公开(公告)号：US20060044677A1

公开(公告)日：2006-03-02

申请号：US10886284

申请日：2004-07-07

申请人： Donghong Li ,  Yoshitaka Sasaki

发明人： Donghong Li ,  Yoshitaka Sasaki

IPC分类号： G11B5/187 ,  G11B5/127 ,  G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A main pole layer is deposited within an opening in a patterned photoresist layer on a substrate. The photoresist is thinned to expose an upper portion of a pole tip region that is then trimmed to a rectangular shape while a lower portion retains an inverted trapezoidal shape. Thereafter, a second trimming process forms a pole tip with a first width in the upper rectangular portion and a second thickness and second width which is less than the first width in the lower portion. A CMP step subsequently thins the upper portion to a first thickness of 0.04 to 0.08 microns while the second thickness remains at 0.16 to 0.32 microns. The bottom surface of the lower portion along the ABS becomes the trailing edge in a recording operation. The pole tip has a consistent first width (track width) that is not influenced by CMP process variations.

摘要翻译： 主极层沉积在衬底上的图案化光致抗蚀剂层的开口内。 光致抗蚀剂变薄以暴露极尖区域的上部，然后将其修剪成矩形，而下部保持倒梯形形状。 此后，第二修整处理在上部矩形部分中形成具有第一宽度的极尖，并且在下部形成小于第一宽度的第二厚度和第二宽度。 CMP步骤随后将上部部分变薄至0.04至0.08微米的第一厚度，而第二厚度保持在0.16至0.32微米。 沿着ABS的下部的底面在记录操作中成为后缘。 极尖具有不受CMP工艺变化影响的一致的第一宽度（轨道宽度）。

公开(公告)号：US08533937B1

公开(公告)日：2013-09-17

申请号：US13275926

申请日：2011-10-18

申请人： Jinwen Wang ,  Weimin Si ,  Jianxin Fang ,  Ying Hong ,  Hongzhou Jiang ,  Ching-Huang Lu ,  Yan Chen ,  Donghong Li ,  Lien-Chang Wang ,  Lieping Zhong ,  Tao Pan

发明人： Jinwen Wang ,  Weimin Si ,  Jianxin Fang ,  Ying Hong ,  Hongzhou Jiang ,  Ching-Huang Lu ,  Yan Chen ,  Donghong Li ,  Lien-Chang Wang ,  Lieping Zhong ,  Tao Pan

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/112 ,  G11B5/1276 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3153 ,  G11B5/3163 ,  H04R31/00 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method or forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.

摘要翻译： 公开了一种方法或形成缠绕的屏蔽垂直磁记录写入极。 提供了包括引导屏蔽层和设置在引导屏蔽层之上的中间层的结构，所述中间层包括极材料和电介质材料。 在电介质材料中形成沟槽。 通过离子束蚀刻工艺去除沟槽中的非磁性层。 种子层沉积在沟槽中并在极材料上方。 包含侧屏蔽层的磁性材料沉积在籽晶层的至少一部分上。

公开(公告)号：US20120216378A1

公开(公告)日：2012-08-30

申请号：US13460190

申请日：2012-04-30

申请人： Nathan C. Emley ,  Donghong Li ,  Prakash Mani

发明人： Nathan C. Emley ,  Donghong Li ,  Prakash Mani

IPC分类号： H01L41/22

CPC分类号： H01L41/27 ,  H01L41/083 ,  H01L41/273 ,  H01L41/277 ,  H01L41/293 ,  H01L41/297 ,  H01L41/314 ,  H01L41/332 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49147 ,  Y10T29/49155 ,  Y10T29/49165

摘要： A method and system for fabricating a piezoelectric multilayer are described. The method and system include providing conductive layers. Alternating conductive layers are electrically connected. A first plurality of alternating conductive layers is electrically isolated from a second plurality of alternating conductive layers. Piezoelectric layers are interleaved with the conductive layers. Apertures are provided in the piezoelectric layers. A first conductive plug electrically connects the first plurality of alternating conductive layers, includes a first plurality of segments, and is in apertures in the piezoelectric layers. Each of the first plurality of segments extends through one of the piezoelectric layers. A second conductive plug electrically connects the second plurality of alternating conductive layers, includes a second plurality of segments, and is in a second portion of the plurality of apertures. Each of the second plurality of segments extends through one of the plurality of piezoelectric layers.

摘要翻译： 描述了一种用于制造压电多层的方法和系统。 该方法和系统包括提供导电层。 交替导电层电连接。 第一多个交替导电层与第二多个交替导电层电隔离。 压电层与导电层交错。 在压电层中设置孔径。 第一导电插塞电连接第一多个交替导电层，包括第一多个段，并且在压电层中的孔中。 第一多个段中的每一个延伸穿过压电层中的一个。 第二导电插塞电连接第二多个交替导电层，包括第二多个段，并且在多个孔的第二部分中。 第二多个段中的每一个延伸穿过多个压电层中的一个。