Ish-Shalom , Shmuel Mangan
Abstract: A method of remotely measuring the temperature of a body, such as a semiconductor wafer, whose transparency varies with both wavelength and temperature and is characterized by an optical absorption edge. The body is illuminated at wavelengths on either side of the optical absorption edge. Based on the measured reflectivity at wavelengths shorter than the optical absorption edge, the direct reflectivity at wavelengths longer than the optical absorption edge is predicted and used to estimate the component of total reflectivity, at wavelengths longer than the optical absorption edge, which corresponds to propagation through the body and reflection back through the body. Light reflected from the body, measured in an "active" channel, is distinguished from light emitted passively by the body and measured in a "passive" channel. In the case of an opaque body, this allows the estimation of the emissivity of the body, and a temperature estimate based on Planck's law.
Abstract translation: 远程测量其透明度随波长和温度两者而变化的半导体晶片等体的温度的方法，其特征在于光吸收边缘。 身体在光吸收边缘两侧的波长处照亮。 基于在比光吸收边缘短的波长处的测量的反射率，预测在比光吸收边缘长的波长处的直接反射率，并且用于估计在比对应于传播的光吸收边长的波长处的总反射率的分量 通过身体反射穿过身体。 在“活动”通道中测量的从身体反射的光与身体被动发射的光不同，并在“被动”通道中测量。 在不透明的身体的情况下，这允许估计身体的发射率，以及基于普朗克定律的温度估计。
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12.发明授权
公开(公告)号：US5993059A
公开(公告)日：1999-11-30
申请号：US40045
申请日：1998-03-17
Applicant: James Anthony O'Neill , Jyothi Singh
Inventor： James Anthony O'Neill , Jyothi Singh
CPC classification number: G01J5/62 , G01J5/0003 , G01J5/0007 , G01J5/041 , G01J5/08 , G01J5/0809 , G01J5/0834 , G01J5/0862
Abstract: A system and method of measurement of emissivity and radiance of a wafer in a rapid thermal processing chamber enables determination of wafer temperature and control of temperature of the wafer. Mirrors enclose the chamber and reflect radiation from lamps within the chamber to heat the workpiece of interest. One or more viewing ports are provided in one of the mirrors to allow for the egress of radiant energy emitted by the wafer. The wavelength of the exiting radiation is selected by an optical filter having a passband which passes radiation at wavelengths emitted by the wafer while excluding radiation emitted by heating lamps. A chopper having surface regions differing in their reflectivity and transmissivity is positioned along an optical path of radiation propagating through the one or more ports, this resulting in a pulsation of detected radiation. The ratio of the detected intensities of the radiation pulses is used to determine wafer reflectance based on reflectivity and transmissivity of the reflective portion of the chopper. The maximum intensity of radiation is also taken as a measure of radiance. The reflectance is employed to calculate the emissivity, and the emissivity in combination with the radiance are employed to calculate the wafer temperature.
Abstract translation: 在快速热处理室中测量晶片的发射率和辐射度的系统和方法能够确定晶片温度和晶片温度的控制。 反射镜包围室并且反射室内的灯的辐射以加热感兴趣的工件。 在一个反射镜中提供一个或多个观察端口，以允许由晶片发出的辐射能的出射。 出射辐射的波长通过具有通过透光的滤光器来选择，该通带通过辐射在晶片发射的波长处，同时排除由加热灯发出的辐射。 具有其反射率和透射率不同的表面区域的斩波器沿着传播通过一个或多个端口的辐射的光路被定位，这导致检测到的辐射的脉动。 使用检测到的辐射脉冲强度的比率来确定基于斩光器的反射部分的反射率和透射率的晶片反射率。 辐射的最大强度也作为辐射度量。 采用反射率计算发射率，采用辐射率与发射率的结合来计算晶圆温度。
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公开(公告)号：US5952661A
公开(公告)日：1999-09-14
申请号：US904145
申请日：1997-07-31
Applicant: Paul Klocek
Inventor： Paul Klocek
Abstract: Thermal imaging chopper (20) may comprise a disk (40) formed of a thermally transmitting material. The disk (40) may include a structure (44) operable to randomly scatter thermal radiation of the scene (14).
Abstract translation: 热成像斩光器（20）可以包括由热传递材料形成的盘（40）。 盘（40）可以包括可操作以随机散射场景（14）的热辐射的结构（44）。
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公开(公告)号：US5739532A
公开(公告)日：1998-04-14
申请号：US746570
申请日：1996-11-13
Applicant: Katsumi Imada , Takahiro Nishikura , Osamu Kawasaki
Inventor： Katsumi Imada , Takahiro Nishikura , Osamu Kawasaki
Abstract: A pyroelectric IR sensor equipped with a chopper for opening and closing a shielding plate so that infrared rays emitted from an object are allowed to be incident onto a pyroelectric sensor unit and intercepted therefrom, and having a structure capable of providing a large shielding width for the shielding plate without enlarging the chopper. Piezoelectric members are formed on a thin elastic sheet composed of a planar sheet having a tip to which a shielding plate is attached, except for a partial region which functions to magnify oscillations for enlarging displacement of the shielding plate.
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公开(公告)号：US5372426A
公开(公告)日：1994-12-13
申请号：US171863
申请日：1993-12-22
Applicant: Robert M. Broudy , Edward C. Goldstick , David A. Holm , Federick B. Holt , Alan N. Iverson , Dietrich E. Riemer
Inventor： Robert M. Broudy , Edward C. Goldstick , David A. Holm , Federick B. Holt , Alan N. Iverson , Dietrich E. Riemer
CPC classification number: G01J5/02 , G01J5/0205 , G01J5/025 , G01J5/026 , G01J5/08 , G01J5/0815 , G01J5/0821 , G01J5/0834 , G01J5/0862 , G01J5/0893 , G01J5/60 , G08B17/12 , G01J2005/068 , G01J5/62
Abstract: A thermal condition sensor system monitors equipment such as aircraft engines. The thermal condition sensor system includes a collector which collects radiation from the equipment and a detector assembly which detects collected radiation over a discriminating spectral band region in at least three spectral bands and generates signals representative of detected radiation in each spectral band. A processor receives the signals and generates a report of the thermal conditions of the equipment using interband comparison of the at least three spectral bands.
Abstract translation: 热状态传感器系统监视飞机发动机等设备。 热条件传感器系统包括收集来自设备的辐射的收集器和检测器组件，该检测器组件在至少三个光谱带中的识别光谱带区域上检测所收集的辐射，并产生表示每个光谱带中检测到的辐射的信号。 处理器接收信号并使用至少三个光谱带的区间比较来生成设备的热条件的报告。
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Patent Agency Ranking16.发明授权Method for measuring surface temperature of semiconductor wafer substrate, and heat-treating apparatus 失效半导体晶片基板的表面温度测定方法以及热处理装置
公开(公告)号：US4979134A
公开(公告)日：1990-12-18
申请号：US380026
申请日：1989-07-14
Applicant: Jiro Arima , Hiroji Tsujimura , Tomonori Narita , Hiroki Takebuchi
Inventor： Jiro Arima , Hiroji Tsujimura , Tomonori Narita , Hiroki Takebuchi
CPC classification number: G01J5/0003 , G01J5/0007 , G01J5/524 , G01J5/602 , G01J5/62
Abstract: A method for measuring the surface temperature of a wafer substrate and a heat-treating apparatus are both used in a semiconductor device-manufacturing process wherein a reference light including infrared rays is intermittently emitted toward a wafer substrate. Infrared rays of a plurality of different types whose wavelengths are shorter than 1 .mu.m and differ from each other are selectively detected from the reference light emitted toward the wafer substrate, the reference light reflected by the wafer substrate, and the light radiated from the wafer substrate itself. On the basis of the detection performed with respect to the emitted reference light, the reflected reference light and the radiated infrared rays, the surface temperature of the wafer substrate is calculated. A substrate-heating element is controlled on the basis of the calculated temperature.
Abstract translation: 用于测量晶片衬底和热处理设备的表面温度的方法都用于半导体器件制造工艺中，其中包括红外线的参考光被间歇地朝向晶片衬底发射。 从朝向晶片基板发射的参考光，由晶片基板反射的参考光和从晶片辐射的光，选择性地检测波长短于1μm并且彼此不同的多种不同类型的红外线 底物本身。 基于对所发射的参考光，反射参考光和辐射红外线执行的检测，计算晶片衬底的表面温度。 基于计算出的温度控制基板加热元件。
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17.发明授权
公开(公告)号：US4393403A
公开(公告)日：1983-07-12
申请号：US267215
申请日：1981-05-26
Applicant: Hans P. Geis , Holger Helber
Inventor： Hans P. Geis , Holger Helber
CPC classification number: H04N5/2254 , G01J5/62 , H04N5/33
Abstract: By rotating a diaphragm in front of a pickup device, for example a pyroelectric vidicon, eddy currents are generated in the diaphragm if the diaphragm is made of a metal. These eddy currents are generated as a result of the interaction between the moving diaphragm and the magnetic field of the deflection coils of the vidicon. If the diaphragm is instead made of an insulating material, separation of charges occurs on it as a result electrostatic generation, due to the interaction between the diaphragm and the electrostatic field of the vidicon. Compensation of the charge separation causes interference in the video signal. According to the invention a diaphragm of an insulating material is used which is covered with a pattern of electrically conductive tracks or a very high resistance layer. As a result of this no eddy currents and no noteworthy electrostatic charges can occur, so that an interference-free video signal is obtained.
Abstract translation: 如果隔膜由金属制成，则通过在拾取装置的前面旋转隔膜，例如热电伏隔膜，在隔膜中产生涡流。 这些涡流是由于移动光阑与摄像机的偏转线圈的磁场之间的相互作用而产生的。 如果膜片由绝缘材料制成，则由于膜片和静电场的静电场之间的相互作用，电荷分离会导致静电产生。 电荷分离的补偿会导致视频信号的干扰。 根据本发明，使用绝缘材料的隔膜，其被导电迹线图案或非常高的电阻层覆盖。 作为这样的结果，不会产生涡流，并且不会发生值得注意的静电电荷，从而获得无干扰的视频信号。
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18.发明授权
公开(公告)号：US3916690A
公开(公告)日：1975-11-04
申请号：US38057273
申请日：1973-07-19
Applicant: BBC BROWN BOVERI & CIE
Inventor： BRANDLI GEROLD
Abstract: Apparatus for measuring the temperature at the surface of an object by measurement of the infrared radiation emitted from the surface comprises a variably heated compensating radiator located in spaced relation to the surface of the object and a rotatable chopper wheel interposed between the object surface and the compensating radiator. The side of the chopper wheel facing towards the compensating radiator is made radiation reflective and a radiation detector is positioned to receive in alternation the infrared radiation emitted from the surface of the object and which passes intermittently through the rotating chopper wheel and infrared radiation emitted by the compensating radiator and which is reflected intermittently into the detector from the reflective side of the chopper wheel. The detector produces at its output an alternating current signal determined by any temperature differential existing between the object and compensating radiator, and the heat supply to the compensating radiator is varied in accordance with the signal in such sense as to reduce the signal to zero whereby the temperature of the compensating radiator then equals the temperature of the object.
Abstract translation: 用于通过测量从表面发射的红外辐射来测量物体表面处的温度的装置包括位于物体表面间隔开的可变加热的补偿辐射器，以及插入物体表面和补偿物体之间的可旋转的切碎机轮 散热器。 斩波轮朝向补偿辐射体的一侧被制成辐射反射性，并且放射线检测器被定位成交替地接收从物体的表面发射的红外辐射，并且间歇地通过旋转的斩光轮和由 并且从斩波轮的反射侧间歇地反射到检测器中。 检测器在其输出端产生由物体和补偿辐射器之间存在的任何温度差确定的交流信号，并且补偿辐射器的供热根据信号而变化，从而将信号降低到零，由此， 然后补偿散热器的温度等于物体的温度。
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19.发明授权Infrared radiometer apparatus for detecting clear-air turbulence from an aircraft 失效用于从飞机检测清除空气涡流的红外辐射仪装置
公开(公告)号：US3641345A
公开(公告)日：1972-02-08
申请号：US3641345D
申请日：1970-03-05
Applicant: NAT RES DEV
Inventor： COACKLEY ROBERT , REYNOLDS MICHAEL LESLIE , RODGERS CLIVE DOUGLAS
CPC classification number: G01J5/62 , G01J5/0014
Abstract: A radiometer apparatus suitable for use on a supersonic aircraft for clear-air turbulence detection includes means for operating at four selected wavelengths within an atmospheric absorption band, for example the 15 Mu band of carbon dioxide. At any particular height of the aircraft each of a set of filters used to select the four selected wavelengths has a weighting function which depends on the effective absorption coefficient of the atmosphere at that wavelength and each indicates which part of the atmosphere ahead provides a significant contribution to the radiation measured by the apparatus. At longer wavelengths the atmosphere is opaque and the radiometer apparatus receives radiation from immediately in front of the aircraft. By generating suitable functions from the outputs of radiation passed by two or more of the filters it is possible to detect turbulence of the type looked for.
Abstract translation: 适用于超音速飞行器用于清澈湍流检测的辐射计装置包括用于在大气吸收带内例如15微米二氧化碳带内的四个选定波长下操作的装置。 在飞机的任何特定高度处，用于选择四个所选波长的一组滤波器中的每一个具有取决于该波长处的大气的有效吸收系数的加权函数，并且每个指示前面的大气哪一部分提供显着贡献 对于由该装置测量的辐射。 在更长的波长下，大气是不透明的，辐射计装置从飞机前面立即接收辐射。 通过由两个或更多个过滤器通过的辐射的输出产生适当的功能，可以检测所寻找类型的湍流。
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20.发明授权Variable thickness infrared chopper to change the focus of the optical system 失效可变厚度红外线斩波器改变光学系统的焦距
公开(公告)号：US3242336A
公开(公告)日：1966-03-22
申请号：US2880360
申请日：1960-05-12
Applicant: PERKIN ELMER CORP
Inventor： RAYCES JUAN L
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