公开(公告)号：US06693988B2

公开(公告)日：2004-02-17

申请号：US10099866

申请日：2002-03-14

Applicant: Geoffrey Harding

Inventor： Geoffrey Harding

IPC: G01N23201

CPC classification number: G01V5/0025 ,  G01N23/201

Abstract: A baggage inspection device based on coherent x-ray scatter has an x-ray source on one side of the scanning area and detectors on the other side of the scanning area. The detectors measure the energy of the scattered x-ray quanta. A primary ray collimator is arranged between scanning area and x-ray source. A secondary ray collimator for scattered rays is arranged between scanning area and detectors. The detectors are positioned on a Z axis forming an axis of symmetry for the secondary ray collimator. A point 0 on the Z axis forms the origin of a Cartesian coordinate system. The primary ray collimator allows passage only of x-ray beams impinging on the point 0. The x-ray source has an extended anode with a focus position controlled electronically about the anode length. Primary ray collimator and x-ray source extend cylindrically symmetrically about the symmetry axis or parallel to the Y axis in the X-Y plane.

Abstract translation: 基于相干X射线散射的行李检查装置在扫描区域的一侧具有x射线源，在扫描区域的另一侧具有检测器。 检测器测量散射x射线量子的能量。 主扫描准直仪布置在扫描区域和X射线源之间。 用于散射光线的二次射线准直器布置在扫描区域和检测器之间。 检测器位于Z轴上，形成二次射线准直仪的对称轴。 Z轴上的点0形成笛卡尔坐标系的原点。 主射线准直器仅允许穿过点0的X射线束通过.X射线源具有延伸的阳极，焦点位置以电子方式围绕阳极长度进行控制。 主射线准直器和X射线源围绕对称轴圆柱对称地延伸或平行于X-Y平面中的Y轴延伸。

公开(公告)号：US06556653B2

公开(公告)日：2003-04-29

申请号：US09860538

申请日：2001-05-21

Applicant: Esam Hussein

Inventor： Esam Hussein

IPC: G01N23201

CPC classification number: G01N23/02

Abstract: The system for inspecting an object comprises a structure having a first, second and third orthogonal axes, and a source of x-ray pencil beam mounted thereto along the first axis. An incident radiation detector is mounted to the structure perpendicularly to the first axis. A first and second linear arrays of scattered radiation detectors are mounted to the structure perpendicularly to the second and third axes respectively. The source of x-ray pencil beam, the incident radiation detector and the first and second linear arrays of scattered radiation detectors are spaced apart and define therebetween an inspection zone. In use, an object to be inspected is moved inside the inspection zone relative to the x-ray pencil beam. The object is inspected voxel by voxel and the radiation measurements taken at each voxel are indicative of incident radiation attenuation, scattered radiation attenuation and electron density of that voxel.

Abstract translation: 用于检查物体的系统包括具有第一，第二和第三正交轴线的结构以及沿着第一轴线安装到其上的x射线笔形光束源。 入射辐射检测器安装在垂直于第一轴线的结构上。 散射辐射检测器的第一和第二线性阵列分别安装到垂直于第二和第三轴的结构。 X射线笔束源，入射辐射检测器和散射辐射探测器的第一和第二线性阵列间隔开并在其间限定检查区。 在使用中，待检查物体相对于X射线笔束在检查区内移动。 物体是通过体素检查体素，并且在每个体素处进行的辐射测量指示入射的辐射衰减，散射的辐射衰减和该体素的电子密度。

公开(公告)号：US06453006B1

公开(公告)日：2002-09-17

申请号：US09527389

申请日：2000-03-16

Applicant: Louis N. Koppel ,  Craig E. Uhrich ,  Jon Opsal

Inventor： Louis N. Koppel ,  Craig E. Uhrich ,  Jon Opsal

IPC: G01N23201

CPC classification number: G01N23/20

Abstract: The present invention relates to the calibration and alignment of an X-ray reflectometry (“XRR”) system for measuring thin films. An aspect of the present invention describes a method for accurately determining C0 for each sample placement and for finding the incident X-ray intensity corresponding to each pixel of a detector array and thus permitting an amplitude calibration of the reflectometer system. Another aspect of the present invention relates to a method for aligning an angle-resolved X-ray reflectometer that uses a focusing optic, which may preferably be a Johansson crystal. Another aspect of the present invention is to validate the focusing optic. Another aspect of the present invention relates to the alignment of the focusing optic with the X-ray source. Another aspect of the present invention concerns the correction of measurements errors caused by the tilt or slope of the sample. Yet another aspect of the present invention concerns the calibration of the vertical position of the sample.

Abstract translation: 本发明涉及用于测量薄膜的X射线反射测量（“XRR”）系统的校准和对准。 本发明的一个方面描述了一种用于准确地确定每个样本放置的C0并且用于找到对应于检测器阵列的每个像素的入射X射线强度并因此允许反射计系统的幅度校准的方法。 本发明的另一方面涉及一种用于对准使用聚焦光学元件的角度分辨X射线反射计的方法，其可以优选地是约翰逊晶体。 本发明的另一方面是验证聚焦光学元件。 本发明的另一方面涉及聚焦光学元件与X射线源的对准。 本发明的另一方面涉及由样品的倾斜或斜率引起的测量误差的校正。 本发明的另一方面涉及到样品的垂直位置的校准。

公开(公告)号：US06359964B1

公开(公告)日：2002-03-19

申请号：US09447540

申请日：1999-11-23

Applicant: Vladimir A. Kogan

Inventor： Vladimir A. Kogan

IPC: G01N23201

CPC classification number: G01N23/20 ,  G01N23/20016

Abstract: An apparatus for X-ray analysis of materials advantageously utilizes a parabolic multilayer mirror for parallelizing the X-rays. Moreover, it may be desirable to monochromatize the parallelized radiation, for example by means of a crystal monochromator. According to the invention an influencing device for the X-rays is constructed as a single mechanical unit comprising a combination of an X-ray mirror (46) and a monochromator (48). This unit (66) can be arranged in the analysis apparatus in at least two positions (74, 76) in such a manner that the X-rays travel via the X-ray mirror (46) and the monochromator (48) in the first position (74) whereas the X-rays travel only via the X-ray mirror (46) in the second position (76). Consequently, no separate units comprising only an X-ray mirror or a combination of an X-ray mirror and a monochromator are required, so that a substantial saving in costs is achieved.

Abstract translation: 用于材料的X射线分析的装置有利地利用用于平行X射线的抛物面多层反射镜。 此外，例如通过晶体单色仪可能需要对并行辐射进行单色化。 根据本发明，用于X射线的影响装置被构造为包括X射线反射镜（46）和单色仪（48）的组合的单个机械单元。 该单元（66）可以以至少两个位置（74,76）布置在分析设备中，使得X射线经由第一个（X）的X射线反射镜（46）和单色仪（48）行进 位置（74），而X射线仅在第二位置（76）中通过X射线镜（46）行进。 因此，不需要仅包括X射线镜或X射线镜和单色仪的组合的单独单元，从而实现了大量的成本节省。

公开(公告)号：US06249567B1

公开(公告)日：2001-06-19

申请号：US09395331

申请日：1999-09-13

Applicant: Peter Rothschild ,  Lee Grodzins

Inventor： Peter Rothschild ,  Lee Grodzins

IPC: G01N23201

CPC classification number: G01V5/0025 ,  G01N23/20 ,  G01V5/0041

Abstract: An inspection system for inspecting a vehicle moving at a grade of travel over a surface and for detecting material disposed within or on the underside of the vehicle. The system has a source for providing a generally upward or downward pointing beam of penetrating radiation of specified cross-section so as to illuminate vehicles driven above or below the source of radiation. A detector arrangement, disposed below the grade of travel, detects radiation from the beam scattered by any material disposed on the underside of the moving vehicle and generates a scattered radiation signal that may be used for characterizing the material disposed on the underside of the vehicle. Similarly, a detector arrangement disposed above the vehicle generates a scattered radiation signal that may be used for characterizing the material disposed within the vehicle.

Abstract translation: 一种用于检查在表面上行进等级移动的车辆的检查系统，并且用于检测设置在车辆内侧或之下的材料。 该系统具有用于提供特定横截面的穿透辐射的大致向上或向下指向的光束的源，以照亮驱动在辐射源上方或下方的车辆。 设置在行驶级别之下的检测器装置检测由设置在移动车辆的下侧上的任何材料散射的光束的辐射，并产生可用于表征设置在车辆下侧上的材料的散射辐射信号。 类似地，设置在车辆上方的检测器装置产生可用于表征车辆中布置的材料的散射辐射信号。

公开(公告)号：US06215845B1

公开(公告)日：2001-04-10

申请号：US09420163

申请日：1999-10-18

Applicant: Wayne I Knigge

Inventor： Wayne I Knigge

IPC: G01N23201

CPC classification number: G01N23/02

Abstract: Detection of components (22-24) missing from sealed packages (16) is accomplished by combining a multiplicity of electrical outputs representing the mass in volumes of the package (16) and comparing the combined value with a standard value for packages (16) including all components (22-24). In the preferred form, the mass is represented by the absorption of x-rays, with the packages (16) being conveyed on a conveyor (18) between an x-ray radiator (12) generating a fan-shaped x-ray beam (14) and a line array (20) of individual detectors (20a, 20b, etc.). The detectors (20a, 20b, etc.) detect radiation after passing through the package (16) and provide a numerical electrical signal equal to the amount of radiation detected. If the sum of the multiplicity of numerical electrical signals is less than the standard value, the package (16) is rejected from the conveyor (18) by a rejection device (30).

Abstract translation: 从密封包装（16）中缺少的部件（22-24）的检测是通过组合多个代表包装体积（16）的质量的电输出并将组合值与包装（16）的标准值进行比较而实现的，包括包 所有组件（22-24）。 在优选形式中，质量由x射线的吸收表示，其中包装（16）被传送到产生扇形X射线束的x射线辐射器（12）之间的传送器（18）上 14）和各个检测器（20a，20b等）的线阵列（20）。 检测器（20a，20b等）在通过包装（16）之后检测辐射，并提供等于检测到的辐射量的数字电信号。 如果多个数值电信号的总和小于标准值，则通过拒收装置（30）将包装（16）从输送机（18）中排出。