Apparatus for conveying substrates
    21.
    发明授权
    Apparatus for conveying substrates 有权
    用于输送基材的设备

    公开(公告)号:US07042553B2

    公开(公告)日:2006-05-09

    申请号:US10861006

    申请日:2004-06-04

    CPC classification number: G03B27/58 Y10S414/137 Y10S414/14

    Abstract: Disclosed herein is an apparatus for conveying substrates, which is capable of efficiently conveying large substrates and has a function to temporarily store the substrate in a buffer unit. The apparatus includes a substrate support unit, a conveying unit, and the buffer unit. The substrate support unit supports the substrate thereon. The conveying unit sequentially conveys the substrate support unit to a plurality of processing units. The buffer unit is provided at a predetermined portion of the conveying unit to move the substrate support unit upward away from the conveying unit in a vertical direction, thus temporarily storing the substrate support unit therein while spacing the substrate support unit apart from the conveying unit. The substrate conveying apparatus thus efficiently conveys the substrates, regardless of sizes of the substrates, while temporarily storing the substrates to buffer a difference in the processing time.

    Abstract translation: 本文公开了一种用于输送基板的装置,其能够有效地输送大的基板,并且具有将基板临时存储在缓冲单元中的功能。 该装置包括基板支撑单元,输送单元和缓冲单元。 基板支撑单元在其上支撑基板。 传送单元将基板支撑单元顺序地传送到多个处理单元。 缓冲单元设置在输送单元的预定部分处,以使基板支撑单元沿垂直方向向上移动远离输送单元,从而将基板支撑单元临时存储在其中,同时将基板支撑单元与输送单元隔开。 因此,基板输送装置无论基板的尺寸如何有效地传送基板,同时临时存储基板以缓冲处理时间的差异。

    Apparatus of stocking substrates
    23.
    发明申请
    Apparatus of stocking substrates 审中-公开
    放置基材的装置

    公开(公告)号:US20050105992A1

    公开(公告)日:2005-05-19

    申请号:US10960869

    申请日:2004-10-07

    CPC classification number: H01L21/6734 H01L21/67769

    Abstract: A substrate stocking apparatus is provided, which includes: a plurality of stockers, each stocker including a plurality of shelf plates that includes a plurality of supporting pins supporting the substrate and a plurality of vertical frames fixing and connecting the shelf plates; and an indexer taking a substrate into and out of the stockers.

    Abstract translation: 本发明提供一种基板放置装置,其特征在于,包括:多个储料器,每个储料器包括多个搁板,所述多个搁板包括支撑所述基板的多个支撑销和固定并连接所述搁板的多个垂直框架; 以及将基材取入和离开储料器的分度器。

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