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公开(公告)号：US08432151B2
公开(公告)日：2013-04-30
申请号：US13002865
申请日：2008-09-22
申请人： Hiroaki Sato
发明人： Hiroaki Sato
IPC分类号： G01R23/00
摘要： A phase comparator (4) for detecting a phase difference between a first signal and a second signal, a first oscillating circuit (1) for supplying the phase comparator with a reference signal as the first signal, and a DDS (8) as a second oscillating circuit for outputting a signal according to an output of the above-mentioned phase comparator are provided.As for a filter-thickness measuring device using the PLL circuit as a frequency measurement circuit, a crystal oscillator (11) which is made of quartz etc. and connected to the first oscillating circuit is accommodated in a vacuum chamber (C). It is arranged that the frequency measurement circuit which constitutes the PLL circuit measures a film thickness of the film forming material based on a change of a natural frequency of a piezoelectric crystal, the change being caused by the film forming material deposited on the piezoelectric element in the vacuum chamber.
摘要翻译： 用于检测第一信号和第二信号之间的相位差的相位比较器（4），用于向相位比较器提供参考信号作为第一信号的第一振荡电路（1）和作为第二信号的DDS（8） 提供了用于根据上述相位比较器的输出输出信号的振荡电路。 对于使用PLL电路作为频率测量电路的滤波器厚度测量装置，将由石英等制成并连接到第一振荡电路的晶体振荡器（11）容纳在真空室（C）中。 布置了构成PLL电路的频率测量电路基于压电晶体的固有频率的变化来测量成膜材料的膜厚度，该变化是由沉积在压电元件上的成膜材料引起的 真空室。
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公开(公告)号：US20130018616A1
公开(公告)日：2013-01-17
申请号：US13217365
申请日：2011-08-25
申请人： MING-HUNG CHOU , NAI-JIAN WANG , CHING-FENG HSIEH
发明人： MING-HUNG CHOU , NAI-JIAN WANG , CHING-FENG HSIEH
摘要： A frequency counter obtains a cycle number of a clock of a target signal by a reference signal and a clock mask synchronous with the target signal, calculates a frequency of the target signal based on the cycle number, corrects the frequency according to a plurality of phase shift signals generated based on the reference signal, and minimizes an error of the calculated frequency by increasing the quantity of the phase shift signals, so as to enhance the accuracy of the calculated frequency of the target signal, speed up measurement, and reduce required circuit areas.
摘要翻译： 频率计数器通过与目标信号同步的参考信号和时钟屏蔽获得目标信号的时钟的周期数，根据周期数计算目标信号的频率，根据多个相位来校正频率 基于参考信号生成的移位信号，并且通过增加相移信号的量来最小化计算出的频率的误差，以便提高目标信号的计算频率的精度，加速测量，并且减少所需的电路 地区
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公开(公告)号：US20130018615A1
公开(公告)日：2013-01-17
申请号：US13217469
申请日：2011-08-25
申请人： MING-HUNG CHOU , NAI-JIAN WANG , CHING-FENG HSIEH
发明人： MING-HUNG CHOU , NAI-JIAN WANG , CHING-FENG HSIEH
IPC分类号： G06F19/00
摘要： A method for measuring frequency includes the steps of obtaining the cycle number of the clock rate of a signal under test based on a reference signal and a clock mask synchronous with the signal under test; obtaining a frequency of the signal under test based on the cycle number; correcting the frequency of the signal under test based on a plurality of phase shift signals generated based on the reference signal; and minimizing an error of the frequency of the signal under test by increasing the quantity of the phase shift signals. The method enhances the accuracy of the obtained frequency of the signal under test, speeds up frequency measurement, and reduces the required circuit areas. A system for measuring frequency is further introduced for use with the method.
摘要翻译： 用于测量频率的方法包括以下步骤：基于参考信号和与所测信号同步的时钟屏蔽获得被测信号的时钟频率的周期数; 基于循环次数获得被测信号的频率; 基于基于所述参考信号生成的多个相移信号来校正被测信号的频率; 并且通过增加相移信号的量来最小化被测信号频率的误差。 该方法提高了被测信号的频率精度，加快了频率测量，减少了所需的电路面积。 进一步介绍了一种用于测量频率的系统，用于该方法。
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公开(公告)号：US07839153B2
公开(公告)日：2010-11-23
申请号：US12466541
申请日：2009-05-15
申请人： James Joy , Jason Kroh , Michael Ellis , Mark Allen , Wilton Pyle
发明人： James Joy , Jason Kroh , Michael Ellis , Mark Allen , Wilton Pyle
CPC分类号： G01R23/12 , A61B5/0002 , A61B5/0031 , A61B5/05 , A61B5/076 , A61B2560/0219 , A61B2560/0223 , G01D21/00 , G01F15/066 , G01R23/145
摘要： The present invention determines the resonant frequency of a sensor by adjusting the phase and frequency of an energizing signal until the frequency of the energizing signal matches the resonant frequency of the sensor. The system energizes the sensor with a low duty cycle, gated burst of RF energy having a predetermined frequency or set of frequencies and a predetermined amplitude. The energizing signal is coupled to the sensor via magnetic coupling and induces a current in the sensor which oscillates at the resonant frequency of the sensor. The system receives the ring down response of the sensor via magnetic coupling and determines the resonant frequency of the sensor, which is used to calculate the measured physical parameter. The system uses a pair of phase locked loops to adjust the phase and the frequency of the energizing signal.
摘要翻译： 本发明通过调节激励信号的相位和频率直到激励信号的频率与传感器的谐振频率相匹配来确定传感器的谐振频率。 该系统以低占空比激励传感器，具有预定频率或一组频率和预定幅度的RF能量门控突发。 激励信号通过磁耦合耦合到传感器，并且感应传感器中的电流，其以传感器的谐振频率振荡。 系统通过磁耦合接收传感器的响铃响应，并确定传感器的谐振频率，用于计算测量的物理参数。 该系统使用一对锁相环来调节激励信号的相位和频率。
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公开(公告)号：US07550978B2
公开(公告)日：2009-06-23
申请号：US11613645
申请日：2006-12-20
申请人： James Joy , Jason Kroh , Michael Ellis , Mark Allen , Wilton Pyle
发明人： James Joy , Jason Kroh , Michael Ellis , Mark Allen , Wilton Pyle
CPC分类号： G01R23/12 , A61B5/0002 , A61B5/0031 , A61B5/05 , A61B5/076 , A61B2560/0219 , A61B2560/0223 , G01D21/00 , G01F15/066 , G01R23/145
摘要： The present invention determines the resonant frequency of a sensor by adjusting the phase and frequency of an energizing signal until the frequency of the energizing signal matches the resonant frequency of the sensor. The system energizes the sensor with a low duty cycle, gated burst of RF energy having a predetermined frequency or set of frequencies and a predetermined amplitude. The energizing signal is coupled to the sensor via magnetic coupling and induces a current in the sensor which oscillates at the resonant frequency of the sensor. The system receives the ring down response of the sensor via magnetic coupling and determines the resonant frequency of the sensor, which is used to calculate the measured physical parameter. The system uses a pair of phase locked loops to adjust the phase and the frequency of the energizing signal.
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公开(公告)号：US20090115396A1
公开(公告)日：2009-05-07
申请号：US12349606
申请日：2009-01-07
申请人： Mark G. Allen , Michael Ellis , Jason Kroh , Donald J. Miller
发明人： Mark G. Allen , Michael Ellis , Jason Kroh , Donald J. Miller
CPC分类号： G01R23/12 , A61B5/0002 , A61B5/0031 , A61B5/05 , A61B5/076 , A61B2560/0219 , A61B2560/0223 , G01D21/00 , G01F15/066 , G01R23/145
摘要： The present invention determines the resonant frequency of a sensor by adjusting the phase and frequency of an energizing signal until the frequency of the energizing signal matches the resonant frequency of the sensor. The system energizes the sensor with a low duty cycle, gated burst of RF energy having a predetermined frequency or set of frequencies and a predetermined amplitude. The energizing signal is coupled to the sensor via magnetic coupling and induces a current in the sensor which oscillates at the resonant frequency of the sensor. The system receives the ring down response of the sensor via magnetic coupling and determines the resonant frequency of the sensor, which is used to calculate the measured physical parameter. The system uses a pair of phase locked loops to adjust the phase and the frequency of the energizing signal.
摘要翻译： 本发明通过调节激励信号的相位和频率直到激励信号的频率与传感器的谐振频率相匹配来确定传感器的谐振频率。 该系统以低占空比激励传感器，具有预定频率或一组频率和预定幅度的RF能量门控突发。 激励信号通过磁耦合耦合到传感器，并且感应传感器中的电流，其以传感器的谐振频率振荡。 系统通过磁耦合接收传感器的响铃响应，并确定传感器的谐振频率，用于计算测量的物理参数。 该系统使用一对锁相环来调节激励信号的相位和频率。
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公开(公告)号：US07439723B2
公开(公告)日：2008-10-21
申请号：US11748053
申请日：2007-05-14
申请人： Mark G. Allen , Michael Ellis , Jason Kroh , Donald J. Miller
发明人： Mark G. Allen , Michael Ellis , Jason Kroh , Donald J. Miller
CPC分类号： G01R23/145 , A61B5/0002 , A61B5/0031 , A61B5/05 , A61B5/076 , A61B2560/0219 , A61B2560/0223 , G01F15/066 , G01R23/12 , H04L2027/0028 , H04L2027/0055 , H04L2027/0067
摘要： The present invention determines the resonant frequency of a sensor by adjusting the phase and frequency of an energizing signal until the frequency of the energizing signal matches the resonant frequency of the sensor. The system energizes the sensor with a low duty cycle, gated burst of RF energy having a predetermined frequency or set of frequencies and a predetermined amplitude. The energizing signal is coupled to the sensor via magnetic coupling and induces a current in the sensor which oscillates at the resonant frequency of the sensor. The system receives the ring down response of the sensor via magnetic coupling and determines the resonant frequency of the sensor, which is used to calculate the measured physical parameter. The system uses a pair of phase locked loops to adjust the phase and the frequency of the energizing signal.
摘要翻译： 本发明通过调节激励信号的相位和频率直到激励信号的频率与传感器的谐振频率相匹配来确定传感器的谐振频率。 该系统以低占空比激励传感器，具有预定频率或一组频率和预定幅度的RF能量门控突发。 激励信号通过磁耦合耦合到传感器，并且感应传感器中的电流，其以传感器的谐振频率振荡。 系统通过磁耦合接收传感器的响铃响应，并确定传感器的谐振频率，用于计算测量的物理参数。 该系统使用一对锁相环来调节激励信号的相位和频率。
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公开(公告)号：US07266465B1
公开(公告)日：2007-09-04
申请号：US11270096
申请日：2005-11-09
CPC分类号： G01R23/12
摘要： An apparatus for confirming a frequency measurement of a received signal includes a discrete Fourier transform (DFT) module for receiving a sampled digital signal. The DFT module is configured to analyze the received sampled digital signal, and output amplitude values at different frequency components. A threshold comparator is included for receiving the amplitude values of the frequency components and outputting a thresholded-amplitude value exceeding a predetermined threshold value. A frequency confirmation is provided based on the thresholded-amplitude value. The sampled digital signal is sampled at a sampling frequency of fs, and the DFT module is configured to analyze the received sampled digital signal at a frequency bandwidth that is equal to or less than fs. The frequency bandwidth is equal to the sampling frequency of fs, when the received sampled digital signal includes I and Q signals. The DFT module is configured to analyze the received sampled digital signal by examining N frequency components, where N equals the total number of frequency components equally spaced between 0 and the sampling frequency.
摘要翻译： 用于确认接收信号的频率测量的装置包括用于接收采样数字信号的离散付里叶变换（DFT）模块。 DFT模块被配置为分析接收的采样数字信号，并输出不同频率分量的振幅值。 包括阈值比较器，用于接收频率分量的振幅值，并输出超过预定阈值的阈值振幅值。 基于阈值振幅值提供频率确认。 以采样频率f 3采样数字信号，并且DFT模块被配置为以等于或小于f S的频率带宽分析所接收的采样数字信号 。 当接收到的采样数字信号包括I和Q信号时，频率带宽等于f采样频率。 DFT模块被配置为通过检查N个频率分量来分析接收到的采样数字信号，其中N等于0和采样频率之间相等间隔的频率分量的总数。
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公开(公告)号：US20020039019A1
公开(公告)日：2002-04-04
申请号：US09901644
申请日：2001-07-11
发明人： Kurt Schmidt
IPC分类号： G01R023/00 , G01R023/12 , H03M001/48
CPC分类号： G01R23/12 , H03H17/0286
摘要： A frequency estimator for estimating the frequency of a digital input signal (x(k)) includes a phase device (2) for determining the phase (null(k)) of the input signal (x(k)), a differentiator (3) for generating the phase difference (nulldiff1(k)) between adjacent samples of the phase (null(k), null(knull1)) and a filter (4) for averaging the phase difference (nulldiff(k)) and having a trapezoidal pulse response (hM(k)). The trapezoidal pulse response (hM(k)) is generated by superimposing a first triangular pulse response with a second triangular pulse response which is offset in time with respect to the first triangular pulse response.
摘要翻译： 用于估计数字输入信号（x（k））的频率的频率估计器包括用于确定输入信号（x（k））的相位（phi（k））的相位装置（2），微分器 ），用于产生相位（phi（k），phi（k-1））的相邻采样之间的相位差（phidiff1（k））和用于平均相位差（phidiff（k））的滤波器（4） 梯形脉冲响应（hM（k））。 梯形脉冲响应（hM（k））通过将第一三角形脉冲响应与相对于第一三角形脉冲响应在时间上偏移的第二三角形脉冲响应叠加而产生。
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公开(公告)号：US20020000800A1
公开(公告)日：2002-01-03
申请号：US09202438
申请日：1999-02-18
发明人： MARTIN HILL
IPC分类号： G01R013/02
CPC分类号： G01R23/12
摘要： A digital frequency detector (10) and method for digitally detecting arbitrarily small phase changes between a signal waveform and a reference waveform. Both the reference waveform and the signal waveform are sampled at a rate related to the clock frequency fc, and separately fed into two arrays of simple frequency detectors (12, 14). Each simple frequency detector in each array has a different starting phase with respect to the reference waveform and the signal waveform respectively. Phase slips between the reference waveform and the sampling frequency and phase slips between the signal waveform and the sampling frequency are measured by the detector arrays (12, 14). These phase slips, called nullslip eventsnull, are combined in circuit (16) which produces an output indicative of phase slips between the reference waveform and the signal waveform. Using this phase slip information, the instantaneous frequency difference between the signal and reference waveforms can be determined.
摘要翻译： 一种数字频率检测器（10）和用于数字检测信号波形与参考波形之间任意小的相位变化的方法。 以与时钟频率fc相关的速率对参考波形和信号波形进行采样，分别馈入两个简单频率检测器阵列（12,14）。 每个阵列中的每个简单频率检测器分别相对于参考波形和信号波形具有不同的起始相位。 通过检测器阵列（12,14）测量参考波形与采样频率之间的相位差和信号波形与采样频率之间的相位滑移。 称为“滑动事件”的这些相位滑差被组合在电路（16）中，其产生指示参考波形和信号波形之间的相位差的输出。 使用该相位滑动信息，可以确定信号和参考波形之间的瞬时频率差。
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