公开(公告)号：US20070125770A1

公开(公告)日：2007-06-07

申请号：US11555940

申请日：2006-11-02

Applicant: Maki HAMAGUCHI

Inventor： Maki HAMAGUCHI

IPC: H05B6/26 ,  H05B6/10

CPC classification number: H05B6/26

Abstract: Disclosed herein is a heating apparatus designed to heat an object to be heated through induction heat generation of a heat generating part made of glasslike carbon, and that can rapidly raise or lower the temperature without contamination of the object which has a large area and is formed into a shape of a substrate such as a silicon wafer. The heating apparatus includes a heating container for receiving the object. The container is constructed such that at least a portion of the container formed into a shape of a plate is made of glasslike carbon, and that the portion of the container serves as a heat generating part. A high-frequency plate-shaped coil is disposed at the outside of the container while the coil is adjacent and is opposed to the heat generating part of the container, and which is wound approximately into a shape of a plate. The heating apparatus further includes a container-inside gas atmosphere control means for controlling the inside of the container to be maintained at a predetermined gas atmosphere. When electric current is supplied to the coil, heat is generated from the heat generating part through induction heat generation of the heat generating part, whereby the object is heated.

Abstract translation: 这里公开了一种加热装置，其被设计用于通过由玻璃状碳制成的发热部件的感应发热来加热待加热物体，并且可以快速升高或降低温度，而不会污染具有大面积的物体并形成 成为诸如硅晶片的基板的形状。 加热装置包括用于接收物体的加热容器。 容器被构造成使得形成为板状的容器的至少一部分由玻璃状碳制成，并且容器的该部分用作发热部分。 高频板状线圈设置在容器的外侧，同时线圈相邻并且与容器的发热部相对，并且被卷绕成大致为板状。 加热装置还包括用于控制容器内部保持在预定气体气氛的容器内气体气氛控制装置。 当向线圈供给电流时，通过发热部的感应发热从发热部产生热量，由此物体被加热。

公开(公告)号：US07198848B2

公开(公告)日：2007-04-03

申请号：US11055978

申请日：2005-02-14

Applicant: Maki Hamaguchi ,  Takayasu Fujiura

Inventor： Maki Hamaguchi ,  Takayasu Fujiura

IPC: B32B9/00

CPC classification number: C04B35/524 ,  C04B2235/48 ,  C04B2235/602 ,  C04B2235/608 ,  Y10T428/30 ,  Y10T428/315

Abstract: A two-phase glass-like carbon member has, in combination, a porous glass-like carbon base, and a dense glass-like carbon surface layer formed on the porous glass-like carbon base. The porous glass-like carbon base can be formed in a large thickness. The dense glass-like carbon surface layer is superior to the porous glass-like carbon base in gas impermeability, surface hardness and resistance to dusting. The dense glass-like carbon surface layer supplements disadvantages of the porous glass-like carbon base. The two-phase glass-like carbon member can be in a large thickness exceeding 5 mm and in a complicated shape.

Abstract translation: 两相玻璃状碳体组合有多孔玻璃状碳基，多孔玻璃状碳基上形成致密玻璃状碳表面层。 多孔玻璃状碳基可以形成为大的厚度。 致密的玻璃状碳表层在气体不透性，表面硬度和耐粉尘性方面优于多孔玻璃状碳基。 致密的玻璃状碳表面层补充了多孔玻璃状碳基的缺点。 两相玻璃状碳构件的厚度可以超过5mm，形状复杂。

公开(公告)号：US20050230859A1

公开(公告)日：2005-10-20

申请号：US11077254

申请日：2005-03-11

Applicant: Maki Hamaguchi ,  Takayasu Fujiura ,  Keiji Kishimoto

Inventor： Maki Hamaguchi ,  Takayasu Fujiura ,  Keiji Kishimoto

IPC: B29C53/08 ,  B32B1/08 ,  C01B31/02 ,  C04B35/524 ,  F16L9/10 ,  F16L49/04 ,  F16L49/06

CPC classification number: C04B35/524 ,  B29C53/083 ,  C04B2235/48 ,  C04B2235/602 ,  C04B2235/94 ,  F16L9/10 ,  F16L49/04 ,  F16L49/06 ,  Y10T428/131

Abstract: Provided is a process for producing a glass-like carbon deformed molded article having a deformed section (typically, an elliptical section or a section composed of partial circles and linear portions), such as a glass-like carbon member in a deformed pipe form or a bent pipe, with relative ease and a good dimensional accuracy. The process comprises the step of molding a thermosetting resin to yield a thermosetting resin molded article, the step of deforming the thermosetting resin molded article plastically in the state that the article is heated, so as to yield a thermosetting resin deformed article, and the step of carbonizing the resultant thermosetting resin deformed article.

Abstract translation: 提供了一种具有变形部分（通常为椭圆形部分或部分圆形和直线部分的部分）的玻璃状碳变形模制品的制造方法，例如变形的管形式的玻璃状碳部件或 弯管，相对容易，尺寸精度好。 该方法包括将热固性树脂成型以产生热固性树脂模塑制品的步骤，在加热制品的状态下使热固性树脂模制品塑性变形以产生热固性树脂变形制品的步骤，并且步骤 使得到的热固性树脂变形体碳化。