公开(公告)号：US20110204999A1

公开(公告)日：2011-08-25

申请号：US13123719

申请日：2009-10-13

Applicant: Kim Phan Le ,  Jozef T. M. Van Beek

Inventor： Kim Phan Le ,  Jozef T. M. Van Beek

IPC: H03H9/24

CPC classification number: H03H9/02259 ,  H03H9/2431 ,  H03H2009/02307 ,  H03H2009/02354 ,  H03H2009/02496

Abstract: A novel Si MEMS piezoresistive resonator is described. The resonator has a shape of a frame, such as a ring or a polygon frame, which has two or more anchors. Electrodes located at the outer or inner rim of the resonant structure are used to excite the structure electrostatically into resonance with a desired mode shape. One or plurality of locally doped regions on the structure is used for piezoresistive readout of the signal. In the most preferred embodiments, the structure is a ring, which has four anchors, two electrodes and four piezoresistive regions at different segments of the structure. The piezoresistive regions are alternatively located at the outer rim and inner rim of the structure in such a way that the piezoresistive signals of the same sign from different regions can be collected. Advantages of this device are large readout signal, large electrode area, robustness, suppressed out-of-plane vibration and larger usable linear range.

Abstract translation: 描述了一种新颖的Si MEMS压阻谐振器。 谐振器具有诸如环或多边形框架的框架的形状，其具有两个或更多个锚定件。 位于谐振结构的外边缘或内边缘处的电极用于以静电激励结构以期望的模式形状的谐振。 结构上的一个或多个局部掺杂区域用于信号的压阻读出。 在最优选的实施例中，该结构是环，其在结构的不同部分具有四个锚固件，两个电极和四个压阻区域。 压阻区域可替代地位于结构的外边缘和内边缘处，使得可以收集来自不同区域的相同符号的压阻信号。 该装置的优点是大的读出信号，大的电极面积，鲁棒性，抑制的平面外振动和较大的可用的线性范围。

公开(公告)号：US20110168874A1

公开(公告)日：2011-07-14

申请号：US13120212

申请日：2009-09-16

Applicant: Kim Phan Le

Inventor： Kim Phan Le

IPC: G01J1/42

CPC classification number: G01S7/4811 ,  G01S7/4813 ,  G01S17/88 ,  G06F3/0304 ,  G06F3/0338 ,  G06F3/03548

Abstract: The present invention relates to a detection system for the detection of movements of a movable object. The detection system may comprises: a light emitting device (S) for emitting light, a reflecting unit (5) being arranged in functional connection with the movable object and being adapted for reflecting the emitted light, a plurality of detectors (D1 to D4) for detecting the reflected light and outputting detection signals for determining a movement of the movable object. When reflecting the emitted light, the reflecting unit causes a light spot to be incident on the plurality of detectors, and the plurality of detectors are arranged in a predetermined manner so as to be located completely inside the light spot irrespective of any movement of the movable object. The present invention further relates to a method of detecting movements of the movable object, and an IC having implemented therein the detection system.

Abstract translation: 本发明涉及一种用于检测可移动物体的移动的检测系统。 检测系统可以包括：用于发射光的发光装置（S），与可移动物体功能性连接并且适于反射发射光的反射单元（5），多个检测器（D1至D4） 用于检测反射光并输出用于确定可移动物体的移动的检测信号。 当反射发射的光时，反射单元使得光点入射到多个检测器上，并且多个检测器以预定的方式布置，以便完全位于光斑内部，而不管可移动的任何运动 目的。 本发明还涉及一种检测可移动物体的移动的方法，以及在其中实施了检测系统的IC。

公开(公告)号：US20100277262A1

公开(公告)日：2010-11-04

申请号：US12743355

申请日：2008-11-12

Applicant: Kim Phan Le ,  Jozef T. M. Van Beek

Inventor： Kim Phan Le ,  Jozef T. M. Van Beek

IPC: H01P7/00

CPC classification number: H03H9/02244 ,  H03H9/02259 ,  H03H9/2463 ,  H03H9/505 ,  H03H2009/02496 ,  H03H2009/2442

Abstract: A resonator comprises a resonator mass (34), a first connector (30) on a first side of the mass connected between the resonator mass and a first fixed mounting and a second connector (32) on a second, opposite, side of the mass connected between the resonator mass and a second fixed mounting. Drive means drives the mass (34) into a resonant mode in which it oscillates in a sideways direction, thereby compressing one of the first and second connectors while extending the other of the first and second connectors.

Abstract translation: 谐振器包括谐振器块（34），连接在谐振器块与第一固定安装件之间的质量第一侧的第一连接器（30）和质量的第二相对侧上的第二连接器（32） 连接在谐振器质量块和第二固定安装件之间。 驱动装置驱动质量块（34）进入谐振模式，其中它在侧向振荡，从而压缩第一和第二连接器中的一个，同时延伸第一和第二连接器中的另一个。

公开(公告)号：US20100154553A1

公开(公告)日：2010-06-24

申请号：US12601077

申请日：2008-06-04

Applicant: Kim Phan Le ,  Jozef T. M. Van Beek

Inventor： Kim Phan Le ,  Jozef T. M. Van Beek

IPC: G01L9/06 ,  G01L9/12

CPC classification number: G01L21/22 ,  G01L9/0022 ,  H03H9/02259 ,  H03H9/2452 ,  H03H2009/02496

Abstract: A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (8), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (8), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal (82) or a reading (94) of the sense current (22), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator (62) may be located in the vicinity of the resonator (8) for compensating purposes.

Abstract translation: 一种压力/真空传感器和方法，包括：将MEMS压阻谐振器（8）驱动到共振振动中，对谐振器（8）施加焦耳加热; 以及感测响应谐振频率（fo）的趋势而变化的可变参数取决于谐振器（8）的温度，其温度取决于压力。 可变参数可以是谐振器（8）的谐振频率或其中的变化，或者可以从反馈回路导出，例如时间积分反馈信号（82）或感测电流的读数（94） （22），保持谐振频率与上述趋势相反的环路的回路。 参考MEMS电容谐振器（62）可以位于谐振器（8）附近用于补偿目的。

公开(公告)号：US20080258722A1

公开(公告)日：2008-10-23

申请号：US11576141

申请日：2005-09-21

Applicant: Hans Zon ,  Jaap Ruigrok ,  Jan Cornelis Hoeven ,  Kim Phan Le

Inventor： Hans Zon ,  Jaap Ruigrok ,  Jan Cornelis Hoeven ,  Kim Phan Le

IPC: G01R33/025

CPC classification number: G01D5/147 ,  G01R33/09 ,  G01R33/096 ,  G05G9/047 ,  G05G2009/04729 ,  G05G2009/04755 ,  G06F3/0338

Abstract: Consistent with an example embodiment, devices comprise sensor arrangements with field detectors for detecting components of magnetic fields in planes of the field detectors. The sensor arrangements further include movable objects for, in response to tilting movements, changing at least parts of the components of the magnetic fields in the planes of the field detectors so that the sensor arrangements are made less sensitive to in-plane stray fields by providing the field detectors with saturated field-dependent elements. The movable object may comprise a movable field generator for generating the magnetic field, or the movable object and the field generator may be different objects. The magnetic field is such that the field-dependent element is saturated. The field generator is smaller than the field detector, and the movable object is larger than the field detector, to reduce alignment problems. The movable object has a pivoting point close to the field detector.

Abstract translation: 与示例性实施例一致，设备包括具有用于检测场检测器的平面中的磁场分量的场检测器的传感器装置。 传感器装置还包括可移动物体，用于响应于倾斜运动，改变场检测器的平面中的磁场的分量的至少一部分，使得传感器装置对平面内杂散场的敏感度较低，提供 具有饱和场相关元件的场检测器。 可移动物体可以包括用于产生磁场的可移动场发生器，或者可移动物体和场发生器可以是不同的物体。 磁场使得场依赖元件饱和。 场发生器小于场检测器，可移动物体大于场检测器，以减少对准问题。 可移动物体具有靠近场检测器的枢转点。

公开(公告)号：US20080202241A1

公开(公告)日：2008-08-28

申请号：US11910972

申请日：2006-04-06

Applicant: Kim Phan Le

Inventor： Kim Phan Le

IPC: G01P15/11 ,  G01P15/18

CPC classification number: G01D5/145 ,  G01P15/105 ,  G01P15/18

Abstract: Devices (1) are provided with sensor arrangements (2) comprising field generators (10) for generating magnetic fields and first/second/third field detectors (11,12,13) comprising first/second/third elements (R1-R4, S1-S4, T1-T4) for detecting first/second/third components of the magnetic fields in a plane and movable objects (14) for, in response to first/second/third accelerations of the movable objects (14) in first/second/third directions, changing the first/second/third components of the magnetic fields (11,12,13) is more sensitive to the first (second, third) acceleration than to the other accelerations. Such devices (1) have a good sensitivity and a good linearity. The elements (R1-R4, S1-S4, T1-T4) form part of bridges. The first elements (R1-R4) surround the second and third elements (S1-S4, T1-T4), or vice versa. The first elements (R1-R4) may be in round or rectangular form and the second and third elements (S1-S4, T1-T4) may be in the form of sun beams leaving a sun. The first elements are non-saturated barberpole magnetoresistive elements measuring the field strength which varies in response to accelerations in a direction perpendicular to the plane. The second and third elements are saturated barberpole magnetoresistive elements measuring changes in the direction of the magnetic field in response to accelerations in directions parallel to the plane.

Abstract translation: 设备（1）设置有包括用于产生磁场的场发生器（10）和包括第一/第二/第三元件（R 1 -R 4）的第一/第二/第三场检测器（11,12,13）的传感器装置（2） ，S 1 -S 4，T 1 -T 4），用于响应于可移动物体的第一/第二/第三加速度来检测平面中的磁场的第一/第二/第三分量和可移动物体（14） 在第一/第二/第三方向上，改变磁场（11,12,13）的第一/第二/第三分量比对其它加速度对第一（第二，第三）加速度更敏感。 这种装置（1）具有良好的灵敏度和良好的线性度。 元件（R 1 -R 4，S 1 -S 4，T 1 -T 4）构成桥的一部分。 第一元件（R 1 -R 4）围绕第二和第三元件（S 1 -S 4，T 1 -T 4），反之亦然。 第一元件（R 1 -R 4）可以是圆形或矩形形式，并且第二和第三元件（S 1 -S 4，T 1 -T 4）可以是太阳光束离开太阳的形式。 第一元件是测量场强度的非饱和的barberpole磁阻元件，该场强响应垂直于该平面的方向的加速度而变化。 第二和第三元件是饱和的barberpole磁阻元件，其响应于平行于平面的方向的加速度来测量磁场方向的变化。

公开(公告)号：US20080184799A1

公开(公告)日：2008-08-07

申请号：US11911669

申请日：2006-04-13

Applicant: Kim Phan Le ,  Hans Van Zon

Inventor： Kim Phan Le ,  Hans Van Zon

IPC: G01P15/11

CPC classification number: G01P15/18 ,  G01P15/105 ,  G01P15/11

Abstract: Devices (40) are provided with sensor arrangements (41) comprising field generators (42) for generating magnetic fields, field detectors (43) comprising magnetic field dependent elements (51-58) for detecting components of the magnetic fields in planes of the elements (51-58), and movable objects (44) for, in response to accelerations of the movable objects (44) parallel to the planes, changing the components of the magnetic fields. Length axes of the magnetic field dependent elements (51-58) make angles between minus 80 degrees and plus 80 degrees with the components to be detected. Means for forcing the movable objects (44) into rest positions comprise elastic material (59) or fixed objects (46) whereby one of the objects (44,46) comprises the field generator (42) and the other comprises magnetic material or a further field generator (50).

Abstract translation: 设备（40）设置有包括用于产生磁场的场发生器（42）的传感器装置（41），包括磁场相关元件（51-58）的场检测器（43），用于检测元件平面中的磁场的分量 （51-58）和可移动物体（44），用于响应于平行于平面的可移动物体（44）的加速度，改变磁场的分量。 磁场相关元件（51-58）的长轴与零件之间的角度在零下80度和正80度之间。 用于迫使可移动物体（44）进入静止位置的装置包括弹性材料（59）或固定物体（46），由此物体（44,46）中的一个包括场发生器（42），另一个包括磁性材料或另外 场发生器（50）。

公开(公告)号：US09001041B2

公开(公告)日：2015-04-07

申请号：US13165597

申请日：2011-06-21

Applicant: Kim Phan Le

Inventor： Kim Phan Le

IPC: G06F3/033 ,  G06F3/0338 ,  G06F3/03 ,  G06F3/038

CPC classification number: G06F3/0338 ,  G06F3/0304 ,  G06F3/038

Abstract: The present invention concerns a detection system and a corresponding method for detecting movements of a movable object that compensate for unintentional tilt movement of the movable object in a first direction and/or in a second direction when a linear movement in a third direction is detected.

Abstract translation: 本发明涉及一种用于检测可移动物体的运动的检测系统和相应方法，当检测到沿第三方向的线性运动时，可移动物体的运动在第一方向和/或第二方向上补偿可动物体的无意倾斜运动。

公开(公告)号：US08822903B2

公开(公告)日：2014-09-02

申请号：US13120212

申请日：2009-09-16

Applicant: Kim Phan Le

Inventor： Kim Phan Le

IPC: G06F3/033 ,  G06F3/042 ,  G01S7/48 ,  G01S17/88 ,  G06F3/03 ,  G06F3/0354 ,  G01S7/481 ,  G06F3/0338

CPC classification number: G01S7/4811 ,  G01S7/4813 ,  G01S17/88 ,  G06F3/0304 ,  G06F3/0338 ,  G06F3/03548

Abstract: The present invention relates to a detection system for the detection of movements of a movable object. The detection system may comprises: a light emitting device (S) for emitting light, a reflecting unit (5) being arranged in functional connection with the movable object and being adapted for reflecting the emitted light, a plurality of detectors (D1 to D4) for detecting the reflected light and outputting detection signals for determining a movement of the movable object. When reflecting the emitted light, the reflecting unit causes a light spot to be incident on the plurality of detectors, and the plurality of detectors are arranged in a predetermined manner so as to be located completely inside the light spot irrespective of any movement of the movable object. The present invention further relates to a method of detecting movements of the movable object, and an IC having implemented therein the detection system.

Abstract translation: 本发明涉及一种用于检测可移动物体的移动的检测系统。 检测系统可以包括：用于发射光的发光装置（S），与可移动物体功能性连接并且适于反射发射光的反射单元（5），多个检测器（D1至D4） 用于检测反射光并输出用于确定可移动物体的移动的检测信号。 当反射发射的光时，反射单元使得光点入射到多个检测器上，并且多个检测器以预定的方式布置，以便完全位于光斑内部，而不管可移动的任何运动 目的。 本发明还涉及一种检测可移动物体的移动的方法，以及在其中实施了检测系统的IC。

公开(公告)号：US08803623B2

公开(公告)日：2014-08-12

申请号：US13446398

申请日：2012-04-13

Applicant: Kim Phan Le ,  Peter Gerard Steeneken ,  Jozef Thomas Martinus Van Beek

Inventor： Kim Phan Le ,  Peter Gerard Steeneken ,  Jozef Thomas Martinus Van Beek

IPC: H03B5/32 ,  H01L41/047 ,  H03H9/13 ,  H03H9/52

CPC classification number: H03H9/02448 ,  H03H9/02259 ,  H03H9/2426 ,  H03H2009/02496

Abstract: A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.

Abstract translation: MEMS谐振器具有提供与换能间隙相关联的电容的元件，该电容具有温度相关的介电特性，其在与谐振器材料的杨氏模量相同的方向（即斜率具有相同的符号）上变化， 温度。 这意味着谐振频率较少依赖于温度。