公开(公告)号：US07162317B2

公开(公告)日：2007-01-09

申请号：US11098037

申请日：2005-03-31

Applicant: Chung-Ho Huang ,  Shih-Jeun Fan ,  Chin-Chuan Chang

Inventor： Chung-Ho Huang ,  Shih-Jeun Fan ,  Chin-Chuan Chang

IPC: G06F19/00

CPC classification number: G05B19/0426 ,  G05B2219/23195 ,  G05B2219/23255 ,  G05B2219/24167 ,  G05B2219/25066 ,  G05B2219/25076 ,  G05B2219/25314 ,  G05B2219/2602

Abstract: A method for configuring a specific plasma cluster tool having a plurality of modules. The method includes providing a set of module option definition files, the set of module option definition files containing generic configuration definitions for generic plasma cluster tools. The method further includes providing a set of tool-specific protection information, the set of tool-specific protection information including data that specifically identifies the particular plasma cluster tool for which the configuring is intended. The method further includes providing a set of tool-specific options specifications, the set of tool-specific options specifications specifying options that are specified for the specific plasma cluster tool. The method additionally includes generating a key file, the key file encapsulating configuration restrictions imposed on the specific plasma cluster tool, the key file being configured to be a required file in the configuring the specific plasma tool.

Abstract translation: 一种用于配置具有多个模块的特定等离子体簇工具的方法。 该方法包括提供一组模块选项定义文件，该模块选项定义文件集合包含通用等离子体集群工具的通用配置定义。 该方法还包括提供一组特定于工具的保护信息，该组特定于工具的保护信息包括专门识别用于该配置的特定等离子体簇工具的数据。 该方法还包括提供一组特定于工具的选项规范，该组指定特定选项规范指定为特定等离子体簇工具指定的选项。 该方法还包括生成密钥文件，密钥文件封装对特定等离子体簇工具施加的配置限制，密钥文件被配置为配置特定等离子体工具中的所需文件。

公开(公告)号：US20060206223A1

公开(公告)日：2006-09-14

申请号：US11097839

申请日：2005-03-31

Applicant: Chung-Ho Huang ,  Shih-Jeun Fan ,  Chin-Chuan Chang

Inventor： Chung-Ho Huang ,  Shih-Jeun Fan ,  Chin-Chuan Chang

IPC: G06F19/00

CPC classification number: G05B19/0426 ,  G05B2219/23195 ,  G05B2219/23255 ,  G05B2219/24167 ,  G05B2219/25066 ,  G05B2219/25076 ,  G05B2219/25314 ,  G05B2219/2602 ,  Y10S438/907 ,  Y10S438/908

Abstract: A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.

Abstract translation: 公开了一种用于配置等离子体簇工具的方法。 该方法包括从选项规范生成密钥文件，密钥文件封装特别强加于等离子体集群工具的配置限制。 该方法还包括使用密钥文件生成至少一个系统范围的配置文件和至少一个组件级配置文件。 该方法还包括从选项定义文件的数据库，至少一个系统范围的配置文件和至少一个组件级配置文件生成运行时可执行对象。 此外，该方法包括采用运行时可执行对象来配置等离子体簇工具。

公开(公告)号：US6148306A

公开(公告)日：2000-11-14

申请号：US87246

申请日：1998-05-28

Applicant: Neal John Seidl ,  August Antony Divjak ,  Uday Ramchandra Kelkar

Inventor： Neal John Seidl ,  August Antony Divjak ,  Uday Ramchandra Kelkar

IPC: G05B19/042 ,  G06F17/30

CPC classification number: G05B19/0426 ,  G05B2219/23077 ,  G05B2219/23193 ,  G05B2219/23195 ,  G05B2219/25419 ,  G05B2219/2614 ,  Y10S707/99945 ,  Y10S707/99948

Abstract: An apparatus enables a controller to be programmed without being dependent upon a particular type of programming tool. This independence is accomplished by providing data structures in the controller which define a table of executable commands along with a set of rules associated with use of each command. Upon being connected to the controller, a programming tool downloads the valid commands and command usage rules for that particular controller. This enables a generic programming tool to be used with a variety of controllers that have different commands and usage rules. For a facilities management system, the controller stores a plurality of daily control strategies which specify events that call for execution of a particular sequence of commands.

Abstract translation: 一种装置使得控制器能够被编程而不依赖于特定类型的编程工具。 这种独立性通过在控制器中提供数据结构来实现，该数据结构定义可执行命令的表以及与每个命令的使用相关联的一组规则。 连接到控制器后，编程工具下载该特定控制器的有效命令和命令使用规则。 这使得通用编程工具能够与具有不同命令和使用规则的各种控制器一起使用。 对于设施管理系统，控制器存储多个日常控制策略，其指定需要执行特定命令序列的事件。