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公开(公告)号：US10809104B2
公开(公告)日：2020-10-20
申请号：US15915164
申请日：2018-03-08
发明人： Walter Jenisch , Kai Schäffauer , Philipp Mayinger , Michael Zimmermann , Markus Mahringer , Stefan Hitzler
摘要： A holder for a plurality of reference standards for calibrating a measurement system, having a first receptacle in which a first reference standard is arranged and a second receptacle in which a second reference standard is arranged, wherein the first receptacle is arranged on a first side of the holder, and the second receptacle is arranged on a second side of the holder facing away from the first side of the holder.
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12.发明授权公开(公告)号：US10788320B2
公开(公告)日：2020-09-29
申请号：US16329029
申请日：2017-08-23
申请人： NEC CORPORATION
发明人： Jun Takada
摘要： A defect detecting device 10 includes an overall displacement measurement unit 11 that measures, based on observation data output from an observation device that observes a target object, a displacement of an overall movement of the target object relative to an observation point at set time intervals, as an overall displacement; a specific period detection unit 12 that detects a specific period in which the measured overall displacement is in a specific state within a period in which observation is performed; a partial displacement measurement unit 13 that measures, displacements at a plurality of points set on the target object in the detected specific period, as partial displacements; and a defect detection unit 14 that detects a defect in the target object, based on the acquired at least one of the temporal changes and the spatial distributions of the partial displacements.
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公开(公告)号：US20200300596A1
公开(公告)日：2020-09-24
申请号：US16819799
申请日：2020-03-16
申请人： MITUTOYO CORPORATION
发明人： Junsuke Yasuno
摘要： A rotary table includes: a stage; a rotary base configured to be rotated around a rotation center axis; a support mechanism that is disposed on the rotary base and supports the stage; a leveling adjustment mechanism configured to perform a leveling adjustment of the stage; and a transfer mechanism configured to transfer a rotative force of the rotary base to the stage. The transfer mechanism includes: an annular transfer member configured to receive the support mechanism therethrough; a first connecting mechanism that connects the transfer member and the rotary base and is rotatable around the first axis; and a second connecting mechanism that connects the transfer member and the stage and is rotatable around a second axis defined in a direction intersecting the first axis.
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公开(公告)号：US10775166B2
公开(公告)日：2020-09-15
申请号：US15543181
申请日：2016-02-02
发明人： Ryuta Sato , Yuki Sato , Mitsunari Oda , Nobu Nakayama
摘要： A shape evaluation method includes a shape error calculation step that calculates a shape error, which is an error between a designed shape and a shape to be evaluated, and a visible error detection step that detects visible shape errors on the basis of the shape error and predetermined visual characteristic data.
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15.发明授权公开(公告)号：US10705515B2
公开(公告)日：2020-07-07
申请号：US16417385
申请日：2019-05-20
申请人： Net-Inspect, LLC
发明人： Michael H S Dunlop
IPC分类号： G05B19/418 , G01B21/30
摘要： A system and method for performing manufacturing quality control with the aid of a digital computer are provided. A specification for manufacturing a part feature is maintained in a storage, the specification including a target value. Measurements for the feature on a plurality of parts manufactured in accordance with the specification using a manufacturing process are maintained in the storage. A score associated with the manufacturing process is calculated based on how close at least some of the measurements associated with the manufacturing process are to the target value. The score is displayed. A recommendation of at least one corrective action to the manufacturing process to remedy one or more causes of non-conformance that are associated with the score is provided, wherein the manufacturing process is changed based on the recommendation to remedy one or more of the causes for non-conformance.
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公开(公告)号：US20200096332A1
公开(公告)日：2020-03-26
申请号：US16362283
申请日：2019-03-22
发明人： Wei-Shan Hu , Dong Gui , Jang Jung Lee , Che-Liang Li , Duen-Huei Hou , Wen-Chung Liu
摘要： Embodiments disclosed herein relate generally to methods for measuring a characteristic of a substrate. In an embodiment, the method includes scanning over the substrate with a scanning probe microscope, the substrate having fins thereon, the scanning obtaining images showing respective fin top regions of the fins, the scanning probe microscope interacting with respective portions of sidewalls of the fins by a scanning probe oscillated during the scanning, selecting images obtained at a predetermined depth below the fin top regions to obtain a line edge profile of the fins, by a processor-based system, analyzing the line edge profile of the fins using power spectral density (PSD) method to obtain spatial frequency data of the line edge profile of the fins, and by the processor-based system, calculating line edge roughness of the fins based on the spatial frequency data.
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公开(公告)号：US20200071823A1
公开(公告)日：2020-03-05
申请号：US16114558
申请日：2018-08-28
发明人： Ying MA , Yixi TIAN , Shih Chang CHEN , Jin SUN , Rodolfo PEREZ , Stanley WU
IPC分类号： C23C16/458 , G01B21/30
摘要： The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.
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公开(公告)号：US10568563B2
公开(公告)日：2020-02-25
申请号：US15579680
申请日：2016-06-20
申请人： Conopco, Inc.
摘要： A device for measuring roughness and shine of hair, comprising a) a first area comprising an ascending gradient of shine, and b) a second area comprising an ascending gradient of roughness, wherein the first area is aligned to the second area, and wherein the ascending gradient of shine and the ascending gradient of texture are inverse to each other, and wherein the roughness is provided by a textured pattern which is textured to mimic hair.
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公开(公告)号：US10345102B2
公开(公告)日：2019-07-09
申请号：US15305222
申请日：2015-03-12
发明人： Hisayuki Saito
摘要： A method for evaluating warpage of a wafer, includes measuring the warpage of the wafer that is in a free state without suction and determining, from measured warpage data, a wafer warpage amount A between two points Q1 and Q2 and a wafer warpage amount B between two points R1 and R2, the points Q1 and Q2 being located on a straight line passing through an arbitrary point P in a wafer plane and a distance “a” away from the point P, the points R1 and R2 being located on the same straight line and a distance “b” away from the point P, the distance “b” differing from the distance “a”, calculating, from the wafer warpage amount A and the wafer warpage amount B, a difference in wafer warpage amount at the point P, and evaluating the warpage on the basis of the difference in wafer warpage amount.
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公开(公告)号：US10215560B2
公开(公告)日：2019-02-26
申请号：US14984670
申请日：2015-12-30
发明人： Laurent Hermans , Eric Delfosse , Frans Nijs , Francis Thissen , Johan De Greeve
摘要： A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
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