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251.发明授权
公开(公告)号：US5963327A
公开(公告)日：1999-10-05
申请号：US33694
申请日：1998-03-03
Applicant: Ping He , Blaine D. Johs , Craig M. Herzinger
Inventor： Ping He , Blaine D. Johs , Craig M. Herzinger
Abstract: Disclosed are laterally compact ellipsometer, polarimeter, reflectometer and the like material system investigating systems, and methods for their use. Input and output optical elements effect changes in orientation, (propagation direction), of a beam of electromagnetic radiation caused to pass therethrough by an essentially total internal reflection therein. In addition, a propagation direction diverted beam of electromagnetic radiation can be simultaneously, optionally, caused to have a phase retardation entered between orthogonal polarization components thereof by at least one of the input and output optical elements. The present invention enables relatively simple investigation of a sample system with a polarized beam of electromagnetic radiation which impinges thereupon at a less than Brewster Angle, small "spot" size effecting angle-of-incidence, with respect to a normal to a surface of an investigated material system.
Abstract translation: 公开了横向紧凑型椭圆计，偏振计，反射计等物质系统调查系统及其使用方法。 输入和输出光学元件通过其中基本上全内反射而影响通过其中的电磁辐射束的方向（传播方向）的变化。 此外，电磁辐射的传播方向转向光束可以同时被选择性地由输入和输出光学元件中的至少一个在其正交偏振分量之间输入相位延迟。 本发明使得能够相对简单地研究具有电磁辐射的偏振光束的样品系统，该偏振光束照射在小于布鲁斯特角度的小的“斑点”尺寸上，影响入射角小于相对于 调查材料系统。
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公开(公告)号：US5929995A
公开(公告)日：1999-07-27
申请号：US174885
申请日：1998-10-19
Applicant: Blaine D. Johs
Inventor： Blaine D. Johs
Abstract: Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a spectroscopic beam of electromagnetic radiation while maintaining significant sensitivity of both (PSI) and (DELTA) ellipsometric parameters to changes in surfaces of monitored sample systems, while minimizing sensitivity to changes in electromagnetic beam directing means orientation.
Abstract translation: 公开了一种电磁射束引导系统和方法，其能够改变电磁辐射分光束的传播方向，同时保持（PSI）和（DELTA）椭偏参数对被监测样品系统的表面的变化的显着灵敏度，同时使灵敏度最小化 电磁射束引导装置取向的变化。
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公开(公告)号：US5448351A
公开(公告)日：1995-09-05
申请号：US157034
申请日：1994-05-16
Applicant: Stefan Florek , Helmut Becker-Ross
Inventor： Stefan Florek , Helmut Becker-Ross
CPC classification number: G01J3/14 , G01J3/1809 , G01J2003/1208 , G01J2003/1286 , G01J2003/1828 , G01J3/22 , G01J3/2803
Abstract: An Echelle polychromator 50 has disposed upstream thereof a pre-monochromator 14 comprising a prism 20. The linear dispersion of the pre-monochromator 14 is variable by varying the angular dispersion of the prism 20. A particular spectral position and the close vicinity thereof are analyzed by an Echelle grating 54 with high resolution. Care must be taken that, on the one hand, the detector array 66 of the Echelle polychromator 50 is fully exploited in response to the central wavelength respectively observed and that, on the other hand, interfering orders are kept away from the Echelle polychromator 50. The linear dispersion of the pre-monochromator is variable for this purpose.
Abstract translation: PCT No.PCT / EP92 / 01270 Sec。 371日期1994年5月16日 102（e）日期1994年5月16日PCT提交1992年6月5日PCT公布。 WO92 / 21948 PCT公开 日期为1992年12月10日。一个梯形多色分光器50已经在其上方设置了包括棱镜20的预单色器14.预单色仪14的线性色散可通过改变棱镜20的角度色散而变化。特定光谱位置 并通过具有高分辨率的Echelle光栅54分析其附近。 必须注意的是，一方面，响应于分别观察到的中心波长，Echelle多色分光器50的检测器阵列66被充分利用，另一方面，干涉顺序被保留离开Echelle多色
调变换器50。 为了此目的，预单色仪的线性色散是可变的。-
公开(公告)号：US5198870A
公开(公告)日：1993-03-30
申请号：US697032
申请日：1991-05-08
Applicant: James W. Kronberg
Inventor： James W. Kronberg
CPC classification number: G01N21/69 , G01J3/14 , G01J3/2803
Abstract: Apparatus for isotopic analysis of hydrogen comprises a low pressure chamber into which a sample of hydrogen is introduced and then exposed to an electrical discharge to excite the electrons of the hydrogen atoms to higher energy states and thereby cause the emission of light on the return to lower energy states, a Fresnel prism made at least in part of a material anomalously dispersive to the wavelengths of interest for dispersing the emitted light, and a photodiode array for receiving the dispersed light. The light emitted by the sample is filtered to pass only the desired wavelengths, such as one of the lines of the Balmer series for hydrogen, the wavelengths of which differ slightly from one isotope to another. The output of the photodiode array is processed to determine the relative amounts of each isotope present in the sample. Additionally, the sample itself may be recovered using a metal hydride.
Abstract translation: 用于氢的同位素分析的装置包括低压室，氢气样本被引入其中，然后暴露于放电以将氢原子的电子激发到更高的能量状态，从而导致在返回时的光的发射降低 能量状态，菲涅尔棱镜至少部分地对于分散发射光的感兴趣的波长异常分散的材料制成，以及用于接收分散的光的光电二极管阵列。 样品发射的光被过滤以仅通过所需的波长，例如Balmer系列的一条用于氢的波长，其波长与一个同位素稍微不同。 处理光电二极管阵列的输出以确定样品中存在的每个同位素的相对量。 此外，样品本身可以使用金属氢化物回收。
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公开(公告)号：US4123161A
公开(公告)日：1978-10-31
申请号：US788578
申请日：1977-04-18
Applicant: George J. Pappas
Inventor： George J. Pappas
CPC classification number: G01J3/14 , G01J3/04 , G01J2003/2866
Abstract: Light is examined utilizing a wide slit and a dispersion means such as a prism to produce two pairs of diverging beams separated by an intermediate converging beam of white light. The light emerging from the dispersion means impinges upon a narrow slit situated between the dispersion means and a point at which the intermediate beam of white light converges. In a monochrometer, the first pair of diverging beams comprise red and yellow rays and emanate from one side of the dispersion means and the second pair of diverging beams comprises blue and violet rays and emanate from the other side of the dispersion means. A narrow slit located between the dispersion means and a point at which the intermediate white beam converges passes rays of a single color, either red, yellow, blue or violet, to a second dispersion means and light emerging from the second dispersion means impinges upon a means for measuring the dispersion of rays passing through the narrow slit with respect to a reference point. In the spectrometer, a narrow slit having a sufficient width to pass red and yellow rays while blocking blue and violet rays and vice versa is located between a dispersion means and a measuring means. The measured displacement of the rays provides a signature for the source of light illuminating the wide slit.
Abstract translation: 使用宽狭缝和诸如棱镜的分散装置来检查光，以产生由中间会聚的白光束分开的两对发散光束。 从分散装置出射的光照射在位于分散装置和白光中间束会聚的点之间的狭窄狭缝上。 在单色仪中，第一对发散光束包括红色和黄色光线，并从分散装置的一侧发出，第二对发散光束包括蓝色和紫色光线，并从分散装置的另一侧发出。 位于分散装置和中间白光束会聚的点之间的狭窄狭缝将单一颜色（红色，黄色，蓝色或紫色）的光线通过到第二分散装置，并且从第二色散装置出射的光照射到 用于测量相对于参考点通过窄狭缝的光线的色散的装置。 在光谱仪中，分散装置和测量装置之间设有窄的狭缝，该窄缝具有足够的宽度以通过红色和黄色光线同时阻挡蓝色和紫色光线，反之亦然。 所测量的射线位移为照亮宽狭缝的光源提供签名。
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Patent Agency Ranking
公开(公告)号：US4015130A
公开(公告)日：1977-03-29
申请号：US620375
申请日：1975-10-07
Applicant: Robert Joseph Landry , Robert G. Bostrom , Richard W. Peterson
Inventor： Robert Joseph Landry , Robert G. Bostrom , Richard W. Peterson
Abstract: A method and apparatus for monitoring optical radiation which, in a preferred embodiment, takes the form of a biologically weighted ultraviolet radiant energy monitor which provides a direct indication of the hazards to humans from the ultraviolet radiant energy emanating from the optical radiation source being monitored. The source of radiation is first spectrally dispersed by passage through a suitable prism or diffraction grating. Portions of the spectrally dispersed radiation are mechanically masked in accordance with a predetermined biological weighting. The subsequent weighted output from the mechanical mask is then fed to a suitable detector. In the various embodiments of the ultraviolet hazard monitor, a quartz prism or diffraction grating spectrograph is utilized to spectrally disperse the incident radiation spatially and a plate coated with sodium salicylate or other suitable converter is placed in the exit plane of the spectrograph. The sodium salicylate plate fluoresces in the blue in response to incident ultraviolet radiation. The intensity of the biologically weighted blue light may then be conveniently and readily detected by a blue sensitive detector to provide an immediate readout of the potential ultraviolet radiation hazard from the unknown optical source.
Abstract translation: 一种用于监测光辐射的方法和装置，其在优选实施例中采取生物加权的紫外辐射能量监测器的形式，其提供从被监测的光辐射源发出的紫外线辐射能对人类的危害的直接指示。 辐射源首先通过合适的棱镜或衍射光栅进行光谱分散。 根据预定的生物加权机械地掩蔽光谱分散辐射的部分。 然后将来自机械掩模的随后的加权输出馈送到合适的检测器。 在紫外线危害监测器的各种实施例中，使用石英棱镜或衍射光栅光谱仪在空间上光谱地分散入射辐射，并且将涂有水杨酸钠或其它合适的转化器的板放置在光谱仪的出射平面中。 水杨酸钠板响应于入射的紫外线辐射而呈蓝色荧光。 然后可以方便地并且容易地通过蓝色敏感检测器检测生物重量的蓝光的强度，以便从未知光源立即读出潜在的紫外线辐射危害。
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公开(公告)号：US4012147A
公开(公告)日：1977-03-15
申请号：US521178
申请日：1974-11-06
Applicant: George Edouard Walrafen
Inventor： George Edouard Walrafen
CPC classification number: G01J3/14 , G01J3/02 , G01J3/0208 , G01J3/0221 , G01J2003/0281
Abstract: The use of an optical fiber for providing a point source of radiation at the entrance of a spectrometer obviates the necessity for an entrance slit at the input end of the device. Improved optical imaging at decreased expense is achieved.
Abstract translation: 在光谱仪的入口处使用用于提供辐射点的光纤消除了在设备的输入端处进入狭缝的必要性。 实现了降低成本的改进的光学成像。
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公开(公告)号：US3900263A
公开(公告)日：1975-08-19
申请号：US43084774
申请日：1974-01-04
Applicant: HALL JR JOSEPH F
Inventor： HALL JR JOSEPH F
CPC classification number: G01J3/14
Abstract: Light is disbursed such that its wave length components are displaced approximately as a linear function of wave length by subtracting deviation which is non-linear in one manner from deviation which is non-linear in another manner. By altering degree of deviation and by selecting the manner of non-linearity in deviation, a composite deviation results which when graphed against wave length appears as an undulation about a straight line of relatively high slope. The graph crosses the straight line at one point more than the number of non-linear deviation curves that are contained in composite graph when the composite is formed by alternate addition and subtraction of such deviation. The method may be practiced by arranging a number of prisms in series so that deviation is alternately added and subtracted. Prism composition is changed to achieve different non-linear characteristics.
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公开(公告)号：US3645630A
公开(公告)日：1972-02-29
申请号：US3645630D
申请日：1968-01-22
Applicant: HARRY S NEWCOMER
Inventor： NEWCOMER HARRY S
IPC: G01J3/14
CPC classification number: G01J3/14
Abstract: This compact monochromator employs two concave collimating mirrors of different sizes mounted off-axis adjacent one another edge-to-edge in such a manner that the central ray of the larger dispersed light collimating mirror makes a larger acute angle relatively to the entrance face of the dispersing prism array than the central ray of the incident-light collimating mirror makes thereto. This insures that the collimating mirrors cover the full aperture of the dispersing prism array yet at the same time obtains the most compact monochromator housing. Incident light from a light source is transmitted through an entrance slit at one side of the monochromator and reflected by an incidentlight reflector to the smaller incident-light collimating mirror, whereas dispersed light from the larger dispersed-light collimating mirror is reflected by a dispersed-light reflector through an exit slit at the opposite side of the monochromator.
Abstract translation: 这种紧凑型单色仪采用两种不同尺寸的凹入准直反射镜，其以相对于另一边缘到边缘的偏轴方式安装，使得较大分散的光准直反射镜的中心射线相对于入射面相对较大的锐角 分散棱镜阵列比入射光准直反射镜的中心线对其进行。 这确保准直镜覆盖分散棱镜阵列的全部孔径，同时获得最紧凑的单色仪外壳。 来自光源的入射光通过单色仪一侧的入口狭缝透射，并被入射光反射器反射到较小的入射光准直反射镜，而来自较大分散光准直镜的分散光则被 分散光反射器通过在单色仪的相对侧的出口狭缝。
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公开(公告)号：US3454338A
公开(公告)日：1969-07-08
申请号：US3454338D
申请日：1966-02-07
Applicant: ONERA (OFF NAT AEROSPATIALE)
Inventor： GIRARD ANDRE J , BERNY JEAN G
CPC classification number: G01J3/18 , G01J3/0208 , G01J3/0229 , G01J3/14 , G01J3/433 , G01J3/453
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