公开(公告)号：US5115292A

公开(公告)日：1992-05-19

申请号：US403296

申请日：1989-09-05

Applicant: Katsuhiko Takebe ,  Mizuho Doi ,  Hiroyasu Takehara ,  Satoshi Hiyama ,  Masanobu Urabe

Inventor： Katsuhiko Takebe ,  Mizuho Doi ,  Hiroyasu Takehara ,  Satoshi Hiyama ,  Masanobu Urabe

IPC: G01P15/08 ,  G01P15/12

CPC classification number: G01P15/123 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L2224/48091 ,  H01L2924/12032 ,  H01L2924/13091 ,  Y10S73/04

Abstract: This invention relates to a semiconductor sensor for detecting external physical forces, such as acceleration, contact pressures, air pressures, mechanical vibrations, etc. The semiconductor sensor according to this invention is characterized by the use of compound semiconductors of high piezoelectricity, such as GaAs, etc. Conventionally sensors of the cantilever type, diaphragm type, etc. are made of silicon. These prior art sensors have low detection sensitivity, and their characteristics tend to deteriorate. The sensor according to this invention is made of GaAs, which has high piezoelectricity and can retain good characteristics of the semiconductor even at high temperatures and includes a field-effect transistor formed on the GaAs for sensing a stress. The FET is driven by a constant current or a constant voltage so as to detect a change of an electrical characteristic (e.g., threshold characteristic) due to a stress. The structure of the sensor according to this invention enables the sizes of the sensors not only to be diminished but also to reduce the fabrication costs. When a stress is applied to the FET, the transconductance changes, and the temperature changes, consequently the I-V characteristic changes. An a.c. signal biased by a direct current is supplied to the gate of the FET, and a drain current is detected in an a.c. component and a d.c. component so as to detect a temperature concurrently with a detection of a stress.

公开(公告)号：US5095749A

公开(公告)日：1992-03-17

申请号：US526628

申请日：1990-05-22

Applicant: Richard A. Hanson

Inventor： Richard A. Hanson

IPC: G01P15/13

CPC classification number: G01P15/132 ,  G01P2015/0828

Abstract: Proofmass suspension assembly for use in accelerometers and the like. The assembly includes a support element, a responsive element mounted on the support element for response to an externally applied stimulation, a first crystal connected between the responsive element and the support element, a second crystal connected to one of the elements, and a compensation arm connected to the second crystal and to the other of said elements, whereby an externally applied stimulation will place one of the crystals in compression and the other of the crystals in compression. The compensation arm has a thermal expansion property such that any difference in thermal expansion between the responsive element and the first crystal produces translation but no rotation of the responsive element relative to the support element.

Abstract translation: 用于加速度计等的防震悬架组件。 组件包括支撑元件，安装在支撑元件上用于响应于外部施加的刺激的响应元件，连接在响应元件和支撑元件之间的第一晶体，连接到元件之一的第二晶体，以及补偿臂 连接到第二晶体和所述元件中的另一个，由此外部施加的刺激将使晶体中的一个被压缩，另一个晶体被压缩。 补偿臂具有热膨胀特性，使得响应元件和第一晶体之间的热膨胀的任何差异产生平移，但是响应元件相对于支撑元件没有旋转。

公开(公告)号：US5095401A

公开(公告)日：1992-03-10

申请号：US526166

申请日：1990-05-21

Applicant: Paul M. Zavracky ,  Richard H. Morrison, Jr.

Inventor： Paul M. Zavracky ,  Richard H. Morrison, Jr.

IPC: G01L9/00 ,  G01P15/08 ,  G01P15/12

CPC classification number: G01L9/0055 ,  G01L9/0042 ,  G01L9/0073 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828

Abstract: The present invention relates to the fabrication of diaphragm pressure sensors utilizing silicon-on-insulator technology where recrystallized silicon forms a diaphragm which incorporates electronic devices used in monitoring pressure. The diaphragm is alternatively comprised of a silicon nitride having the necessary mechanical properties with a recrystallized silicon layer positioned thereon to provide sensor electronics.

Abstract translation: 本发明涉及利用绝缘体上硅技术的隔膜压力传感器的制造，其中再结晶硅形成一个隔膜，其结合用于监测压力的电子装置。 隔膜可选地由具有必要的机械性能的氮化硅组成，其中重结晶硅层位于其上以提供传感器电子器件。

公开(公告)号：US4955233A

公开(公告)日：1990-09-11

申请号：US221116

申请日：1988-07-19

Applicant: Richard A. Hanson

Inventor： Richard A. Hanson

IPC: G01P15/09 ,  G01P15/12 ,  G01P15/125 ,  G01P15/13 ,  G01P15/16

CPC classification number: G01P15/132 ,  G01P2015/0828

Abstract: A pendulous assembly for use in an accelerometer or other such devices which senses forces acting on the device in a particular direction is disclosed herein. This assembly includes a proofmass and an arrangement supporting one end of the proofmass for pivotal movement back and forth about a given axis through a resting plane which entirely contains the proofmass when the latter is at rest. The support arrangement itself includes a frame, an isolation bridge or bridges, and an arrangement of isolation bridge and proofmass flexures for supporting the isolation bridges between the proofmass and frame.

Abstract translation: 本文公开了一种用于加速度计或其它这种感测在特定方向上作用在装置上的力的装置的下摆组件。 该组件包括校验物和支撑校准物的一端的装置，用于围绕给定的轴线来回旋转通过静止平面，当搁置平台在后者处于静止状态时完全包含校样物。 支撑装置本身包括框架，隔离桥或桥，以及用于支撑校样和框架之间的隔离桥的隔离桥和校正矩形挠曲的布置。

公开(公告)号：US4945765A

公开(公告)日：1990-08-07

申请号：US238662

申请日：1988-08-31

Applicant: Terry V. Roszhart

Inventor： Terry V. Roszhart

IPC: G01P15/12 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/13

CPC classification number: G01P15/13 ,  G01P15/0802 ,  G01P15/097 ,  G01P2015/0828 ,  Y10S73/01

Abstract: An inertial guidance accelerometer is formed as an integrated, monolithic, structure. Silicon micro-machining techniques are used to combine mechanical and electrical components of the device in a single crystal silicon wafer. The proof mass, flexible hinge, and resonator are formed by etching portions of a substrate, while the electrical circuits are monolithically integrated into the substrate using standard circuit integration techniques. The accelerometer includes a feedback control circuit for the resonator, as well as a digital-to-analog converter, for providing digital output signals indicative of the acceleration force applied to the device.

公开(公告)号：US4944184A

公开(公告)日：1990-07-31

申请号：US338808

申请日：1989-04-14

Applicant: Graeme A. Blake ,  Brian L. Norling ,  Mitchell J. Novack

Inventor： Graeme A. Blake ,  Brian L. Norling ,  Mitchell J. Novack

IPC: G01P15/02 ,  G01P15/125 ,  G01P15/13

CPC classification number: G01P15/125 ,  G01P15/132 ,  G01P2015/0828

Abstract: An improved accelerometer of the type that includes a proof mass suspended from a support by one or more flexures, such that the proof mass can pivot with respect to the support about a hinge axis. The proof mass includes a paddle attached to the flexures, the paddle having first and second paddle surfaces. The coil is mounted on the first paddle surface, and the accelerometer includes a stator for mounting the support and for forming a magnetic circuit with the coil. The improvement comprises positioning the flexures such that a plane containing the hinge axis and the center of mass of the proof mass is parallel to one of the paddle surfaces, and closer to one paddle surface than to the other paddle surface. In a preferred arrangement, the plane containing the hinge axis and the center of mass is approximately coplanar with one of the paddle surfaces and with the flexures.

Abstract translation: 一种改进的加速度计，其包括通过一个或多个挠曲件从支撑件悬挂的证明物质，使得证明物质可以围绕铰链轴线相对于支撑件枢转。 检测质量包括附接到挠曲件的桨叶，桨具有第一和第二桨叶表面。 线圈安装在第一桨表面上，并且加速度计包括用于安装支撑件并用于与线圈形成磁路的定子。 该改进包括定位弯曲部，使得包含铰链轴线的平面和检测质量块的质心平行于其中一个桨叶表面，并且比另一个桨叶表面更接近一个桨叶表面。 在优选的布置中，包含铰链轴线和质心的平面与桨形表面中的一个和挠曲件近似共面。

公开(公告)号：US4939935A

公开(公告)日：1990-07-10

申请号：US312753

申请日：1989-02-21

Applicant: Yvon Amand

Inventor： Yvon Amand

IPC: G01P1/00 ,  G01P15/08 ,  G01P15/09 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P1/006 ,  G01P15/0802 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10S73/01

Abstract: A low-cost pendular non-serviced accelerometer comprises a base, a pendular seismic mass connected to the base by a hinged connection for pivotal movement of the seismic mass about an axis along a sense direction perpendicular to the hinged connection and a sensor connecting the seismic mass to the base. The sensor comprises at least two vibrating beams of piezo-electric material, each connected to the base at an end thereof and to the seismic mass at the other end thereof, and each provided with electrodes for vibrating the respective beam at a tuning frequency thereof. The beams are directed orthogonally to the sense axis and are located symmetrically with respect to the seismic mass on both sides of the hinged connection, whereby any acceleration along the sense axis creates tractive stresses in one beam and compression stresses in the other beam. A circuit connected to the electrodes and is arranged for delivering a signal which is responsive to the difference between the resonant frequencies of the two beams when the seismic mass is subjected to an acceleration.

Abstract translation: 一种低成本的摆式非服务加速度计包括基座，通过铰接连接器连接到基座的摆锤地震质量，用于围绕围绕垂直于铰接连接的感测方向的轴线的震动块的枢转运动;以及连接地震 质量到基地。 传感器包括至少两个压电材料的振动梁，每个振动梁的一端连接到基座，另一端连接到地震块，并且每个设置有用于在其调谐频率处振动各个光束的电极。 梁与感测轴正交地定向并且相对于铰接连接的两侧上的地震质量对称地定位，由此沿着感测轴的任何加速度在一个梁中产生牵引应力并且在另一个梁中产生压缩应力。 连接到电极并且被布置成用于递送当地震质量受到加速时响应于两个光束的谐振频率之间的差的信号。

公开(公告)号：US4881408A

公开(公告)日：1989-11-21

申请号：US313289

申请日：1989-02-16

Applicant: Rand H. Hulsing, II ,  Rex B. Peters ,  Brian L. Norling

Inventor： Rand H. Hulsing, II ,  Rex B. Peters ,  Brian L. Norling

IPC: G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: A compact, low g range accelerometer comprising a support (22), a proof mass (20), flexures (24, 26) for mounting the proof mass to the support, and a force sensing element (40). The proof mass has a single rotational degree of freedom about a hinge axis (H) perpendicular to the accelerometer's sensitive axis (S). The force sensing element is positioned along a line that is normal to the hinge axis and that lies in a plane that is normal to the hinge axis and that passes through the center of gravity (46) of the proof mass. The perpendicular distance between the hinge axis and the force sensing element is less than the distance between the hinge axis and the center of the proof mass. The force sensing element may be parallel to the pendulous axis, to produce an extremely compact accelerometer, or may be oriented at an acute angle with respect to the pendulous axis, such that the line along which the force sensing element is positioned passes through the center of percussion of the proof mass.

Abstract translation: 一种紧凑的低g范围加速度计，包括支撑件（22），用于将证明物质安装到支撑件的检测质量块（20），挠曲件（24,26）以及力感测元件（40）。 相对于垂直于加速度传感器的敏感轴（S）的铰链轴（H），证明物质具有单一的旋转自由度。 力感测元件沿着垂直于铰链轴线的线定位，并且位于与铰链轴线垂直的平面中，并且穿过该质量块的重心（46）。 铰链轴和力感测元件之间的垂直距离小于铰链轴与检验质量中心之间的距离。 力感测元件可以平行于下摆轴线，以产生非常紧凑的加速度计，或者可以相对于下摆轴线以锐角定向，使得力感测元件所位于的线穿过中心 打击乐的质量。

公开(公告)号：US4848157A

公开(公告)日：1989-07-18

申请号：US122682

申请日：1987-11-18

Applicant: Toshihiro Kobayashi

Inventor： Toshihiro Kobayashi

IPC: G01P15/02 ,  G01P15/08 ,  G01P15/093 ,  G01P15/11 ,  G01P15/12

CPC classification number: G01P15/12 ,  G01P15/0802 ,  G01P15/093 ,  G01P15/11 ,  G01P2015/0828

Abstract: An acceleration detecting device which detects an acceleration and/or deceleration. The acceleration detecting device comprises a beam, supporting member supporting both ends of the beam, a weight for twisting the beam in response to an applied acceleration substantially provided at the center of said beam, and, a detector for detecting the amount of the twisting deformation of said beam. When the acceleration is applied to the detecting device, the beam is bent and deformed in proportion to level of the acceleration. The deformation of the beam is detected by the detector, and the signal according to the level of the acceleration is output from the detecter.

Abstract translation: 一种检测加速度和/或减速度的加速度检测装置。 加速度检测装置包括梁，支撑梁的两端的支撑构件，用于响应于基本上设置在所述梁的中心处的施加的加速度来扭转梁的重量，以及用于检测扭转变形量的检测器 的所述光束。 当对检测装置施加加速度时，梁与加速度的水平成比例地弯曲变形。 由检测器检测光束的变形，根据加速度的信号从检测器输出。

公开(公告)号：US4836025A

公开(公告)日：1989-06-06

申请号：US25713

申请日：1987-03-13

Applicant: Teruyoshi Mihara

Inventor： Teruyoshi Mihara

IPC: H01L29/84 ,  G01P15/08 ,  G01P15/12 ,  H01L27/20

CPC classification number: G01P15/0802 ,  G01P15/123 ,  H01L27/20 ,  G01P2015/0828

Abstract: First and second piezo reistances are disposed on a flexible member which supports a mass member on a semiconductor base and are arranged to be responsive to the amount of flexure thereof. The flexible member has a predetermined uniform thickness. Second and third piezo resistances are arranged on a separate compensation member which projects from the base. This member is subject to essentially no flexure and has exactly the same uniform thickness as the flexible one. The four piezo resistances are connected to define a bridge circuit the output of which is indicative of the force which induces the flexure of the flexible member.

Abstract translation: 第一和第二压电反射器设置在柔性构件上，该柔性构件支撑半导体基座上的质量构件并且被布置成响应于其挠曲量。 柔性构件具有预定均匀的厚度。 第二和第三压电电阻布置在从基座突出的单独的补偿构件上。 该构件基本上不受弯曲影响，并且具有与柔性部件完全相同的均匀厚度。 连接四个压电电阻以限定桥接电路，其输出表示引起柔性构件挠曲的力。